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person · Reporting owner

ROTH STEVEN R

Disclosed activity across 2 companies

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127162
SEC CIK
0001132849

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Reported relationships

Latest disclosed role at each company.

No relationships currently tracked through insider filings.

Disclosed balances

About these balances

Latest available filing per company, not a reconstructed current portfolio. Matching sequences show the last reported balance with all source rows expandable; grouping alone does not establish account ownership. Do not add unresolved positions together. Filings may omit unchanged positions, and amendments may correct only part of an older disclosure. Jointly reported shares are not necessarily this owner's personal holdings.

No balances currently tracked through insider filings.

Past disclosures · reporting ended (2)

No longer tracked through insider filings. These historical balances do not imply present ownership or a zero position.

ONTO INNOVATION INC.

Report date May 17, 2022 · Filed May 19, 2022

Section 16 reporting ended · disclosed 2022-05-19. Current position is not established by this disclosure.

No balance rows disclosed in this filing.

RUDOLPH TECHNOLOGIES INC

Report date October 25, 2019 · Filed October 29, 2019

Section 16 reporting ended · disclosed 2019-10-29. Current position is not established by this disclosure.

Security / awardOwnership accountDisclosed shares / unitsDisclosure context
Common StockSEC Table I · non-derivativeDirect0 Ending reported balance After 2019-10-25 transaction · row 3
3 source rows · reconciled sequence

Row 1 · 2019-10-25 · Disposition to issuer · Disposed 68,181 · Balance 0

F1: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

Row 2 · 2019-10-25 · Grant · Acquired 11,448 · Balance 11,448

F3: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and vested restricted stock unit award and performance stock unit award held by the Reporting Person, including any performance stock unit award that was treated as vested as of the effective time of the Merger (the "Effective Time") based on the target performance under such award, was issued as of immediately prior to the Effective Time and was treated as a share of Rudolph common stock issued and outstanding immediately prior to the Effective Time and was therefore converted into the right to receive Onto common stock, subject to the Exchange Ratio.

Row 3 · 2019-10-25 · Disposition to issuer · Disposed 11,448 · Balance 0

F3: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and vested restricted stock unit award and performance stock unit award held by the Reporting Person, including any performance stock unit award that was treated as vested as of the effective time of the Merger (the "Effective Time") based on the target performance under such award, was issued as of immediately prior to the Effective Time and was treated as a share of Rudolph common stock issued and outstanding immediately prior to the Effective Time and was therefore converted into the right to receive Onto common stock, subject to the Exchange Ratio.

Filing footnotes · ownership attribution and instrument terms

F1: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

F3: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and vested restricted stock unit award and performance stock unit award held by the Reporting Person, including any performance stock unit award that was treated as vested as of the effective time of the Merger (the "Effective Time") based on the target performance under such award, was issued as of immediately prior to the Effective Time and was treated as a share of Rudolph common stock issued and outstanding immediately prior to the Effective Time and was therefore converted into the right to receive Onto common stock, subject to the Exchange Ratio.

Transaction history

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateCompanyActivity / securityShares / unitsReported priceReported valueDetails
February 10, 2022 Filed Feb 14, 2022 21:28 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,333 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000026 · edgardoc.xml · derivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,333

Underlying: Common Stock · 1,333 shares

Expires 2025-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 10, 2022 Filed Feb 14, 2022 21:28 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 1,334 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000026 · edgardoc.xml · derivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,334

Underlying: Common Stock · 1,334 shares

Expires 2024-02-10

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 10, 2022 Filed Feb 14, 2022 21:28 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,667 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000026 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,043

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document
February 08, 2022 Filed Feb 10, 2022 01:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 778 $93.09 $72,424.02
Disclosure

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 5

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,376

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

Read SEC document
February 07, 2022 Filed Feb 10, 2022 01:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionPerformance Stock Unit · Derivative 3,186 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000019 · edgardoc.xml · derivative · entry 6

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 3,186 shares

Expires 2022-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

F2 · derivative.underlying_shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

Read SEC document
February 07, 2022 Filed Feb 10, 2022 01:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 792 $90.42 $71,612.64
Disclosure

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,154

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

Read SEC document
February 07, 2022 Filed Feb 10, 2022 01:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 2,374 $90.42 $214,657.08
Disclosure

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,946

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

Read SEC document
February 07, 2022 Filed Feb 10, 2022 01:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Exercise / conversionCommon Stock 6,372 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,320

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · kind: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2022 as a result of the satisfaction of the performance criteria at 200% of the target.

Read SEC document
February 06, 2022 Filed Feb 10, 2022 01:01 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 855 $90.05 $76,992.75
Disclosure

SEC source: 0001407682-22-000019 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,948

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

Read SEC document
January 14, 2022 Filed Jan 18, 2022 22:34 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 5,000 $105.00 $525,000.00
Disclosure

SEC source: 0001407682-22-000006 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,803

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 8, 2021.

