ACLS

SEC source: 0001415889-24-006102 · form4-03012024_040303.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · EXECUTIVE CHAIRPERSON

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 256,198

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of the remainder of performance based restricted stock units ("PRSUs") granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023, and half of the earned shares vested on February 28, 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F3 · balance_after: Of the shares held as of February 28, 2024 after the vesting of the 2022 PRSUs and before the vesting of the 2023 PRSUs, 57,447 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-006101 · form4-03012024_040301.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 57,314

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of PRSUs granted to the executive in May 2023. Of the units granted, 135% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2024, and half of the earned shares vested on February 28, 2024. As agreed with the executive, the shares issued to the executive on vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F5 · balance_after: Of the shares held as of February 28, 2024 after the vesting of both the 2022 Performance RSUs and 2023 Performance RSUs, 31,775 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-006101 · form4-03012024_040301.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 60,233

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of the remainder of performance based restricted stock units ("PRSUs") granted to the executive in May 2022. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023, and half of the earned shares vested on February 28, 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024.

F3 · balance_after: Of the shares held as of February 28, 2024 after the vesting of the 2022 PRSUs and before the vesting of the 2023 PRSUs, 39,887 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-005162 · form4-02262024_080202.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,648

F1 · balance_after: Of the shares held as of February 23, 2024, 16,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-058632 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 3,157

F1 · balance_after: Of the shares held as of December 14, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-058768 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 31,006

F1 · price: These shares of Common Stock were donated by the executive as a gift to a Fidelity Charitable Account, a donor advised fund, entitled L&G Fallon Charitable Fund.

F2 · balance_after: Of the shares held as of December 14, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-24-000214 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,597

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on December 6, 2023 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on December 6, 2023.

F3 · balance_after: Of the shares beneficially owned by the executive on December 6, 2023 after the vesting of certain restricted stock units under the Company's Executive Equity Retirement Program, 8,281 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-23-054922 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,157

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $130.41 to $130.48, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 10, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-052868 · doc4.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP and CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,891

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of October 16, 2024, October 16, 2025, October 16, 2026, and October 16, 2027.

F2 · balance_after: All of the shares held after this grant were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-049537 · doc4.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,327

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of September 15, 2024, September 15, 2025, September 15, 2026, and September 15, 2027.

F2 · balance_after: Of the shares held after this grant on September 15, 2023, 8,150 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-049740 · doc4.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,995

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on September 15, 2023, 13,855 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-049430 · doc4.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,203

F1 · balance_after: Of the shares held after this sale on September 14, 2023, 14,561 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-048640 · doc4.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,315

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $177.10 to $177.77, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after the sale on September 7, 2023, 1,282 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-048639 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 57,787

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $179.00 to $179.41, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of September 7, 2023, 39,650 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-048637 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 31,371

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $181.31 to $181.63, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of September 7, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-044869 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,342

F1 · balance_after: Of the shares held as of August 7, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-037305 · doc4.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Engineering

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,182

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of June 15, 2024, June 15, 2025, June 15, 2026 and June 15, 2027.

F2 · balance_after: Of the shares held after this grant on June 15, 2023, 4,182 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-038000 · doc4.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,803

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on June 15, 2023, 14,561 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-036272 · doc4.xml · nonDerivative · entry 1

Quirk Jeanne · CIK 0001908822 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,782

F1 · shares: This sale of shares was made to cover the tax liability incident to the 2023 vesting of shares on restricted stock units previously granted to the director.

F2 · balance_after: Of the shares held as of June 12, 2023, 4,278 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-036279 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 263,058

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $181.78 to $182.27, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held on June 12, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-037053 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,157

F1 · balance_after: Of the shares held as of June 12, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-048717 · doc4a.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 258,280

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $181.78 to $182.27, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held on June 12, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

F3 · balance_after: This number of securities owned after the reported sale has been amended. See Remarks.

SEC source: 0001209191-23-036134 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,717

F1 · balance_after: Of the shares held as of June 9, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035383 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 61,192

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $173.41 to $173.42, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of June 8, 2023, 39,650 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035065 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,657

F1 · balance_after: Of the shares held as of June 7, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035075 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 274,858

F3 · price: These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F2 · balance_after: Of the shares held on June 7, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035075 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 278,985

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $173.37 to $173.69, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held on June 7, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-035069 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 34,469

F1 · balance_after: Of the shares held as of June 7, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-034768 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,657

F1 · balance_after: Of the shares held as of June 6, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032863 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,117

F1 · balance_after: Of the shares held as of May 26, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032268 · doc4.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,657

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.17 to $152.25, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032151 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 64,701

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $153.11 to $153.14, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 39,650 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032150 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 300,686

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $151.71 to $151.99, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 67,420 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032147 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 36,053

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.20 to $152.21, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-032143 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,510

F1 · balance_after: Of the shares held as of May 25, 2023, 20,513 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-034761 · doc4a.xml · nonDerivative · entry 1

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,657

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.17 to $152.25, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 25, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030996 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,317

F1 · balance_after: Of the shares held as of May 19, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 4

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 315,630

F7 · price: These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF.

F8 · balance_after: Of the shares held after this gift on May 18, 2023, 67,420 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 320,408

F5 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.45 to $141.60, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F6 · balance_after: Of the shares held after this sale on May 18, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030588 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,867

F5 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.00 to $141.36, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F6 · balance_after: Of the shares held after this sale on May 18, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030585 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 32,684

F1 · balance_after: Of the shares held as of May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030583 · doc4.xml · nonDerivative · entry 3

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 37,934

F5 · balance_after: Of the shares held after this sale on May 18, 2023, 20,121 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030995 · doc4.xml · nonDerivative · entry 3

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,657

F1 · balance_after: Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030995 · doc4.xml · nonDerivative · entry 2

KEITHLEY JOSEPH P · CIK 0001073329 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,657

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.60 to $141.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030598 · doc4.xml · nonDerivative · entry 2

Redinbo Greg · CIK 0001940017 · EVP Marketing and Applications

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,537

F4 · balance_after: Of the shares held after this sale on May 17, 2023, 17,061 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030595 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · Executive Chairperson

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 328,986

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030594 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · President and CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 69,681

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 39,650 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030588 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,570

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030582 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 27,336

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 20,513 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-23-030583 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 40,344

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 20,121 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.