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OH Yoon Ah

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46688
SEC CIK
0001889970

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CompanyLast reported asReport datePublished
ONTO INNOVATION INC.ONTO · Entity 3340SVP, Gen Counsel & Corp SecMay 15, 2026May 18, 2026

Disclosed balances

About these balances

Latest available filing per company, not a reconstructed current portfolio. Matching sequences show the last reported balance with all source rows expandable; grouping alone does not establish account ownership. Do not add unresolved positions together. Filings may omit unchanged positions, and amendments may correct only part of an older disclosure. Jointly reported shares are not necessarily this owner's personal holdings.

ONTO INNOVATION INC.

Report date May 15, 2026 · Filed May 18, 2026

Security / awardOwnership accountDisclosed shares / unitsDisclosure context
Common StockSEC Table I · non-derivativeDirect21,110 Reported balance After 2026-05-15 transaction · row 1
1 source row

Row 1 · 2026-05-15 · Tax withholding · Disposed 530 · Balance 21,110

F1: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Filing footnotes · ownership attribution and instrument terms

F1: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Transaction history

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateCompanyActivity / securityShares / unitsReported priceReported valueDetails
May 15, 2026 Filed May 18, 2026 21:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 530 $271.77 $144,038.10
Disclosure

SEC source: 0001889970-26-000008 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,110

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
March 03, 2026 Filed Mar 4, 2026 21:44 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 417 $207.50 $86,527.50
Disclosure

SEC source: 0001889970-26-000006 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,640

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
March 02, 2026 Filed Mar 4, 2026 21:44 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,204 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000006 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,204

Underlying: Common Stock · 1,204 shares

Expires 2029-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
March 02, 2026 Filed Mar 4, 2026 21:44 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,204 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000006 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,204

Underlying: Common Stock · 1,204 shares

Expires 2028-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
March 02, 2026 Filed Mar 4, 2026 21:44 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,408 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000006 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 22,057

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document
March 01, 2026 Filed Mar 3, 2026 21:11 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionPerformance Stock Unit · Derivative 941 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000004 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 941 shares

Expires 2026-03-01

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

Read SEC document
March 01, 2026 Filed Mar 3, 2026 21:11 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 267 $215.89 $57,642.63
Disclosure

SEC source: 0001889970-26-000004 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,649

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
March 01, 2026 Filed Mar 3, 2026 21:11 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 307 $215.89 $66,278.23
Disclosure

SEC source: 0001889970-26-000004 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,916

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
March 01, 2026 Filed Mar 3, 2026 21:11 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionCommon Stock 724 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000004 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,223

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

Read SEC document
February 14, 2026 Filed Feb 18, 2026 21:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionPerformance Stock Unit · Derivative 1,977 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000002 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,977 shares

Expires 2026-02-14

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target.

Read SEC document
February 14, 2026 Filed Feb 18, 2026 21:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 501 $217.23 $108,832.23
Disclosure

SEC source: 0001889970-26-000002 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,499

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
February 14, 2026 Filed Feb 18, 2026 21:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 1,094 $217.23 $237,649.62
Disclosure

SEC source: 0001889970-26-000002 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,000

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
February 14, 2026 Filed Feb 18, 2026 21:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionCommon Stock 3,084 $0.00 $0.00
Disclosure

SEC source: 0001889970-26-000002 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,094

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target.

Read SEC document
May 15, 2025 Filed May 19, 2025 20:23 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 603 $98.04 $59,118.12
Disclosure

SEC source: 0002022859-25-000049 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,010

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
March 03, 2025 Filed Mar 5, 2025 21:12 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,470 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000040 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,470

Underlying: Common Stock · 1,470 shares

Expires 2028-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
March 03, 2025 Filed Mar 5, 2025 21:12 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,471 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000040 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,471

Underlying: Common Stock · 1,471 shares

Expires 2027-03-03

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
March 03, 2025 Filed Mar 5, 2025 21:12 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,941 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000040 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,613

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document
March 01, 2025 Filed Mar 3, 2025 21:13 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 304 $145.66 $44,280.64
Disclosure

SEC source: 0002022859-25-000030 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,672

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
February 14, 2025 Filed Feb 19, 2025 22:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionPerformance Stock Unit · Derivative 1,978 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000024 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,978 shares

Expires 2025-02-14

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.

Read SEC document
February 14, 2025 Filed Feb 19, 2025 22:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 493 $176.55 $87,039.15
Disclosure

SEC source: 0002022859-25-000024 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,976

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
February 14, 2025 Filed Feb 19, 2025 22:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 1,830 $176.55 $323,086.50
Disclosure

SEC source: 0002022859-25-000024 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,469

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
February 14, 2025 Filed Feb 19, 2025 22:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionCommon Stock 3,956 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000024 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,299

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.