Read SEC document
November 03, 2021 Filed Nov 3, 2021 21:14 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 5,000 $83.00 $415,000.00
Disclosure

SEC source: 0001407682-21-000132 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Sr VP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,803

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on September 13, 2021.

Read SEC document
April 05, 2021 Filed Apr 7, 2021 00:43 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 15,000 $70.00 $1,050,000.00
Disclosure

SEC source: 0001407682-21-000066 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,803

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 23, 2020.

F2 · balance_after: Includes a reduction of 2 shares due to administrative error related to rounding.

Read SEC document
February 08, 2021 Filed Feb 10, 2021 21:19 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 2,690 $0.00 $0.00
Disclosure

SEC source: 0001407682-21-000032 · edgardoc.xml · derivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,690

Underlying: Common Stock · 2,690 shares

Expires 2024-02-08

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 08, 2021 Filed Feb 10, 2021 21:19 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 2,691 $0.00 $0.00
Disclosure

SEC source: 0001407682-21-000032 · edgardoc.xml · derivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,691

Underlying: Common Stock · 2,691 shares

Expires 2023-02-08

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 08, 2021 Filed Feb 10, 2021 21:19 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 5,381 $0.00 $0.00
Disclosure

SEC source: 0001407682-21-000032 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,805

F2 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document
February 08, 2021 Filed Feb 10, 2021 21:19 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 804 $60.40 $48,561.60
Disclosure

SEC source: 0001407682-21-000032 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,424

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
February 07, 2021 Filed Feb 9, 2021 21:25 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 791 $59.95 $47,420.45
Disclosure

SEC source: 0001407682-21-000014 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,228

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
February 06, 2021 Filed Feb 9, 2021 21:25 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 866 $59.95 $51,916.70
Disclosure

SEC source: 0001407682-21-000014 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,019

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
January 27, 2021 Filed Jan 29, 2021 22:49 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 537 $54.83 $29,443.71
Disclosure

SEC source: 0001407682-21-000010 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 40,885

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
January 27, 2021 Filed Jan 29, 2021 22:49 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 562 $54.83 $30,814.46
Disclosure

SEC source: 0001407682-21-000010 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,422

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
January 11, 2021 Filed Jan 13, 2021 21:36 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 10,000 $50.64 $506,400.00
Disclosure

SEC source: 0001407682-21-000002 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,984

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 23, 2020.

Read SEC document
November 09, 2020 Filed Nov 12, 2020 13:47 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 5,000 $40.00 $200,000.00
Disclosure

SEC source: 0001407682-20-000108 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 51,984

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 8, 2020.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $40.00 to $40.06, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

Read SEC document
July 23, 2020 Filed Jul 24, 2020 20:36 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 10,000 $37.00 $370,000.00
Disclosure

SEC source: 0001407682-20-000088 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,984

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 10, 2020.

Read SEC document
February 08, 2020 Filed Feb 10, 2020 21:15 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 616 $38.45 $23,685.20
Disclosure

SEC source: 0001407682-20-000032 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,612

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
February 08, 2020 Filed Feb 11, 2020 23:14 UTC Amendment ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 616 $38.45 $23,685.20
Disclosure

SEC source: 0001407682-20-000046 · edgardoc.xml · nonDerivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 66,984

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
February 07, 2020 Filed Feb 11, 2020 23:14 UTC Amendment ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 3,186 $0.00 $0.00
Disclosure

SEC source: 0001407682-20-000046 · edgardoc.xml · derivative · entry 6

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,186

Underlying: Common Stock · 3,186 shares

Expires 2023-02-07

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 07, 2020 Filed Feb 11, 2020 23:14 UTC Amendment ONTO INNOVATION INC. ONTO · Entity 3340 GrantPerformance Stock Unit · Derivative 3,186 $0.00 $0.00
Disclosure

SEC source: 0001407682-20-000046 · edgardoc.xml · derivative · entry 5

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,186

Underlying: Common Stock · 3,186 shares

Expires 2022-02-07

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Read SEC document
February 07, 2020 Filed Feb 11, 2020 23:14 UTC Amendment ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 6,372 $0.00 $0.00
Disclosure

SEC source: 0001407682-20-000046 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 67,600

F2 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Read SEC document
February 06, 2020 Filed Feb 10, 2020 21:15 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 657 $41.47 $27,245.79
Disclosure

SEC source: 0001407682-20-000032 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,228

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
February 06, 2020 Filed Feb 10, 2020 21:15 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 559 $41.47 $23,181.73
Disclosure

SEC source: 0001407682-20-000032 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,885

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

Read SEC document
February 06, 2020 Filed Feb 11, 2020 23:14 UTC Amendment ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 657 $41.47 $27,245.79
Disclosure

