ONTO

SEC source: 0001233488-26-000007 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 10,692

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 11, 2026

SEC source: 0001259094-26-000007 · edgardoc.xml · nonDerivative · entry 1

ROBERTS BRIAN K · CIK 0001259094 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,032

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002074793-26-000008 · edgardoc.xml · nonDerivative · entry 1

Chen Shirley · CIK 0002074793 · Senior Vice President of Custo

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,001

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001259094-26-000005 · edgardoc.xml · nonDerivative · entry 1

ROBERTS BRIAN K · CIK 0001259094 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,032

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001784973-26-000007 · edgardoc.xml · nonDerivative · entry 1

Lynch Susan D · CIK 0001784973 · Director

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 2,684

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on May 22, 2026.

SEC source: 0001918546-26-000003 · edgardoc.xml · nonDerivative · entry 1

Su May · CIK 0001918546 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,984

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. The Reporting Person has elected to defer settlement of these RSUs pursuant to the Onto Innovation Nonqualified Deferred Compensation Plan. Once vested, the shares will be issued in accordance with the Reporting Person's deferral election.

SEC source: 0001212426-26-000003 · edgardoc.xml · nonDerivative · entry 1

SEAMS CHRISTOPHER A · CIK 0001212426 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 38,513

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0001247436-26-000003 · edgardoc.xml · nonDerivative · entry 1

SCHWARTZ STEPHEN S · CIK 0001247436 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 3,536

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. The Reporting Person has elected to defer settlement of these RSUs pursuant to the Onto Innovation Nonqualified Deferred Compensation Plan. Once vested, the shares will be issued in accordance with the Reporting Person's deferral election.

SEC source: 0001233488-26-000003 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,692

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0001784973-26-000004 · edgardoc.xml · nonDerivative · entry 1

Lynch Susan D · CIK 0001784973 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 3,684

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. The Reporting Person has elected to defer settlement of these RSUs pursuant to the Onto Innovation Nonqualified Deferred Compensation Plan. Once vested, the shares will be issued in accordance with the Reporting Person's deferral election.

SEC source: 0001443674-26-000008 · edgardoc.xml · nonDerivative · entry 1

Kelley Stephen Douglas · CIK 0001443674 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,384

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

SEC source: 0001976282-26-000006 · edgardoc.xml · nonDerivative · entry 2

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,593

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001976282-26-000006 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,218

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001889970-26-000008 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,110

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0002046735-26-000002 · edgardoc.xml · nonDerivative · entry 2

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 26,536

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001976282-26-000004 · edgardoc.xml · nonDerivative · entry 2

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,436

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001325550-26-000006 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 179,242

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001889970-26-000006 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,640

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001259094-26-000002 · edgardoc.xml · derivative · entry 3

ROBERTS BRIAN K · CIK 0001259094 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,548

Underlying: Common Stock · 1,548 shares

Expires 2029-03-02

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001259094-26-000002 · edgardoc.xml · derivative · entry 2

ROBERTS BRIAN K · CIK 0001259094 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,548

Underlying: Common Stock · 1,548 shares

Expires 2028-03-02

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001259094-26-000002 · edgardoc.xml · nonDerivative · entry 1

ROBERTS BRIAN K · CIK 0001259094 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,271

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002046735-26-000002 · edgardoc.xml · derivative · entry 4

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,720

Underlying: Common Stock · 1,720 shares

Expires 2029-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002046735-26-000002 · edgardoc.xml · derivative · entry 3

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,720

Underlying: Common Stock · 1,720 shares

Expires 2028-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002046735-26-000002 · edgardoc.xml · nonDerivative · entry 1

Dolev Ido · CIK 0002046735 · EVP, Prod Solutions Grp

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 27,355

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001976282-26-000004 · edgardoc.xml · derivative · entry 4

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,548

Underlying: Common Stock · 1,548 shares

Expires 2029-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001976282-26-000004 · edgardoc.xml · derivative · entry 3

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,548

Underlying: Common Stock · 1,548 shares

Expires 2028-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001976282-26-000004 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,051

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001325550-26-000006 · edgardoc.xml · derivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,239

Underlying: Common Stock · 7,239 shares

Expires 2029-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001325550-26-000006 · edgardoc.xml · derivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,239

Underlying: Common Stock · 7,239 shares

Expires 2028-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001325550-26-000006 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 182,984

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001889970-26-000006 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,204

Underlying: Common Stock · 1,204 shares

Expires 2029-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001889970-26-000006 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,204

Underlying: Common Stock · 1,204 shares

Expires 2028-03-02

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001889970-26-000006 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 22,057

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0002074793-26-000002 · edgardoc.xml · derivative · entry 3

Chen Shirley · CIK 0002074793 · SVP Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,261

Underlying: Common Stock · 1,261 shares

Expires 2029-03-02

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002074793-26-000002 · edgardoc.xml · derivative · entry 2

Chen Shirley · CIK 0002074793 · SVP Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,261

Underlying: Common Stock · 1,261 shares

Expires 2028-03-02

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0002074793-26-000002 · edgardoc.xml · nonDerivative · entry 1

Chen Shirley · CIK 0002074793 · SVP Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,517

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001976282-26-000002 · edgardoc.xml · derivative · entry 4

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 844 shares

Expires 2026-03-01

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

SEC source: 0001976282-26-000002 · edgardoc.xml · nonDerivative · entry 3

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,368

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001976282-26-000002 · edgardoc.xml · nonDerivative · entry 2

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,644

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001976282-26-000002 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,991

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

SEC source: 0001325550-26-000004 · edgardoc.xml · derivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 5,971 shares

Expires 2026-03-01

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

SEC source: 0001325550-26-000004 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 168,505

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001325550-26-000004 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 170,430

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001325550-26-000004 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 172,652

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

SEC source: 0001889970-26-000004 · edgardoc.xml · derivative · entry 4

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 941 shares

Expires 2026-03-01

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

SEC source: 0001889970-26-000004 · edgardoc.xml · nonDerivative · entry 3

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,649

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001889970-26-000004 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,916

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001889970-26-000004 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · SVP, Gen Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,223

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.

SEC source: 0001325550-26-000002 · edgardoc.xml · derivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 11,824 shares

Expires 2026-02-14

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target.

SEC source: 0001325550-26-000002 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 168,055

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.