KEITHLEY JOSEPH P

SEC source: 0001209191-23-058632 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 3,157

F1 · balance_after: Of the shares held as of December 14, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-054922 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,157

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $130.41 to $130.48, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 10, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-037053 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,157

F1 · balance_after: Of the shares held as of June 12, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035065 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,657

F1 · balance_after: Of the shares held as of June 7, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-034768 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,657

F1 · balance_after: Of the shares held as of June 6, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032268 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,657

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.17 to $152.25, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-034761 · doc4a.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,657

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.17 to $152.25, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030995 · doc4.xml · nonDerivative · entry 3

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,657

F1 · balance_after: Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030995 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,657

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.60 to $141.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030995 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,657

F1 · balance_after: Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029871 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,657

F1 · balance_after: Of the shares held as of May 16, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029450 · doc4.xml · nonDerivative · entry 3

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,657

F4 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F5 · balance_after: Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029450 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,375

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.71 to $127.91, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after this sale on May 15, 2023, 2,689 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029450 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,375

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.01 to $125.23, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after this sale on May 15, 2023, 2,689 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008714 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,375

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $123.25 to $123.59, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008714 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,375

F1 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-061186 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,375

F1 · balance_after: Of the shares held as of December 14, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-059102 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,375

F1 · balance_after: Of the shares held as of November 30, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-056474 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,375

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $74.00 to $74.08, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 10, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-047489 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,375

F1 · balance_after: Of the shares held as of August 25, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-029142 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,375

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-013627 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,686

SEC source: 0001209191-21-068864 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,686

F1 · balance_after: Of the shares held as of August 27, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-053616 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,585

F1 · balance_after: Of the shares held as of August 27, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033174 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,686

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021.

F2 · balance_after: Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-011354 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,189

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $40.20 to $40.34, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

SEC source: 0001209191-20-056674 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 51,497

F1 · shares: On November 2, 2020, the Company awarded 662 restricted stock as an annual grant to non-employee directors, valued at the fourth quarter average stock price of $196.27 per share. Such shares vest on October 31, 2021 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date.

F2 · balance_after: The total holdings include 7 shares accrued from dividend payments through participation in the Company's Dividend Reinvestment Plan and 454 shares accrued from dividend payments through participation in the Company's Amended and Restated 2005 Deferred Compensation Plan.

SEC source: 0001209191-20-029479 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,189

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2020.

F2 · balance_after: Of the shares held as of May 15, 2020, 6,881 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-055092 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 50,374

F1 · shares: On November 1, 2019, the Company awarded 812 restricted stock as an annual grant to non-employee directors, valued at the then current market price of $160.02 per share. Such shares vest on October 31, 2020 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date.

F2 · balance_after: The total holdings include 11 shares accrued from dividend payments through participation in the Company's Dividend Reinvestment Plan, and 516 shares accrued from dividend payments through participation in the Company's Amended and Restated 2005 Deferred Compensation Plan.

SEC source: 0001209191-19-030092 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,308

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2019.

F2 · balance_after: Of the shares held as of May 15, 2019, 6,232 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001214659-18-006897 · marketforms-42637.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,820

F1 · balance_after: Effective November 1, 2018, the Company granted 1,025 restricted stock units as an annual grant to non-employee directors, valued at the then current market price of $126.82 per share. Such shares vest on October 31, 2019 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date. The total holdings include 119 shares accrued from dividend payments through participation in the Directors Deferred Compensation Plan and pursuant to the Company's Dividend Reinvestment Plan.

SEC source: 0001209191-18-030760 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,076

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 16, 2018.

F2 · balance_after: Of the shares held as of May 16, 2018, 5,637 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-18-019558 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,439

SEC source: 0001104657-18-000019 · wf-form4_152061559048624.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · Held in Directors Deferred Compensation Plans.

Disclosed balance after: 19,151.659

F1 · shares: Dividends paid on holdings in the 2006 Non-employee Director Equity Plan.

F1 · price: Dividends paid on holdings in the 2006 Non-employee Director Equity Plan.

SEC source: 0001104657-18-000008 · wf-form4_151916446296905.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,757

F1 · price: The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $50.25 to $51.05, inclusive. The Reporting Person undertakes to provide the Issuer, any security holder of the Issuer or the Staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the prices set forth in footnote (1) to this Form 4.

SEC source: 0001214659-18-000223 · marketforms-40601.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,676

F1 · ownership.direct: The total holdings include 97 shares accrued from dividend payments through participation in the Directors Deferred Compensation Plan and pursuant to the Company's Dividend Reinvestment Plan.

SEC source: 0001214659-17-006377 · marketforms-40071.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 49,097

F1 · ownership.direct: Effective November 1, 2017, the Company granted 990 restricted stock units as an annual grant to non-employee directors, valued at the then current market price of $126.38 per share. Such shares vest on October 31, 2018 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date. The total holdings include 445 shares accrued from dividend payments through participation in the Directors Deferred Compensation Plan and pursuant to the Company's Dividend Reinvestment Plan.

SEC source: 0001104657-17-000154 · wf-form4_150481242616216.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · Held in Directors Deferred Compensation Plans.

Disclosed balance after: 19,076.086

F1 · shares: Dividends paid on holdings in the 2006 Non-employee Director Equity Plan.

F1 · price: Dividends paid on holdings in the 2006 Non-employee Director Equity Plan.

SEC source: 0001209191-17-038603 · doc4.xml · derivative · entry 6

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 10,000 shares

Expires 2020-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-038603 · doc4.xml · derivative · entry 5

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 10,000 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-038603 · doc4.xml · nonDerivative · entry 4

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,439

F1 · balance_after: Of the shares held as of June 7, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-038603 · doc4.xml · nonDerivative · entry 3

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,439

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of June 7, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-038603 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,439

F1 · balance_after: Of the shares held as of June 7, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-038603 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,439

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of June 7, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001104657-17-000115 · wf-form4_149669653092954.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · Held in Directors Deferred Compensation Plans.

Disclosed balance after: 19,026.636

F1 · shares: Dividends paid on holdings in the 2006 Non-employee Director Equity Plan.

F1 · price: Dividends paid on holdings in the 2006 Non-employee Director Equity Plan.

SEC source: 0001209191-17-036556 · doc4.xml · derivative · entry 6

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 10,000 shares

Expires 2019-07-16

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-036556 · doc4.xml · derivative · entry 5

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 10,000 shares

Expires 2021-08-03

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-036556 · doc4.xml · nonDerivative · entry 4

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,439

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.60 to $21.65, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F1 · balance_after: Of the shares held as of May 31, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-036556 · doc4.xml · nonDerivative · entry 3

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,439

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of May 31, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-036556 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,439

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $21.65 to $21.70, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F1 · balance_after: Of the shares held as of May 31, 2017, 3,802 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.