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AXCELIS TECHNOLOGIES INC

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4152
SEC CIK
0001113232
Parsed reports
476

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0 purchase rows · 23 sale rows

Disclosed non-derivative P/S rows, by transaction month. Includes amendments and private transactions.
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MonthPurchasesSales
Nov 202500
Dec 202502
Jan 202600
Feb 202601
Mar 202601
Apr 202601
May 2026016
Jun 202602
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Aug 202600
Sep 202600
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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateOwner / reported roleActivity / securityShares / unitsReported priceReported valueDetails
February 28, 2022 Filed Mar 2, 2022 22:04 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
Tax withholdingCommon Stock 2,416 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014863 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 42,894

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 32,518 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,028 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:02 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
Tax withholdingCommon Stock 2,547 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014853 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 51,225

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 29,509 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:02 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
Tax withholdingCommon Stock 2,307 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014853 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,772

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 35,402 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,893 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:01 UTC
BREWER KEVIN JEVP & Chief Financial Officer
Tax withholdingCommon Stock 2,909 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014844 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 66,761

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 40,389 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:01 UTC
BREWER KEVIN JEVP & Chief Financial Officer
Tax withholdingCommon Stock 3,688 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014844 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,670

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 46,947 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,558 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:00 UTC
Bintz William JEVP, Product Development
Tax withholdingCommon Stock 2,117 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014834 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,656

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 31,346 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:00 UTC
Bintz William JEVP, Product Development
Tax withholdingCommon Stock 1,852 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014834 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,773

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 37,029 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,683 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:00 UTC
PUMA MARY GDirector · President and CEO
Tax withholdingCommon Stock 9,695 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014830 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 404,901

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units,114,586 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

Read SEC document
February 28, 2022 Filed Mar 2, 2022 22:00 UTC
PUMA MARY GDirector · President and CEO
Tax withholdingCommon Stock 9,664 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014830 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 414,596

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 136,444 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 21,858 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

Read SEC document
February 25, 2022 Filed Feb 28, 2022 16:49 UTC SaleCommon Stock 3,000 $69.05 $207,150.00
Disclosure

SEC source: 0001209191-22-013627 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,686

Read SEC document
February 10, 2022 Filed Feb 10, 2022 21:35 UTC SaleCommon Stock 3,000 $72.81 $218,430.00
Disclosure

SEC source: 0001209191-22-008484 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,936

Read SEC document
December 08, 2021 Filed Dec 9, 2021 19:01 UTC SaleCommon Stock 3,000 $69.00 $207,000.00
Disclosure

SEC source: 0001209191-21-068864 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,686

F1 · balance_after: Of the shares held as of August 27, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
November 22, 2021 Filed Nov 22, 2021 21:35 UTC SaleCommon Stock 3,497 $64.58 $225,836.26
Disclosure

SEC source: 0001209191-21-066106 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,439

F1 · kind: This sale of shares was made to cover the tax liability incident to the vesting of shares on November 17, 2021 under a restricted stock unit granted to the director on May 17, 2021.

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $64.52 to $64.58, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

Read SEC document
November 11, 2021 Filed Nov 12, 2021 13:40 UTC
PUMA MARY GDirector · President and CEO
SaleCommon Stock 1,000 $62.06 $62,060.00
Disclosure

SEC source: 0001209191-21-064034 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · Held by spouse

Disclosed balance after: 5,000

Read SEC document
November 08, 2021 Filed Nov 8, 2021 22:28 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
SaleCommon Stock 1,217 $62.41 $75,952.97
Disclosure

SEC source: 0001209191-21-063420 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,958

F1 · balance_after: Of the shares held as of November 8, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
November 08, 2021 Filed Nov 8, 2021 22:29 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
SaleCommon Stock 6,329 $62.27 $394,106.83
Disclosure

SEC source: 0001209191-21-063422 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,151

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $61.84 to $62.62, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 8, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
September 15, 2021 Filed Sep 15, 2021 20:30 UTC
PUMA MARY GDirector · President and CEO
GiftCommon Stock 10,425 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-056175 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 409,688

F1 · price: These shares of Common Stock were donated by the executive as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F2 · balance_after: Of the shares held as of September 15, 2021, 143,661 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 31, 2021 Filed Aug 31, 2021 20:07 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
SaleCommon Stock 655 $49.63 $32,507.65
Disclosure

SEC source: 0001209191-21-054061 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,175

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.62 to $49.67, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 31, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 30, 2021 Filed Aug 30, 2021 21:04 UTC SaleCommon Stock 3,500 $50.32 $176,120.00
Disclosure

SEC source: 0001209191-21-053855 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,936

F1 · kind: This sale of shares was made to cover the tax liability incident to the 2020 vesting of shares on restricted stock units previously granted to the director.

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $50.27 to $50.49, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F3 · balance_after: Of the shares held as of August 30, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 30, 2021 Filed Aug 30, 2021 21:03 UTC
Low RussellEVP, Engineering
Exercise / conversionStock option (right to buy) · Derivative 5,475 $0.00 Strike: $14.00 $0.00
Disclosure

SEC source: 0001209191-21-053853 · doc4.xml · derivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 5,475 shares

Expires 2023-11-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

Read SEC document
August 30, 2021 Filed Aug 30, 2021 21:03 UTC
Low RussellEVP, Engineering
SaleCommon Stock 3,305 $50.63 $167,332.15
Disclosure

SEC source: 0001209191-21-053853 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 71,331

F1 · balance_after: Of the shares beneficially owned by the executive on August 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