Read SEC document
February 10, 2025 Filed Feb 12, 2025 22:13 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionPerformance Stock Unit · Derivative 1,360 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000013 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,360 shares

Expires 2025-02-10

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.

Read SEC document
February 10, 2025 Filed Feb 12, 2025 22:13 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionCommon Stock 2,720 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000013 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,343

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2025 as a result of the satisfaction of the performance criteria at 200% of the target.

Read SEC document
February 10, 2025 Filed Feb 12, 2025 22:13 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 1,016 $183.28 $186,212.48
Disclosure

SEC source: 0002022859-25-000013 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,623

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
February 10, 2025 Filed Feb 12, 2025 22:13 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 375 $183.28 $68,730.00
Disclosure

SEC source: 0002022859-25-000013 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,639

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
October 25, 2024 Filed Oct 28, 2024 20:27 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 1,296 $204.39 $264,889.44
Disclosure

SEC source: 0002022859-24-000038 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 13,014

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
May 15, 2024 Filed May 17, 2024 20:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 603 $233.63 $140,878.89
Disclosure

SEC source: 0002022859-24-000003 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,310

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Read SEC document
March 18, 2024 Filed Mar 18, 2024 20:21 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 1,685 $180.00 $303,300.00
Disclosure

SEC source: 0001257815-24-000037 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 14,913

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 15, 2023.

Read SEC document
March 15, 2024 Filed Mar 18, 2024 20:21 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 2,685 $173.96 $467,082.60
Disclosure

SEC source: 0001257815-24-000037 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 16,598

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 15, 2023.

Read SEC document
March 01, 2024 Filed Mar 5, 2024 21:39 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 941 $0.00 $0.00
Disclosure

SEC source: 0001257815-24-000030 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 941

Underlying: Common Stock · 941 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
March 01, 2024 Filed Mar 5, 2024 21:39 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 941 $0.00 $0.00
Disclosure

SEC source: 0001257815-24-000030 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 941

Underlying: Common Stock · 941 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
March 01, 2024 Filed Mar 5, 2024 21:39 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 1,883 $0.00 $0.00
Disclosure

SEC source: 0001257815-24-000030 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,283

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document
February 14, 2024 Filed Feb 16, 2024 21:03 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 493 $173.08 $85,328.44
Disclosure

SEC source: 0001257815-24-000017 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,400

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

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February 10, 2024 Filed Feb 12, 2024 21:41 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionPerformance Stock Unit · Derivative 1,361 $0.00 $0.00
Disclosure

SEC source: 0001257815-24-000006 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,361 shares

Expires 2024-02-10

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

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February 10, 2024 Filed Feb 12, 2024 21:41 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionCommon Stock 2,722 $0.00 $0.00
Disclosure

SEC source: 0001257815-24-000006 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,893

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

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February 10, 2024 Filed Feb 12, 2024 21:41 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 1,395 $180.01 $251,113.95
Disclosure

SEC source: 0001257815-24-000006 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,171

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

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October 25, 2023 Filed Oct 26, 2023 20:36 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 795 $111.16 $88,372.20
Disclosure

SEC source: 0001257815-23-000098 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,566

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

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May 15, 2023 Filed May 16, 2023 22:15 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 3,746 $0.00 $0.00
Disclosure

SEC source: 0001257815-23-000059 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,361

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

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February 14, 2023 Filed Feb 16, 2023 13:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,977 $0.00 $0.00
Disclosure

SEC source: 0001257815-23-000032 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,977

Underlying: Common Stock · 1,977 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

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February 14, 2023 Filed Feb 16, 2023 13:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,978 $0.00 $0.00
Disclosure

SEC source: 0001257815-23-000032 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,978

Underlying: Common Stock · 1,978 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

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February 14, 2023 Filed Feb 16, 2023 13:31 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 3,955 $0.00 $0.00
Disclosure

SEC source: 0001257815-23-000032 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,615

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

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February 10, 2023 Filed Feb 13, 2023 21:33 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 318 $80.90 $25,726.20
Disclosure

SEC source: 0001257815-23-000017 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,660

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

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October 25, 2022 Filed Oct 26, 2022 20:53 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 787 $67.30 $52,965.10
Disclosure

SEC source: 0001407682-22-000067 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,978

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

Read SEC document
February 10, 2022 Filed Feb 14, 2022 21:36 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,360 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000031 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,360

Underlying: Common Stock · 1,360 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 10, 2022 Filed Feb 14, 2022 21:36 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,361 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000031 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,361

Underlying: Common Stock · 1,361 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

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February 10, 2022 Filed Feb 14, 2022 21:36 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,722 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000031 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,765

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

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October 25, 2021 Filed Oct 26, 2021 20:53 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 8,043 $0.00 $0.00
Disclosure

SEC source: 0001407682-21-000126 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 8,043

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.