ONTO

SEC source: 0001325550-26-000002 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 171,687

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001325550-26-000002 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 180,606

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target.

SEC source: 0001889970-26-000002 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,977 shares

Expires 2026-02-14

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target.

SEC source: 0001889970-26-000002 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,499

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001889970-26-000002 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,000

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001889970-26-000002 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,094

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target.

SEC source: 0001325550-25-000004 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 162,161

F1 · shares: The shares of common stock reported in this transaction represent a bona-fide charitable gift to a Donor Advised Fund.

SEC source: 0002046735-25-000004 · edgardoc.xml · nonDerivative · entry 1

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 23,915

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

F2 · balance_after: Includes 145 shares purchased on June 30, 2025 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001976282-25-000004 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,342

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

F2 · balance_after: Includes 145 shares purchased on June 30, 2025 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0002022859-25-000077 · edgardoc.xml · nonDerivative · entry 1

Chen Shirley · CIK 0002074793 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,994

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000078 · edgardoc.xml · nonDerivative · entry 1

ROBERTS BRIAN K · CIK 0001259094 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,175

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000067 · edgardoc.xml · derivative · entry 4

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,695

Underlying: Common Stock · 2,695 shares

Expires 2028-03-03

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000067 · edgardoc.xml · derivative · entry 3

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,695

Underlying: Common Stock · 2,695 shares

Expires 2027-03-03

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000067 · edgardoc.xml · nonDerivative · entry 2

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 26,953

F2 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, beginning with the first vest date of March 3, 2026.

SEC source: 0002022859-25-000067 · edgardoc.xml · nonDerivative · entry 1

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,562

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, beginning with the first vest date of December 2, 2025.

SEC source: 0002022859-25-000063 · edgardoc.xml · nonDerivative · entry 1

Su May · CIK 0001918546 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,223

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0002022859-25-000062 · edgardoc.xml · nonDerivative · entry 1

SEAMS CHRISTOPHER A · CIK 0001212426 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 37,752

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0002022859-25-000061 · edgardoc.xml · nonDerivative · entry 1

SCHWARTZ STEPHEN S · CIK 0001247436 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,775

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0002022859-25-000060 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,931

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0002022859-25-000059 · edgardoc.xml · nonDerivative · entry 1

Lynch Susan D · CIK 0001784973 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,923

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0002022859-25-000058 · edgardoc.xml · nonDerivative · entry 1

Kelley Stephen Douglas · CIK 0001443674 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,623

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0002022859-25-000051 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 13,640

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000050 · edgardoc.xml · nonDerivative · entry 2

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,791

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000050 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,400

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000049 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,010

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000044 · edgardoc.xml · derivative · entry 3

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,884

Underlying: Common Stock · 1,884 shares

Expires 2028-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000044 · edgardoc.xml · derivative · entry 2

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,884

Underlying: Common Stock · 1,884 shares

Expires 2027-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000044 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,617

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000043 · edgardoc.xml · derivative · entry 3

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,286

Underlying: Common Stock · 1,286 shares

Expires 2028-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000043 · edgardoc.xml · derivative · entry 2

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,287

Underlying: Common Stock · 1,287 shares

Expires 2027-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000043 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,730

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000042 · edgardoc.xml · derivative · entry 3

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,470

Underlying: Common Stock · 1,470 shares

Expires 2028-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000042 · edgardoc.xml · derivative · entry 2

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,471

Underlying: Common Stock · 1,471 shares

Expires 2027-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000042 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,706

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000041 · edgardoc.xml · derivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,606

Underlying: Common Stock · 11,606 shares

Expires 2028-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000041 · edgardoc.xml · derivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,606

Underlying: Common Stock · 11,606 shares

Expires 2027-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000041 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 187,161

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000040 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,470

Underlying: Common Stock · 1,470 shares

Expires 2028-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000040 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,471

Underlying: Common Stock · 1,471 shares

Expires 2027-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002022859-25-000040 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,613

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002022859-25-000034 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,848

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

F2 · balance_after: Includes 5 shares purchased on December31, 2024 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0002022859-25-000032 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,765

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000033 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,156

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000030 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,672

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000031 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 163,949

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000024 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,978 shares

Expires 2025-02-14

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0002022859-25-000024 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,976

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000024 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,469

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002022859-25-000024 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,299

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0002022859-25-000023 · edgardoc.xml · derivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 11,825 shares

Expires 2025-02-14

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.