PUMA MARY G

SEC source: 0001193125-26-339114 · ownership.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,734

F1 · shares: Represents an award of fully vested, unrestricted shares of the Issuer's Common Stock granted to the reporting person as annual non-employee director equity compensation pursuant to the Company's Annual Non-Employee Director Compensation Program.

SEC source: 0001101302-26-000111 · wk-form4_1778259292.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,516

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2027 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on May 6, 2026 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001158015-26-000004 · edgardoc.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,477

F1 · shares: Restricted stock units (RSUs) vest in full on the first anniversary of the date of the grant.

F2 · balance_after: Shares reported include unvested Restricted Stock Units (RSUs).

SEC source: 0001158015-26-000002 · wk-form4_1770767333.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 25,398

F1 · shares: Represents a restricted stock unit award that is scheduled to vest in full on the earlier of February 6, 2027 or the date of the annual meeting of stockholders at which the reporting person's term expires, subject to the reporting person's continued service through the vesting date.

SEC source: 0000950170-25-105863 · ownership.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,483

F1 · shares: Transaction reported relates solely to an award of Restricted Stock Units ("RSUs"). Each RSU represents a contingent right to receive one share of common stock. The RSUs will vest on the date of the next annual meeting following the grant date.

SEC source: 0001158015-25-000006 · wk-form4_1745614706.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,104

F1 · security: This Form 4 was originally filed on April 25, 2025, but was inadvertently filed under the incorrect reporting person (Entegris, Inc.) and was assigned accession number 0001101302-25-000048. This Form 4 is being filed to report the identified transactions for the correct reporting person (Mary Puma). The prior Form 4 report filed in error should be disregarded.

F2 · shares: These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2026 Annual Meeting of Stockholders.

F3 · price: These shares were awarded on April 23, 2025 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001158015-25-000004 · edgardoc.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,872

F1 · shares: Restricted stock units (RSUs) vest in full on the first anniversary of the date of the grant.

F2 · balance_after: Shares reported include unvested Restricted Stock Units (RSUs).

SEC source: 0001616533-25-000013 · wk-form4_1739308983.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,364

F1 · shares: Represents a restricted share unit award that is scheduled to vest in full on the earlier of February 7, 2026 or the date of the annual general meeting of shareholders at which the reporting person's term expires, subject to the reporting person's continued service through the vesting date.

SEC source: 0001101302-24-000063 · wk-form4_1725644195.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,207

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2025 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on September 5, 2024 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0000950170-24-094768 · ownership.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,551

F1 · shares: Transaction reported relates solely to an award of Restricted Stock Units ("RSUs"). Each RSU represents a contingent right to receive one share of common stock. The RSUs will vest on the date of the next annual meeting following the grant date.

SEC source: 0001415889-24-012988 · form4-05132024_040507.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · EXECUTIVE CHAIRPERSON

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 231,976

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on May 9, 2024 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 9, 2024.

F3 · balance_after: Of the shares held as of May 9, 2024, after the acceleration of vesting, 5,252 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001158015-24-000002 · edgardoc.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,134

F1 · shares: Restricted stock units (RSUs) vest in full on the first anniversary of the date of the grant.

F2 · balance_after: Shares reported include unvested Restricted Stock Units (RSUs).

SEC source: 0001415889-24-006102 · form4-03012024_040303.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · EXECUTIVE CHAIRPERSON

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 249,370

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of PRSUs granted to the executive in May 2023. Of the granted units, 135% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2024, and all of the earned shares vested on February 28, 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F5 · balance_after: Of the shares held as of February 28, 2024 after the vesting of both the 2022 PRSUs and 2023 PRSUs, 41,223 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-006102 · form4-03012024_040303.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · EXECUTIVE CHAIRPERSON

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 256,198

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of the remainder of performance based restricted stock units ("PRSUs") granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023, and half of the earned shares vested on February 28, 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F3 · balance_after: Of the shares held as of February 28, 2024 after the vesting of the 2022 PRSUs and before the vesting of the 2023 PRSUs, 57,447 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0000950170-23-054387 · ownership.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,678

F1 · shares: Represents an award of Restricted Stock Unites ("RSUs"). Each RSU represents a contingent right to receive one share of common stock. The RSUs will vest on the date of the next annual meeting following the grant date.

