ONTO

SEC source: 0001257815-23-000034 · edgardoc.xml · derivative · entry 3

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,281

Underlying: Common Stock · 2,281 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000034 · edgardoc.xml · derivative · entry 2

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,282

Underlying: Common Stock · 2,282 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000034 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,385

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000033 · edgardoc.xml · derivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,824

Underlying: Common Stock · 11,824 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000033 · edgardoc.xml · derivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,825

Underlying: Common Stock · 11,825 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000033 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 282,794

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000032 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,977

Underlying: Common Stock · 1,977 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000032 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,978

Underlying: Common Stock · 1,978 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000032 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,615

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000031 · edgardoc.xml · nonDerivative · entry 1

Kelley Stephen Douglas · CIK 0001443674 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 500

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000030 · edgardoc.xml · derivative · entry 3

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,064

Underlying: Common Stock · 1,064 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000030 · edgardoc.xml · derivative · entry 2

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,065

Underlying: Common Stock · 1,065 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000030 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,320

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000029 · edgardoc.xml · derivative · entry 3

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,475

Underlying: Common Stock · 1,475 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000029 · edgardoc.xml · derivative · entry 2

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,476

Underlying: Common Stock · 1,476 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000029 · edgardoc.xml · nonDerivative · entry 1

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 8,586

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000028 · edgardoc.xml · derivative · entry 3

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,095

Underlying: Common Stock · 1,095 shares

Expires 2026-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000028 · edgardoc.xml · derivative · entry 2

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,095

Underlying: Common Stock · 1,095 shares

Expires 2025-02-14

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000028 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,589

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000019 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,398

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000018 · edgardoc.xml · nonDerivative · entry 1

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 5,635

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-23-000017 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,660

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000016 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 259,144

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000011 · edgardoc.xml · derivative · entry 8

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 704 shares

Expires 2023-02-08

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F4 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000011 · edgardoc.xml · nonDerivative · entry 6

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,587

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000011 · edgardoc.xml · nonDerivative · entry 5

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,043

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F4 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000011 · edgardoc.xml · nonDerivative · entry 4

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,635

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000009 · edgardoc.xml · derivative · entry 4

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 994 shares

Expires 2023-02-08

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000009 · edgardoc.xml · nonDerivative · entry 2

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,190

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000010 · edgardoc.xml · derivative · entry 8

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 12,417 shares

Expires 2023-02-08

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000010 · edgardoc.xml · nonDerivative · entry 6

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 262,235

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000010 · edgardoc.xml · nonDerivative · entry 5

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 237,401

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000010 · edgardoc.xml · nonDerivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 241,430

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000011 · edgardoc.xml · derivative · entry 7

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 845 shares

Expires 2023-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000011 · edgardoc.xml · nonDerivative · entry 3

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,787

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000011 · edgardoc.xml · nonDerivative · entry 2

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,379

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000011 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,689

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-23-000009 · edgardoc.xml · derivative · entry 3

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 910 shares

Expires 2023-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000009 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & General Manager

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,202

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-23-000010 · edgardoc.xml · derivative · entry 7

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 15,604 shares

Expires 2023-02-07

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000010 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 253,517

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 7, 2020 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 7, 2023 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-23-000010 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 222,309

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000010 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 227,423

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000067 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,978

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000065 · edgardoc.xml · nonDerivative · entry 1

Harlow James · CIK 0001886460 · Chief Operating Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 5,857

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

F2 · balance_after: Includes 246 shares purchased on June 30, 2022 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-22-000063 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,900

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 10, 2022.

F2 · balance_after: Includes 246 shares purchased on June 30, 2022 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-22-000061 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,316

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001407682-22-000059 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,821

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-22-000055 · edgardoc.xml · nonDerivative · entry 1

TSINGOS CHRISTINE A · CIK 0001278861 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,909

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-22-000053 · edgardoc.xml · nonDerivative · entry 1

ROGGE KAREN M · CIK 0001275868 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,950

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.