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Chiu Tzu Yin

Disclosed activity across 1 company

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46554
SEC CIK
0001738290

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CompanyLast reported asReport datePublished
AXCELIS TECHNOLOGIES INCACLS · Entity 4152DirectorMay 15, 2026May 18, 2026

Disclosed balances

About these balances

Latest available filing per company, not a reconstructed current portfolio. Matching sequences show the last reported balance with all source rows expandable; grouping alone does not establish account ownership. Do not add unresolved positions together. Filings may omit unchanged positions, and amendments may correct only part of an older disclosure. Jointly reported shares are not necessarily this owner's personal holdings.

AXCELIS TECHNOLOGIES INC

Report date May 15, 2026 · Filed May 18, 2026

Security / awardOwnership accountDisclosed shares / unitsDisclosure context
Common StockSEC Table I · non-derivativeDirect11,843 Reported balance After 2026-05-15 transaction · row 1 Account or security details depend on footnotes; rows are not merged.
1 source row

Row 1 · 2026-05-15 · Grant · Acquired 1,440 · Balance 11,843

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

F2: Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Filing footnotes · ownership attribution and instrument terms

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

F2: Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Transaction history

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateCompanyActivity / securityShares / unitsReported priceReported valueDetails
May 15, 2026 Filed May 18, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,440 $0.00 $0.00
Disclosure

SEC source: 0001738290-26-000003 · form4-05182026_050501.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,843

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027.

F2 · balance_after: Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2025 Filed May 15, 2025 21:00 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 3,586 $0.00 $0.00
Disclosure

SEC source: 0001415889-25-013220 · form4-05152025_050526.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,403

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2024 Filed May 15, 2024 20:15 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,162 $0.00 $0.00
Disclosure

SEC source: 0001415889-24-013220 · form4-05152024_040512.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,317

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2025.

F2 · balance_after: Of the shares held as of May 15, 2024, 1,162 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2024 Filed May 16, 2024 20:15 UTC Amendment AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,662 $0.00 $0.00
Disclosure

SEC source: 0001415889-24-013328 · form4a-05162024_040535.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,817

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2025.

F2 · balance_after: Of the shares held as of May 15, 2024, 1,662 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2023 Filed May 16, 2023 20:21 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 SaleCommon Stock 15,000 $129.50 $1,942,500.00
Disclosure

SEC source: 0001209191-23-029797 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,155

F1 · balance_after: Of the shares held as of May 16, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2023 Filed May 15, 2023 20:29 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,282 $0.00 $0.00
Disclosure

SEC source: 0001209191-23-029462 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,155

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 09, 2023 Filed May 9, 2023 20:12 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 SaleCommon Stock 10,000 $118.50 $1,185,000.00
Disclosure

SEC source: 0001209191-23-028241 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,873

F1 · balance_after: Of the shares held as of May 9, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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February 01, 2023 Filed Feb 14, 2023 21:00 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 SaleCommon Stock 1,700 $127.12 $216,104.00
Disclosure

SEC source: 0001209191-23-009084 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,873

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.01 to $127.15, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 14, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:26 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029136 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,573

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 17, 2021 Filed May 17, 2021 20:35 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 3,497 $0.00 $0.00
Disclosure

SEC source: 0001209191-21-033168 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,884

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 4,907 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2020 Filed May 15, 2020 12:46 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 6,881 $0.00 $0.00
Disclosure

SEC source: 0001209191-20-029471 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,387

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2020.

F2 · balance_after: Of the shares held as of May 15, 2020, 11,109 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2019 Filed May 15, 2019 21:14 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 6,232 $0.00 $0.00
Disclosure

SEC source: 0001209191-19-030084 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,506

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2019.

F2 · balance_after: Of the shares held as of May 15, 2019, 11,869 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2018 Filed May 17, 2018 12:10 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 5,637 $0.00 $0.00
Disclosure

SEC source: 0001209191-18-030755 · doc4.xml · nonDerivative · entry 2

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,274

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022.

F2 · balance_after: All of the shares held as of May 16, 2018, were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2018 Filed May 17, 2018 12:10 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 5,637 $0.00 $0.00
Disclosure

SEC source: 0001209191-18-030755 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 5,637

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 16, 2018.

F2 · balance_after: All of the shares held as of May 16, 2018, were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.