SEC source: 0001407682-20-000046 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,228

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

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February 06, 2020 Filed Feb 11, 2020 23:14 UTC Amendment ONTO INNOVATION INC. ONTO · Entity 3340 Tax withholdingCommon Stock 559 $41.47 $23,181.73
Disclosure

SEC source: 0001407682-20-000046 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,885

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

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January 28, 2020 Filed Jan 29, 2020 21:42 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 329 $38.63 $12,709.27
Disclosure

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 62,444

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

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January 28, 2020 Filed Jan 29, 2020 21:42 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 389 $38.63 $15,027.07
Disclosure

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 62,773

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

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January 27, 2020 Filed Jan 29, 2020 21:42 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 443 $38.02 $16,842.86
Disclosure

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,162

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

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January 27, 2020 Filed Jan 29, 2020 21:42 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 433 $38.02 $16,462.66
Disclosure

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,605

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

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October 25, 2019 Filed Oct 30, 2019 01:44 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 21,212 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026269 · doc4.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 64,038

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

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October 25, 2019 Filed Oct 30, 2019 01:44 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 42,826 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026269 · doc4.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 42,826

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

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October 25, 2019 Filed Oct 29, 2019 21:02 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 11,448 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026197 · doc4.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

F3 · shares: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and vested restricted stock unit award and performance stock unit award held by the Reporting Person, including any performance stock unit award that was treated as vested as of the effective time of the Merger (the "Effective Time") based on the target performance under such award, was issued as of immediately prior to the Effective Time and was treated as a share of Rudolph common stock issued and outstanding immediately prior to the Effective Time and was therefore converted into the right to receive Onto common stock, subject to the Exchange Ratio.

F3 · price: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and vested restricted stock unit award and performance stock unit award held by the Reporting Person, including any performance stock unit award that was treated as vested as of the effective time of the Merger (the "Effective Time") based on the target performance under such award, was issued as of immediately prior to the Effective Time and was treated as a share of Rudolph common stock issued and outstanding immediately prior to the Effective Time and was therefore converted into the right to receive Onto common stock, subject to the Exchange Ratio.

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October 25, 2019 Filed Oct 29, 2019 21:02 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 GrantCommon Stock 11,448 $0.00 $0.00
Disclosure

SEC source: 0000899243-19-026197 · doc4.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,448

F3 · shares: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and vested restricted stock unit award and performance stock unit award held by the Reporting Person, including any performance stock unit award that was treated as vested as of the effective time of the Merger (the "Effective Time") based on the target performance under such award, was issued as of immediately prior to the Effective Time and was treated as a share of Rudolph common stock issued and outstanding immediately prior to the Effective Time and was therefore converted into the right to receive Onto common stock, subject to the Exchange Ratio.

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October 25, 2019 Filed Oct 29, 2019 21:02 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 68,181 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026197 · doc4.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2 · shares: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2 · price: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

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February 08, 2019 Filed Feb 12, 2019 14:05 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 766 $22.24 $17,035.84
Disclosure

SEC source: 0001407682-19-000061 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 68,181

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

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February 06, 2019 Filed Feb 8, 2019 14:55 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 GrantCommon Stock 8,679 $0.00 $0.00
Disclosure

SEC source: 0001407682-19-000047 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 68,947

F2 · shares: One-third of the total shares of Common Stock subject to this Restricted Stock Unit grant vests on each of the first three anniversaries of the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

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February 06, 2019 Filed Feb 8, 2019 14:55 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 695 $22.47 $15,616.65
Disclosure

SEC source: 0001407682-19-000047 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,268

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

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January 31, 2019 Filed Feb 4, 2019 15:26 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 296 $21.72 $6,429.12
Disclosure

SEC source: 0001407682-19-000025 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,963

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

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January 31, 2019 Filed Feb 4, 2019 15:26 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 332 $21.72 $7,211.04
Disclosure

SEC source: 0001407682-19-000025 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,259

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

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January 28, 2019 Filed Jan 29, 2019 16:46 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 563 $21.57 $12,143.91
Disclosure

SEC source: 0001407682-19-000011 · edgardoc.xml · nonDerivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,591

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

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January 28, 2019 Filed Jan 29, 2019 16:46 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 504 $21.57 $10,871.28
Disclosure

SEC source: 0001407682-19-000011 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 62,154

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

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January 27, 2019 Filed Jan 29, 2019 16:46 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 444 $21.81 $9,683.64
Disclosure

SEC source: 0001407682-19-000011 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 62,658

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

Read SEC document
January 27, 2019 Filed Jan 29, 2019 16:46 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 546 $21.81 $11,908.26
Disclosure

SEC source: 0001407682-19-000011 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,102

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units grants previously received by the Reporting Person.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.