ONTO

SEC source: 0001407682-22-000049 · edgardoc.xml · nonDerivative · entry 1

SEAMS CHRISTOPHER A · CIK 0001212426 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,629

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-22-000047 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,608

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-22-000051 · edgardoc.xml · nonDerivative · entry 1

Su May · CIK 0001918546 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,100

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-22-000045 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,201

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-22-000041 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,146

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000034 · edgardoc.xml · nonDerivative · entry 3

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,500

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $90.30 to $91.19, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-22-000034 · edgardoc.xml · nonDerivative · entry 2

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,860

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $89.30 to $90.29, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-22-000034 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,383

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $88.30 to $89.29, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-22-000032 · edgardoc.xml · derivative · entry 3

Vedula Srinivas · CIK 0001792564 · Senior Vice President, Custome

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 816

Underlying: Common Stock · 816 shares

Expires 2025-02-10

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000032 · edgardoc.xml · derivative · entry 2

Vedula Srinivas · CIK 0001792564 · Senior Vice President, Custome

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 817

Underlying: Common Stock · 817 shares

Expires 2024-02-10

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000032 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · Senior Vice President, Custome

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,614

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

F2 · balance_after: Includes 129 shares purchased on December 31, 2021 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-22-000031 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,360

Underlying: Common Stock · 1,360 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000031 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,361

Underlying: Common Stock · 1,361 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000031 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,765

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000030 · edgardoc.xml · derivative · entry 3

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 871

Underlying: Common Stock · 871 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000030 · edgardoc.xml · derivative · entry 2

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 871

Underlying: Common Stock · 871 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000030 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,135

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000029 · edgardoc.xml · derivative · entry 3

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 952

Underlying: Common Stock · 952 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000029 · edgardoc.xml · derivative · entry 2

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 953

Underlying: Common Stock · 953 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000029 · edgardoc.xml · nonDerivative · entry 1

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 6,012

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000027 · edgardoc.xml · derivative · entry 3

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 871

Underlying: Common Stock · 871 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000027 · edgardoc.xml · derivative · entry 2

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 871

Underlying: Common Stock · 871 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000027 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,768

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000026 · edgardoc.xml · derivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,333

Underlying: Common Stock · 1,333 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000026 · edgardoc.xml · derivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,334

Underlying: Common Stock · 1,334 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000026 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,043

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000025 · edgardoc.xml · derivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,524

Underlying: Common Stock · 9,524 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000025 · edgardoc.xml · derivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,525

Underlying: Common Stock · 9,525 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-22-000025 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 242,612

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000023 · edgardoc.xml · nonDerivative · entry 4

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,026

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000021 · edgardoc.xml · nonDerivative · entry 4

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 8,393

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 5

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,376

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000017 · edgardoc.xml · nonDerivative · entry 5

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 223,563

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000023 · edgardoc.xml · derivative · entry 5

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 845 shares

Expires 2022-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

F1 · derivative.underlying_shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000023 · edgardoc.xml · nonDerivative · entry 3

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,178

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000023 · edgardoc.xml · nonDerivative · entry 2

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,390

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000023 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,971

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000021 · edgardoc.xml · derivative · entry 5

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 910 shares

Expires 2022-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

F1 · derivative.underlying_shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000021 · edgardoc.xml · nonDerivative · entry 3

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 8,595

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000021 · edgardoc.xml · nonDerivative · entry 2

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 8,812

F2 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000021 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,394

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000019 · edgardoc.xml · derivative · entry 6

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 3,186 shares

Expires 2022-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

F2 · derivative.underlying_shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,154

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,946

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,320

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · kind: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000017 · edgardoc.xml · derivative · entry 6

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 15,605 shares

Expires 2022-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

F2 · derivative.underlying_shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000017 · edgardoc.xml · nonDerivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 227,267

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000017 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 231,921

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000017 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 245,881

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · kind: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,948

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.