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AXCELIS TECHNOLOGIES INC

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4152
SEC CIK
0001113232
Parsed reports
476

Last 12 months

Inside the activity.

0 purchase rows · 23 sale rows

Disclosed non-derivative P/S rows, by transaction month. Includes amendments and private transactions.
Monthly counts
MonthPurchasesSales
Nov 202500
Dec 202502
Jan 202600
Feb 202601
Mar 202601
Apr 202601
May 2026016
Jun 202602
Jul 202600
Aug 202600
Sep 202600
Oct 202600

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateOwner / reported roleActivity / securityShares / unitsReported priceReported valueDetails
May 17, 2022 Filed May 18, 2022 20:59 UTC
BREWER KEVIN JEVP & Chief Financial Officer
Tax withholdingCommon Stock 970 $60.56 $58,743.20
Disclosure

SEC source: 0001209191-22-030103 · doc4.xml · nonDerivative · entry 6

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 64,247

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 38,378 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 16:28 UTC GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029142 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,375

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:33 UTC GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029150 · doc4.xml · nonDerivative · entry 1

Vachani Dipti · CIK 0001908816 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 6,118

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 6,118 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:33 UTC GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029149 · doc4.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,370

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 6,919 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:31 UTC GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029147 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,625

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:30 UTC
Quirk JeanneDirector
GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029145 · doc4.xml · nonDerivative · entry 1

Quirk Jeanne · CIK 0001908822 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 6,118

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 6,118 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:29 UTC GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029143 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,128

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:27 UTC GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029139 · doc4.xml · nonDerivative · entry 1

FAUBERT RICHARD J · CIK 0001230508 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,625

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 16, 2022 20:26 UTC
Chiu Tzu YinDirector
GrantCommon Stock 2,689 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-029136 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,573

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023.

F2 · balance_after: Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:58 UTC
PUMA MARY GDirector · President and CEO
GrantCommon Stock 21,008 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 5

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 422,428

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 126,192 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:58 UTC
PUMA MARY GDirector · President and CEO
GrantCommon Stock 21,008 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 4

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 401,420

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 105,184 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:58 UTC
PUMA MARY GDirector · President and CEO
Tax withholdingCommon Stock 3,607 $56.38 $203,362.66
Disclosure

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 380,412

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 84,176 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:07 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
GrantCommon Stock 4,832 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 5

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,686

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 29,687 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:07 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
GrantCommon Stock 4,832 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,854

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 24,855 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:07 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
Tax withholdingCommon Stock 842 $56.38 $47,471.96
Disclosure

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,022

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 20,023 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:02 UTC
Bintz William JEVP, Product Development
GrantCommon Stock 5,008 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030110 · doc4.xml · nonDerivative · entry 4

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,902

F6 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,100% of the earned shares will vest on February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2023.

F7 · balance_after: Of the shares held after this grant on May 16, 2022, 27,871 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:02 UTC
Bintz William JEVP, Product Development
Tax withholdingCommon Stock 902 $56.38 $50,854.76
Disclosure

SEC source: 0001209191-22-030110 · doc4.xml · nonDerivative · entry 3

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,894

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 22,863 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:00 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
GrantCommon Stock 5,664 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030106 · doc4.xml · nonDerivative · entry 5

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,992

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 33,370 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:00 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
GrantCommon Stock 5,664 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030106 · doc4.xml · nonDerivative · entry 4

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 50,328

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 27,706 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 21:00 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
Tax withholdingCommon Stock 842 $56.38 $47,471.96
Disclosure

SEC source: 0001209191-22-030106 · doc4.xml · nonDerivative · entry 3

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,664

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 22,042 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:59 UTC
Low RussellEVP, Engineering
GrantCommon Stock 5,882 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 77,898

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 35,645 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:59 UTC
Low RussellEVP, Engineering
GrantCommon Stock 5,882 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 72,016

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 29,763 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:59 UTC
Low RussellEVP, Engineering
Tax withholdingCommon Stock 902 $56.38 $50,854.76
Disclosure

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 66,134

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 23,881 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:59 UTC
BREWER KEVIN JEVP & Chief Financial Officer
GrantCommon Stock 6,303 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030103 · doc4.xml · nonDerivative · entry 5

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 65,217

F8 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.

F9 · balance_after: Of the shares held after this second grant on May 16, 2022, 40,564 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:59 UTC
BREWER KEVIN JEVP & Chief Financial Officer
GrantCommon Stock 6,303 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-030103 · doc4.xml · nonDerivative · entry 4

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,914

F6 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.

F7 · balance_after: Of the shares held after this first grant on May 16, 2022, 34,261 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 16, 2022 Filed May 18, 2022 20:59 UTC
BREWER KEVIN JEVP & Chief Financial Officer
Tax withholdingCommon Stock 1,743 $56.38 $98,270.34
Disclosure

SEC source: 0001209191-22-030103 · doc4.xml · nonDerivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,611

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 27,958 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2022 Filed May 18, 2022 20:58 UTC
PUMA MARY GDirector · President and CEO
Tax withholdingCommon Stock 4,832 $56.38 $272,428.16
Disclosure

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 384,019

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 92,307 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2022 Filed May 18, 2022 20:58 UTC
PUMA MARY GDirector · President and CEO
Tax withholdingCommon Stock 5,050 $56.38 $284,719.00
Disclosure

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 388,851

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 103,201 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2022 Filed May 18, 2022 21:07 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
Tax withholdingCommon Stock 1,208 $56.38 $68,107.04
Disclosure

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,864

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 21,921 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2022 Filed May 18, 2022 21:07 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
Tax withholdingCommon Stock 1,263 $56.38 $71,207.94
Disclosure

