ACLS

SEC source: 0001209191-23-030995 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,657

F1 · balance_after: Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029871 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,657

F1 · balance_after: Of the shares held as of May 16, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029947 · doc4.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 71,239

F9 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $130.76 to $130.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F10 · balance_after: Of the shares held after this sale on May 16, 2023, 43,161 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029944 · doc4.xml · nonDerivative · entry 5

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 41,844

F9 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $129.65 to $130.15, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F10 · balance_after: Of the shares held after this sale on May 16, 2023, 23,502 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029943 · doc4.xml · nonDerivative · entry 4

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 29,005

F7 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $130.70 to $130.94, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F8 · balance_after: Of the shares held after this sale on May 16, 2023, 24,275 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029797 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,155

F1 · balance_after: Of the shares held as of May 16, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030598 · doc4.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,537

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 17,061 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 332,218

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 74,706 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030594 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 70,586

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 41,690 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030588 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 25,314

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 17,514 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030582 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 28,306

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 22,699 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030583 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 41,216

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 22,086 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029450 · doc4.xml · nonDerivative · entry 3

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,657

F4 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F5 · balance_after: Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029450 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,375

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.71 to $127.91, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after this sale on May 15, 2023, 2,689 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029450 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,375

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.01 to $125.23, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after this sale on May 15, 2023, 2,689 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029462 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,155

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029459 · doc4.xml · nonDerivative · entry 1

Vachani Dipti · CIK 0001908816 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,400

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 5,685 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029455 · doc4.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,907

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029456 · doc4.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,196

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 6,086 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029452 · doc4.xml · nonDerivative · entry 1

Quirk Jeanne · CIK 0001908822 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,400

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 5,685 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029947 · doc4.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 79,548

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 43,161 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029947 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 80,947

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 46,314 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029947 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 82,409

F3 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024.

F4 · balance_after: Of the shares held after this second grant on May 15, 2023, 49,610 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029947 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 70,391

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2024, May 15, 2025, May 15, 2026 and May 15, 2027.

F2 · balance_after: Of the shares held after this first grant on May 15, 2023, 37,592 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029946 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 334,548

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 79,958 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029946 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 339,380

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 90,853 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029946 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 344,430

F1 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment, 100% of the earned shares will vest on February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2024.

F2 · balance_after: Of the shares held after the grant on May 15, 2023, 102,239 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 25,850

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 18,722 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 27,059

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 21,446 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 28,322

F3 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024.

F4 · balance_after: Of the shares held after this second grant on May 15, 2023, 24,293 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029945 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 26,018

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 100% of these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this first grant on May 15, 2023, 21,989 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029944 · doc4.xml · nonDerivative · entry 4

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 45,964

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 23,502 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029944 · doc4.xml · nonDerivative · entry 3

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 47,173

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 26,226 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029944 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 48,436

F3 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024.

F4 · balance_after: Of the shares held after this second grant on May 15, 2023, 29,073 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029944 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 45,736

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2024, May 15, 2025, May 15, 2026 and May 15, 2027.

F2 · balance_after: Of the shares held after this first grant on May 15, 2023, 26,373 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029943 · doc4.xml · nonDerivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,510

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 24,275 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029943 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 37,354

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 28,432 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029943 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 39,282

F1 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment, 100% of the earned shares will vest on February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2024.

F2 · balance_after: Of the shares held after the grant on May 15, 2023, 32,777 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029835 · doc4.xml · nonDerivative · entry 2

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,727

F3 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024.

F4 · balance_after: Of the shares held after this second grant on May 15, 2023, 17,704 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029835 · doc4.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,323

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2024, May 15, 2025, May 15, 2026 and May 15, 2027.

F2 · balance_after: Of the shares held after this first grant on May 15, 2023, 15,300 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-029794 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,373

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024.

F2 · balance_after: Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-028738 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 332,412

F1 · balance_after: Of the shares held as of May 11, 2023, 90,221 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-028727 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 36,277

F1 · balance_after: Of the shares held as of May 11, 2023, 29,772 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-028544 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,205

F1 · balance_after: Of the shares held as of May 10, 2023, 31,176 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-028241 · doc4.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,873

F1 · balance_after: Of the shares held as of May 9, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-014101 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 354,117

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 90,221 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-014101 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 360,406

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 104,401 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 141,80 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-014090 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Global Cust & Eng Ops

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,373

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 25,574 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-014090 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Global Cust & Eng Ops

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,885

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 29,544 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 3,970 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023.

SEC source: 0001209191-23-014085 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,176

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 21,413 shares were issuable on vesting of restricted stock units which are subject to forfeiture.