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person · Reporting owner

Chen Shirley

Disclosed activity across 1 company

Tapewire entity
10309
SEC CIK
0002074793

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Reported relationships

Latest disclosed role at each company.

CompanyLast reported asReport datePublished
ONTO INNOVATION INC.ONTO · Entity 3340Senior Vice President of CustoSeptember 02, 2026September 04, 2026

Disclosed balances

About these balances

Latest available filing per company, not a reconstructed current portfolio. Matching sequences show the last reported balance with all source rows expandable; grouping alone does not establish account ownership. Do not add unresolved positions together. Filings may omit unchanged positions, and amendments may correct only part of an older disclosure. Jointly reported shares are not necessarily this owner's personal holdings.

ONTO INNOVATION INC.

Report date September 02, 2026 · Filed September 04, 2026

Security / awardOwnership accountDisclosed shares / unitsDisclosure context
Common StockSEC Table I · non-derivativeDirect14,001 Reported balance After 2026-09-02 transaction · row 1
1 source row

Row 1 · 2026-09-02 · Tax withholding · Disposed 1,516 · Balance 14,001

F1: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Filing footnotes · ownership attribution and instrument terms

F1: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

Transaction history

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateCompanyActivity / securityShares / unitsReported priceReported valueDetails
September 02, 2026 Filed Sep 4, 2026 23:40 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 1,516 $254.55 $385,897.80
Disclosure

SEC source: 0002074793-26-000008 · edgardoc.xml · nonDerivative · entry 1

Chen Shirley · CIK 0002074793 · Senior Vice President of Custo

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,001

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

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March 02, 2026 Filed Mar 4, 2026 21:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,261 $0.00 $0.00
Disclosure

SEC source: 0002074793-26-000002 · edgardoc.xml · derivative · entry 3

Chen Shirley · CIK 0002074793 · SVP Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,261

Underlying: Common Stock · 1,261 shares

Expires 2029-03-02

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

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March 02, 2026 Filed Mar 4, 2026 21:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,261 $0.00 $0.00
Disclosure

SEC source: 0002074793-26-000002 · edgardoc.xml · derivative · entry 2

Chen Shirley · CIK 0002074793 · SVP Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,261

Underlying: Common Stock · 1,261 shares

Expires 2028-03-02

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

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March 02, 2026 Filed Mar 4, 2026 21:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,523 $0.00 $0.00
Disclosure

SEC source: 0002074793-26-000002 · edgardoc.xml · nonDerivative · entry 1

Chen Shirley · CIK 0002074793 · SVP Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,517

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

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September 02, 2025 Filed Sep 3, 2025 20:08 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 12,994 $0.00 $0.00
Disclosure

SEC source: 0002022859-25-000077 · edgardoc.xml · nonDerivative · entry 1

Chen Shirley · CIK 0002074793 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,994

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.