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,072

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 24,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2022 Filed May 18, 2022 21:02 UTC
Bintz William JEVP, Product Development
Tax withholdingCommon Stock 1,399 $56.38 $78,875.62
Disclosure

SEC source: 0001209191-22-030110 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,796

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 24,896 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 21:02 UTC
Bintz William JEVP, Product Development
Tax withholdingCommon Stock 1,462 $56.38 $82,427.56
Disclosure

SEC source: 0001209191-22-030110 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,195

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 28,050 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 21:00 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
Tax withholdingCommon Stock 1,208 $56.38 $68,107.04
Disclosure

SEC source: 0001209191-22-030106 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 45,506

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 23,940 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 21:00 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
Tax withholdingCommon Stock 1,263 $56.38 $71,207.94
Disclosure

SEC source: 0001209191-22-030106 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 46,714

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 26,663 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 20:59 UTC
Low RussellEVP, Engineering
Tax withholdingCommon Stock 1,399 $56.38 $78,875.62
Disclosure

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 67,036

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 25,914 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 20:59 UTC
Low RussellEVP, Engineering
Tax withholdingCommon Stock 1,462 $56.38 $82,427.56
Disclosure

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 68,435

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 29,068 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 20:59 UTC
BREWER KEVIN JEVP & Chief Financial Officer
Tax withholdingCommon Stock 1,844 $56.38 $103,964.72
Disclosure

SEC source: 0001209191-22-030103 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,354

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 31,888 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2022 Filed May 18, 2022 20:59 UTC
BREWER KEVIN JEVP & Chief Financial Officer
Tax withholdingCommon Stock 1,927 $56.38 $108,644.26
Disclosure

SEC source: 0001209191-22-030103 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,198

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 36,045 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 17, 2022 Filed Mar 17, 2022 20:11 UTC
FALLON LYNNETTE CExecutive VP, HR/Legal
SaleCommon Stock 3,249 $71.85 $233,440.65
Disclosure

SEC source: 0001209191-22-019555 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,977

F1 · balance_after: Of the shares held as of March 17, 2022, 29,509 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 16, 2022 Filed Mar 16, 2022 21:26 UTC
PUMA MARY GDirector · President and CEO
SaleCommon Stock 11,000 $69.23 $761,530.00
Disclosure

SEC source: 0001209191-22-019280 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 393,901

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $69.00 to $69.71, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of March 16, 2022, 114,586 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 15, 2022 Filed Mar 15, 2022 21:57 UTC
Quirk JeanneDirector
GrantCommon Stock 1,143 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-018927 · doc4.xml · nonDerivative · entry 2

Quirk Jeanne · CIK 0001908822 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,429

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on September 15, 2022.

F2 · balance_after: All of the shares held as of March 15, 2022 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 15, 2022 Filed Mar 15, 2022 21:57 UTC
Quirk JeanneDirector
GrantCommon Stock 2,286 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-018927 · doc4.xml · nonDerivative · entry 1

Quirk Jeanne · CIK 0001908822 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,286

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, 25% of these restricted stock units will vest on each of March 15, 2023, March 15, 2024, March 15, 2025 and March 15, 2026.

F2 · balance_after: All of the shares held as of March 15, 2022 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 15, 2022 Filed Mar 15, 2022 21:57 UTC GrantCommon Stock 1,143 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-018925 · doc4.xml · nonDerivative · entry 2

Vachani Dipti · CIK 0001908816 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,429

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on September 15, 2022.

F2 · balance_after: All of the shares held as of March 15, 2022 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 15, 2022 Filed Mar 15, 2022 21:57 UTC GrantCommon Stock 2,286 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-018925 · doc4.xml · nonDerivative · entry 1

Vachani Dipti · CIK 0001908816 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,286

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, 25% of these restricted stock units will vest on each of March 15, 2023, March 15, 2024, March 15, 2025 and March 15, 2026.

F2 · balance_after: All of the shares held as of March 15, 2022 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 03, 2022 Filed Mar 3, 2022 21:26 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
SaleCommon Stock 2,798 $71.65 $200,476.70
Disclosure

SEC source: 0001209191-22-015430 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,335

F1 · balance_after: Of the shares held as of March 2, 2022 and March 3, 2022, 27,490 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 02, 2022 Filed Mar 2, 2022 22:01 UTC
BREWER KEVIN JEVP & Chief Financial Officer
SaleCommon Stock 8,636 $70.89 $612,206.04
Disclosure

SEC source: 0001209191-22-014844 · doc4.xml · nonDerivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,125

F6 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $70.80 to $70.90, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F7 · balance_after: Of the shares held as of March 2, 2022, 40,389 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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March 02, 2022 Filed Mar 3, 2022 21:26 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
SaleCommon Stock 4,531 $69.30 $313,998.30
Disclosure

SEC source: 0001209191-22-015430 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 36,133

F1 · balance_after: Of the shares held as of March 2, 2022 and March 3, 2022, 27,490 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

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February 28, 2022 Filed Mar 2, 2022 22:05 UTC
Low RussellEVP, Engineering
Tax withholdingCommon Stock 2,715 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014870 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,898

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units,32,364 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

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February 28, 2022 Filed Mar 2, 2022 22:05 UTC
Low RussellEVP, Engineering
Tax withholdingCommon Stock 2,798 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014870 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 72,613

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 38,484 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,120 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

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February 28, 2022 Filed Mar 2, 2022 22:04 UTC
Lawson Douglas A.EVP, Corporate Mktg & Strategy
Tax withholdingCommon Stock 2,230 $0.00 $0.00
Disclosure

SEC source: 0001209191-22-014863 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,664

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 27,490 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

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Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.