SEC source: 0000950170-23-046558 · ownership.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,696

F1 · shares: Restricted Stock Units (RSUs) vest in full on September 20, 2024.

F2 · balance_after: Shares reported include unvested Restricted Stock Units (RSUs).

SEC source: 0001610717-23-000206 · form4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,967

F1 · shares: Represents a restricted share unit award that is scheduled to vest as to 4,400 units on July 17, 2024 and as to the remainder of the award on January 31, 2025.

SEC source: 0000072331-23-000129 · wk-form4_1689644920.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,835

F1 · balance_after: The total holdings include 22 shares accrued from dividend payments through participation in the Company's Deferred Compensation Plans and 6 shares accrued from divdend payments through participation in the Company's Dividend Reinvestment Plan.

SEC source: 0001209191-23-036279 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 263,058

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $181.78 to $182.27, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held on June 12, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-048717 · doc4a.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 258,280

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $181.78 to $182.27, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held on June 12, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F3 · balance_after: This number of securities owned after the reported sale has been amended. See Remarks.

SEC source: 0001209191-23-035075 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 274,858

F3 · price: These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F2 · balance_after: Of the shares held on June 7, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035075 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 278,985

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $173.37 to $173.69, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held on June 7, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032150 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 300,686

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $151.71 to $151.99, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 67,420 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 4

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 315,630

F7 · price: These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F8 · balance_after: Of the shares held after this gift on May 18, 2023, 67,420 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 320,408

F5 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.45 to $141.60, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F6 · balance_after: Of the shares held after this sale on May 18, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 328,986

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 332,218

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 74,706 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029946 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 334,548

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 79,958 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029946 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 339,380

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 90,853 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029946 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 344,430

F1 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment, 100% of the earned shares will vest on February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2024.

F2 · balance_after: Of the shares held after the grant on May 15, 2023, 102,239 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-028738 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 332,412

F1 · balance_after: Of the shares held as of May 11, 2023, 90,221 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-014101 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 354,117

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 90,221 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-014101 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 360,406

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 104,401 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 141,80 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-008706 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 361,605

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.77 to $126.14, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

SEC source: 0001209191-23-008706 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 363,905

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $124.75 to $125.57, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-061444 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 386,402

F1 · price: These shares of Common Stock were donated by the executive as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F2 · balance_after: Of the shares held as of December 14, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-060361 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 393,511

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.07 to $80.68, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of December 8, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-059825 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 397,713

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.05 to $80.20, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of December 1, 2022 and December 5, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-059825 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 400,410

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.12, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of December 1, 2022 and December 5, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058855 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 401,910

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.10, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 23, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0000072331-22-000113 · wf-form4_166741634410335.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,906

F1 · shares: On November 1, 2022, the Company awarded 730 restricted stock units an as annual grant to non-employee directors, valued at the fourth quarter average stock price of $225.93 per share. Such shares vest on October 31, 2023 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date.

F2 · balance_after: The total holdings include 25 shares accrued from dividend payments through participation in the Company's Deferred Compensation Plans and 5 shares accrued from divdend payments through participation in the Company's Dividend Reinvestment Plan.

SEC source: 0001209191-22-045593 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 405,908

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.83 to $76.19, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 12, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 6

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 419,196

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 118,906 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 5

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 422,428

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 126,192 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 4

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 401,420

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 105,184 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 380,412

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 84,176 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 384,019

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 92,307 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 388,851

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 103,201 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-019280 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 393,901

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $69.00 to $69.71, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of March 16, 2022, 114,586 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-014830 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 404,901

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units,114,586 shares were issuable on vesting of restricted stock units which are subject to forfeiture.