Lawson Douglas A.

SEC source: 0001415889-24-018031 · form4-06242024_050601.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,808

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on June 20, 2024 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · balance_after: Of the shares held as of June 20, 2024, after the acceleration of vesting, 4,128 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013741 · form4-05202024_040509.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,202

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2024 of service vesting restricted stock units granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 17, 2024, 7,010 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013488 · form4-05172024_040531.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,945

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 16, 2024, 8,685 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013488 · form4-05172024_040531.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,481

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F6 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2020. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2024, 9,893 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013488 · form4-05172024_040531.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,737

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F5 · balance_after: Of the shares held after this vesting event on May 15, 2024, 10,469 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013488 · form4-05172024_040531.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,598

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2024 performance goals. 100% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2025.

F2 · balance_after: Of the shares held after this grant on May 15, 2024, 13,192 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-006105 · form4-03012024_040319.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,233

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of performance based restricted stock units granted to the executive in May 2023. Of the units granted, 135% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2024, and half of the earned shares vested on February 28, 2024. As agreed with the executive, the shares issued to the executive on the vested PRSUs were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F5 · balance_after: Of the shares held as of February 28, 2024 after the vesting of both the 2022 PRSUs and 2023 PRSUs, 11,827 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-006105 · form4-03012024_040319.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,690

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of the remainder of performance based restricted stock units ("PRSUs") granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023, and half of the earned shares vested on February 28, 2023. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F3 · balance_after: Of the shares held as of February 28, 2024 after the vesting of the 2022 PRSUs and before the vesting of the 2023 PRSUs, 13,382 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-005162 · form4-02262024_080202.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,648

F1 · balance_after: Of the shares held as of February 23, 2024, 16,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-044869 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,342

F1 · balance_after: Of the shares held as of August 7, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-036134 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,717

F1 · balance_after: Of the shares held as of June 9, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032863 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,117

F1 · balance_after: Of the shares held as of May 26, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030996 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,317

F1 · balance_after: Of the shares held as of May 19, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030588 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,867

F5 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.00 to $141.36, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F6 · balance_after: Of the shares held after this sale on May 18, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030588 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,570

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030588 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 25,314

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 17,514 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 25,850

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 18,722 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 27,059

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 21,446 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 28,322

F3 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024.

F4 · balance_after: Of the shares held after this second grant on May 15, 2023, 24,293 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 26,018

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 100% of these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this first grant on May 15, 2023, 21,989 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-028544 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,205

F1 · balance_after: Of the shares held as of May 10, 2023, 31,176 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-014085 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,176

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 21,413 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-014085 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,210

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 24,675 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 3,262 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-008704 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,040

F1 · balance_after: Of the shares held as of February 13, 2023, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058856 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,038

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.52 to $76.54, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 28, 2022, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-044789 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,388

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $74.30 to $74,96, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 8, 2022, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 6

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,942

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 28,011 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 5

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,686

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 29,687 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,854

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 24,855 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,022

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 20,023 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,864

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 21,921 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,072

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 24,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-015430 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,335

F1 · balance_after: Of the shares held as of March 2, 2022 and March 3, 2022, 27,490 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-015430 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 36,133

F1 · balance_after: Of the shares held as of March 2, 2022 and March 3, 2022, 27,490 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-014863 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,664

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 27,490 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-22-014863 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 42,894

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 32,518 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,028 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

SEC source: 0001209191-21-063420 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,958

F1 · balance_after: Of the shares held as of November 8, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-054061 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,175

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.62 to $49.67, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 31, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-035337 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,830

F1 · balance_after: Of the shares held as of May 24, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-034945 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,852

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $40.20 to $40.78, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 21, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 6

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,681

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 5

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 46,978

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 27,910 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,275

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 21,207 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,246

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 23,395 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 42,088

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 25,292 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,297

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 28,016 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Indirect · Held by Spouse

Disclosed balance after: 0

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,560

F6 · balance_after: Of the shares held as of March 3, 2021, 30,862 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 51,935

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 30,862 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,534

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 36,309 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,447 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.