ACLS

SEC source: 0001209191-23-014085 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,210

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 24,675 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 3,262 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-014084 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,036

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 23,673 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-014084 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,449

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 27,496 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 3,823 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-014083 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 46,823

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 29,772 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-014083 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,527

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 34,027 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 4,255 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-008714 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,375

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $123.25 to $123.59, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008714 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,375

F1 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008723 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,625

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.01 to $127.18, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008720 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,239

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.58 to $127.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 31,406 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008709 · doc4.xml · nonDerivative · entry 2

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,799

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $123.00 to $123.67, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008709 · doc4.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,455

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $122.00 to $122.74, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008706 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 361,605

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.77 to $126.14, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

SEC source: 0001209191-23-008706 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 363,905

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $124.75 to $125.57, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008712 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Global Cust & Eng Ops

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,663

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $126.13 to $126.36, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 33,605 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008712 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Global Cust & Eng Ops

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,185

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.12 to $126.09, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 13, 2023, 33,605 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-008704 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,040

F1 · balance_after: Of the shares held as of February 13, 2023, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-009084 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,873

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.01 to $127.15, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 14, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-061186 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,375

F1 · balance_after: Of the shares held as of December 14, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-061444 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 386,402

F1 · price: These shares of Common Stock were donated by the executive as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F2 · balance_after: Of the shares held as of December 14, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-060361 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 393,511

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.07 to $80.68, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of December 8, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-060476 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,091

F1 · balance_after: Of the shares held as of December 8, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-059825 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 397,713

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.05 to $80.20, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of December 1, 2022 and December 5, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-059825 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 400,410

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.12, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of December 1, 2022 and December 5, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-059102 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,375

F1 · balance_after: Of the shares held as of November 30, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058856 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,038

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.52 to $76.54, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 28, 2022, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058642 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,173

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $79.72 to $79.94, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 23, 2022, 8,795 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058642 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,971

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $78.72 to $79.70, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 23, 2022, 8,795 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058855 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 401,910

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.10, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 23, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-057842 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,625

F1 · balance_after: Of the shares held as of November 18, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-058121 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,151

F1 · shares: These shares were withheld by the Company for income tax liabilities associated with the vesting of shares under the Company's Executive Equity Retirement Program, in light of the executive's planned retirement.

F3 · price: Represents the closing price of the common stock on the date of the tax withholding.

F2 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after the tax withholding forfeiture (and related vesting) on November 18, 2022, 8,795 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-057016 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,286

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.08 to $80.12, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-057016 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,424

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $79.00 to $79.99, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-057010 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,770

F1 · balance_after: Of the shares held as of November 15, 2022, 31,406 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-056381 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Global Cust & Eng Ops

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,293

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $74.07 to $74.60, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 10, 2022, 33,605 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-056381 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Global Cust & Eng Ops

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 71,140

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $73.07 to $74.05, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 10, 2022, 33,605 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-056474 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,375

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $74.00 to $74.08, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 10, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-050084 · doc4.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,919

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of September 15, 2023, September 15, 2024, September 15, 2025 and September 15, 2026.

F2 · balance_after: Of the shares held after this grant on September 15, 2022, 12,896 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-047489 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,375

F1 · balance_after: Of the shares held as of August 25, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-045811 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,786

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.19 to $76.31, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-045811 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,286

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.00 to $75.98, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-045596 · doc4.xml · nonDerivative · entry 1

FAUBERT RICHARD J · CIK 0001230508 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,625

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.20 to $76.32, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 12, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-045593 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 405,908

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.83 to $76.19, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 12, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-045592 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 51,333

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.50 to $75.53, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 12, 2022, 31,406 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-045591 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 46,772

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $71.04 to $71.23, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 11, 2022, 25,976 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-044789 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,388

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $74.30 to $74,96, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of August 8, 2022, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030101 · doc4.xml · nonDerivative · entry 6

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 419,196

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 118,906 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030113 · doc4.xml · nonDerivative · entry 6

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,942

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 28,011 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030110 · doc4.xml · nonDerivative · entry 5

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,061

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 25,976 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030106 · doc4.xml · nonDerivative · entry 6

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,120

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 31,406 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 6

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 76,993

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F10 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 33,605 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.