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person · Reporting owner

BERLINGHIERI LEO

Disclosed activity across 2 companies

Tapewire entity
79361
SEC CIK
0001202738

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Reported relationships

Latest disclosed role at each company.

No relationships currently tracked through insider filings.

Disclosed balances

About these balances

Latest available filing per company, not a reconstructed current portfolio. Matching sequences show the last reported balance with all source rows expandable; grouping alone does not establish account ownership. Do not add unresolved positions together. Filings may omit unchanged positions, and amendments may correct only part of an older disclosure. Jointly reported shares are not necessarily this owner's personal holdings.

No balances currently tracked through insider filings.

Past disclosures · reporting ended (2)

No longer tracked through insider filings. These historical balances do not imply present ownership or a zero position.

ONTO INNOVATION INC.

Report date May 21, 2025 · Filed May 23, 2025

Section 16 reporting ended · disclosed 2025-05-23. Current position is not established by this disclosure.

No balance rows disclosed in this filing.

RUDOLPH TECHNOLOGIES INC

Report date October 25, 2019 · Filed October 29, 2019

Section 16 reporting ended · disclosed 2019-10-29. Current position is not established by this disclosure.

Security / awardOwnership accountDisclosed shares / unitsDisclosure context
Common StockSEC Table I · non-derivativeDirect0 Reported balance After 2019-10-25 transaction · row 1
1 source row

Row 1 · 2019-10-25 · Disposition to issuer · Disposed 23,100 · Balance 0

F1: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

Filing footnotes · ownership attribution and instrument terms

F1: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

Transaction history

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

The cutoff filters transaction history only. Company summaries and owner relationships show the latest available disclosures. Parser corrections can improve historical records.

Transaction dateCompanyActivity / securityShares / unitsReported priceReported valueDetails
May 22, 2024 Filed May 23, 2024 20:27 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 809 $0.00 $0.00
Disclosure

SEC source: 0002022859-24-000014 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 20,210

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date.

Read SEC document
May 09, 2023 Filed May 11, 2023 20:16 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,200 $0.00 $0.00
Disclosure

SEC source: 0001257815-23-000046 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,401

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document
May 10, 2022 Filed May 12, 2022 20:40 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,100 $0.00 $0.00
Disclosure

SEC source: 0001407682-22-000045 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,201

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document
November 01, 2021 Filed Nov 3, 2021 21:10 UTC ONTO INNOVATION INC. ONTO · Entity 3340 SaleCommon Stock 5,275 $80.48 $424,532.00
Disclosure

SEC source: 0001407682-21-000128 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,101

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on August 27, 2021.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $80.07 to $81.00, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

Read SEC document
September 13, 2021 Filed Sep 14, 2021 21:22 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 1,716 $77.91 $133,693.56
Disclosure

SEC source: 0001407682-21-000116 · edgardoc.xml · nonDerivative · entry 2

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,376

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $77.48 to $78.32, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

Read SEC document
September 13, 2021 Filed Sep 14, 2021 21:22 UTC ONTO INNOVATION INC. ONTO · Entity 3340 Disposition to issuerCommon Stock 3,784 $77.14 $291,897.76
Disclosure

SEC source: 0001407682-21-000116 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,092

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $76.48 to $77.47, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

Read SEC document
May 11, 2021 Filed May 12, 2021 19:52 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 2,500 $0.00 $0.00
Disclosure

SEC source: 0001407682-21-000070 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,876

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document
May 12, 2020 Filed May 14, 2020 16:16 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 4,800 $0.00 $0.00
Disclosure

SEC source: 0001407682-20-000062 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,376

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document
October 25, 2019 Filed Oct 30, 2019 01:49 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 3,297 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026276 · doc4.xml · nonDerivative · entry 2

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,576

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

Read SEC document
October 25, 2019 Filed Oct 30, 2019 01:49 UTC ONTO INNOVATION INC. ONTO · Entity 3340 GrantCommon Stock 15,279 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026276 · doc4.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,279

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

Read SEC document
October 25, 2019 Filed Oct 29, 2019 20:49 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 Disposition to issuerCommon Stock 23,100 Not disclosed Not disclosed
Disclosure

SEC source: 0000899243-19-026174 · doc4.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2 · shares: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) ("Onto") common stock (the "Exchange Ratio").

F2 · price: Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio.

Read SEC document
May 15, 2019 Filed May 15, 2019 17:29 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 GrantCommon Stock 4,100 $0.00 $0.00
Disclosure

SEC source: 0001407682-19-000084 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,100

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document
May 23, 2018 Filed May 24, 2018 09:31 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 SaleCommon Stock 3,600 $32.30 $116,280.00
Disclosure

SEC source: 0001407682-18-000078 · edgardoc.xml · nonDerivative · entry 2

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,000

Read SEC document
May 23, 2018 Filed May 24, 2018 09:31 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 SaleCommon Stock 600 $32.35 $19,410.00
Disclosure

SEC source: 0001407682-18-000078 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,600

Read SEC document
May 16, 2018 Filed May 18, 2018 14:51 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 GrantCommon Stock 3,100 $0.00 $0.00
Disclosure

SEC source: 0001257815-18-000012 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,200

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document
May 17, 2017 Filed May 19, 2017 09:58 UTC RUDOLPH TECHNOLOGIES INC RTEC · Entity 131655 GrantCommon Stock 4,200 $0.00 $0.00
Disclosure

SEC source: 0001407682-17-000119 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,100

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.