ONTO

SEC source: 0001257815-24-000007 · edgardoc.xml · derivative · entry 7

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 12,417 shares

Expires 2024-02-08

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000007 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 260,593

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000007 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 272,596

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000007 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 247,762

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000005 · edgardoc.xml · derivative · entry 5

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 703 shares

Expires 2024-02-08

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000005 · edgardoc.xml · nonDerivative · entry 2

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,235

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 8, 2021 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 8, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000005 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,829

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-23-000098 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,566

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-23-000096 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,547

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-23-000094 · edgardoc.xml · nonDerivative · entry 4

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 13,111

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F5 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $126.62 to $127.62, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000094 · edgardoc.xml · nonDerivative · entry 3

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 13,280

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F4 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $125.44 to $126.23, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000094 · edgardoc.xml · nonDerivative · entry 2

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 14,787

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $124.15 to $124.90, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000094 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 15,388

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $123.07 to $124.05, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000093 · edgardoc.xml · nonDerivative · entry 5

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 6,477

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

SEC source: 0001257815-23-000093 · edgardoc.xml · nonDerivative · entry 4

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 6,639

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

SEC source: 0001257815-23-000093 · edgardoc.xml · nonDerivative · entry 3

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 6,739

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F4 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $125.44 to $126.25, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000093 · edgardoc.xml · nonDerivative · entry 2

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 10,485

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $124.15 to $124.81, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000093 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 11,685

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $123.07 to $124.05, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000090 · edgardoc.xml · nonDerivative · entry 1

BROOKS D MAYSON · CIK 0001194777 · Vice President & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,194

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000089 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,976

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $137.00 to $137.01, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000086 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,445

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-23-000084 · edgardoc.xml · nonDerivative · entry 5

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 251,794

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on May 18, 2023.

F6 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $114.24 to $114.75, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000084 · edgardoc.xml · nonDerivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 256,680

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on May 18, 2023.

F5 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $113.185 to $114.18, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000084 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 266,376

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on May 18, 2023.

F4 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $112.16 to $113.15, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000084 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 273,139

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on May 18, 2023.

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $111.15 to $112.15, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000084 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 280,141

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on May 18, 2023.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $110.00 to $110.91, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000078 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,254

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $105.00 to $105.44, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000076 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 13,485

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $107.6857 to $107.84, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000074 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP, GM MBU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 13,526

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 10, 2022.

SEC source: 0001257815-23-000072 · edgardoc.xml · nonDerivative · entry 2

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,808

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $99.07 to $99.37, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000072 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,993

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $99.38 to $100.38, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-23-000070 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP, GM MBU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 14,372

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 10, 2022.

SEC source: 0001257815-23-000066 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,116

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000068 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP, GM MBU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 15,152

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 10, 2022.

SEC source: 0001257815-23-000062 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SVP & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,717

SEC source: 0001257815-23-000059 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,361

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000058 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,738

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-23-000064 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP, GM MBU

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 15,920

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 10, 2022.

SEC source: 0001257815-23-000051 · edgardoc.xml · nonDerivative · entry 1

TSINGOS CHRISTINE A · CIK 0001278861 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 42,109

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000050 · edgardoc.xml · nonDerivative · entry 1

Su May · CIK 0001918546 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,300

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000049 · edgardoc.xml · nonDerivative · entry 1

SEAMS CHRISTOPHER A · CIK 0001212426 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 34,829

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000048 · edgardoc.xml · nonDerivative · entry 1

ROGGE KAREN M · CIK 0001275868 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,150

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000047 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,808

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000046 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,401

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000039 · edgardoc.xml · nonDerivative · entry 1

Kelley Stephen Douglas · CIK 0001443674 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 2,700

F1 · security: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001257815-23-000037 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,450

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

F2 · price: Represents the vesting price, which is the closing share price on April 6, 2023, the last trading day prior to vesting.

SEC source: 0000704532-23-000003 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,919

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person.

SEC source: 0001257815-23-000035 · edgardoc.xml · derivative · entry 3

Vedula Srinivas · CIK 0001792564 · Senior Vice President, Custome

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,369

Underlying: Common Stock · 1,369 shares

Expires 2026-02-14

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000035 · edgardoc.xml · derivative · entry 2

Vedula Srinivas · CIK 0001792564 · Senior Vice President, Custome

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,369

Underlying: Common Stock · 1,369 shares

Expires 2025-02-14

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-23-000035 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · Senior Vice President, Custome

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,130

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.