Read SEC document
August 30, 2021 Filed Aug 30, 2021 21:03 UTC
Low RussellEVP, Engineering
Exercise / conversionCommon Stock 5,475 $14.00 $76,650.00
Disclosure

SEC source: 0001209191-21-053853 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 74,636

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares beneficially owned by the executive on August 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

Read SEC document
August 27, 2021 Filed Aug 27, 2021 20:20 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
SaleCommon Stock 6,252 $50.58 $316,226.16
Disclosure

SEC source: 0001209191-21-053619 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,480

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $50.50 to $50.76, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 27, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 27, 2021 Filed Aug 27, 2021 20:18 UTC
BREWER KEVIN JEVP & Chief Financial Officer
SaleCommon Stock 8,656 $50.39 $436,175.84
Disclosure

SEC source: 0001209191-21-053614 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 68,986

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $50.00 to $50.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 26, 2021 and August 27, 2021, 50,889 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 26, 2021 Filed Aug 27, 2021 16:19 UTC SaleCommon Stock 5,000 $48.49 $242,450.00
Disclosure

SEC source: 0001209191-21-053616 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,585

F1 · balance_after: Of the shares held as of August 27, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 26, 2021 Filed Aug 27, 2021 20:18 UTC
BREWER KEVIN JEVP & Chief Financial Officer
SaleCommon Stock 9,409 $49.10 $461,981.90
Disclosure

SEC source: 0001209191-21-053614 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 77,642

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.00 to $49.22, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 26, 2021 and August 27, 2021, 50,889 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 25, 2021 Filed Aug 25, 2021 20:44 UTC
Bintz William JEVP, Product Development
SaleCommon Stock 15,061 $49.09 $739,344.49
Disclosure

SEC source: 0001209191-21-053326 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,836

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.00 to $49.59, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 25, 2021, 39,547 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 13, 2021 Filed Aug 16, 2021 20:16 UTC SaleCommon Stock 3,500 $42.86 $150,010.00
Disclosure

SEC source: 0001209191-21-051625 · doc4.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,681

F1 · kind: This sale of 3,500 shares was made to cover the tax liability incident to the vesting of 15,339 shares during 2020 under restricted stock units granted to the director in 2019 and 2020.

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $42.85 to $42.91, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F3 · balance_after: Of the shares held as of August 13, 2021, 9,842 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
August 09, 2021 Filed Aug 9, 2021 20:25 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
SaleCommon Stock 4,978 $44.00 $219,032.00
Disclosure

SEC source: 0001209191-21-050403 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 64,732

F1 · balance_after: Of the shares held as of August 9, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 24, 2021 Filed May 24, 2021 20:38 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
SaleCommon Stock 4,022 $40.50 $162,891.00
Disclosure

SEC source: 0001209191-21-035337 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,830

F1 · balance_after: Of the shares held as of May 24, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 21, 2021 Filed May 21, 2021 20:40 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
SaleCommon Stock 5,829 $40.28 $234,792.12
Disclosure

SEC source: 0001209191-21-034945 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,852

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $40.20 to $40.78, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 21, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 16:37 UTC GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033174 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,686

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 20:40 UTC GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033180 · doc4.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,204

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 9,842 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 20:39 UTC GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033178 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 29,436

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 20:38 UTC GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033175 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,936

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 20:36 UTC GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033172 · doc4.xml · nonDerivative · entry 1

George Arthur L Jr · CIK 0001360852 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,936

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 20:36 UTC GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033170 · doc4.xml · nonDerivative · entry 1

FAUBERT RICHARD J · CIK 0001230508 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 45,936

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 17, 2021 20:35 UTC
Chiu Tzu YinDirector
GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033168 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,884

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 4,907 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:35 UTC
PUMA MARY GDirector · President and CEO
GrantCommon Stock 29,144 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033627 · doc4.xml · nonDerivative · entry 6

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 420,113

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 143,661 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:35 UTC
PUMA MARY GDirector · President and CEO
GrantCommon Stock 29,144 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033627 · doc4.xml · nonDerivative · entry 5

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 390,969

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 114,517 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:35 UTC
PUMA MARY GDirector · President and CEO
Tax withholdingCommon Stock 3,812 $38.16 $145,465.92
Disclosure

SEC source: 0001209191-21-033627 · doc4.xml · nonDerivative · entry 4

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 361,825

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 85,373 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:33 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
GrantCommon Stock 6,703 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 6

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,681

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:33 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
GrantCommon Stock 6,703 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 5

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 46,978

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 27,910 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:33 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
Tax withholdingCommon Stock 971 $38.16 $37,053.36
Disclosure

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,275

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 21,207 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:34 UTC
Low RussellEVP, Engineering
GrantCommon Stock 8,160 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 6

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,161

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 40,711 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:34 UTC
Low RussellEVP, Engineering
GrantCommon Stock 8,160 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,001

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 32,551 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:34 UTC
Low RussellEVP, Engineering
Tax withholdingCommon Stock 1,109 $38.16 $42,319.44
Disclosure

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,841

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 24,391 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 17, 2021 Filed May 18, 2021 21:32 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
GrantCommon Stock 7,857 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033621 · doc4.xml · nonDerivative · entry 6

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,710

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 17, 2021 Filed May 18, 2021 21:32 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
GrantCommon Stock 7,857 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033621 · doc4.xml · nonDerivative · entry 5

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,853

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 29,064 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 17, 2021 Filed May 18, 2021 21:32 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
Tax withholdingCommon Stock 971 $38.16 $37,053.36
Disclosure

SEC source: 0001209191-21-033621 · doc4.xml · nonDerivative · entry 4

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,996

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 21,207 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.