ACLS

SEC source: 0001990732-26-000006 · form4-05192026_050506.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 26,548

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2026, 19,967 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001715912-26-000003 · form4-05192026_050502.xml · nonDerivative · entry 3

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 32,221

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2026, 29,823 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001715912-26-000003 · form4-05192026_050502.xml · nonDerivative · entry 2

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 33,088

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

F4 · balance_after: Of the shares held after this grant on May 15, 2026, 31,616 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001715912-26-000003 · form4-05192026_050502.xml · nonDerivative · entry 1

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 29,195

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2026, 27,723 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

SEC source: 0001940017-26-000006 · form4-05192026_050504.xml · nonDerivative · entry 5

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,214

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F10 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F11 · balance_after: Of the shares held after this vesting event on May 15, 2026, 21,131 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-26-000006 · form4-05192026_050504.xml · nonDerivative · entry 4

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,391

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 15, 2026, 21,732 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-26-000006 · form4-05192026_050504.xml · nonDerivative · entry 3

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,601

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2026, 22,445 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-26-000006 · form4-05192026_050504.xml · nonDerivative · entry 2

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 36,053

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

F4 · balance_after: Of the shares held after this grant on May 15, 2026, 23,982 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-26-000006 · form4-05192026_050504.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 32,938

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2026, 20,867 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000012 · form4-05192026_050501.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 155,611

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F10 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F11 · balance_after: Of the shares held after this vesting event on May 15, 2026, 108,161 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000012 · form4-05192026_050501.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 157,064

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 15, 2026, 111,166 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000012 · form4-05192026_050501.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 158,786

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2026, 114,727 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000012 · form4-05192026_050501.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 162,502

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

F4 · balance_after: Of the shares held after this grant on May 15, 2026, 122,412 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000012 · form4-05192026_050501.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 143,036

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2026, 102,946 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0002124265-26-000004 · form4-05152026_050503.xml · nonDerivative · entry 1

Sutton Todd · CIK 0002124265 · VP Corporate Controller

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,817

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $163.8067 to $164.1301, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after this sale on May 14, 2026, 5,538 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001979418-26-000004 · form4-05152026_050501.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,293

F1 · balance_after: Of the shares held after this sale on May 14, 2026, 17,293 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

SEC source: 0001385162-26-000004 · form4-05142026_050503.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 4,477

F1 · balance_after: Of the shares held after this sale on May 13, 2026, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-26-000004 · form4-05142026_050501.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 29,823

F1 · balance_after: Of the shares held after this sale on May 13, 2026, 17,752 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

SEC source: 0002101601-26-000006 · form4-05132026_050501.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,759

F1 · balance_after: Of the shares held after this sale on May 12, 2026, 10,927 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

SEC source: 0001689237-26-000010 · form4-05072026_050501.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 123,570

F1 · kind: This transaction was made pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 11, 2025.

F2 · balance_after: Of the shares held after this sale on May 6, 2026, 83,480 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000008 · form4-05042026_050501.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 131,038

F1 · kind: This transaction was made pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 11, 2025.

F2 · balance_after: Of the shares held after this sale on May 1, 2026, 83,480 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001990732-26-000004 · form4-04212026_050401.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 23,044

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on April 18, 2026 of service vesting restricted stock units granted to the executive in April 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F2 · price: Represents the closing price of the Company's common stock on the date of the tax withholding.

F3 · balance_after: Of the shares held after this vesting on April 18, 2026, 16,463 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

SEC source: 0001689237-26-000006 · form4-04022026_050404.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 132,282

F1 · kind: This transaction was made pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 11, 2025.

F2 · balance_after: Of the shares held after this sale on April 1, 2026, 83,480 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000004 · form4-03262026_050303.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 133,526

F1 · kind: This transaction was made pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 11, 2025.

F2 · balance_after: Of the shares held after this sale on March 24, 2026, 83,480 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

SEC source: 0002101601-26-000004 · form4-03032026_050312.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,633

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 10,543 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001979418-26-000002 · form4-03032026_050310.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,540

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 16,525 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001990732-26-000002 · form4-03032026_050308.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 23,183

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 17,570 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-26-000002 · form4-03032026_050305.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 31,938

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 16,984 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001797868-26-000002 · form4-03032026_050303.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 37,144

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 31,096 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001689237-26-000002 · form4-03032026_050301.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 130,928

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 79,638 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001385162-26-000002 · form4-02232026_050201.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 6,477

F1 · balance_after: Of the shares held after this sale on February 20, 2026, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0002101601-26-000002 · form4-01162026_050101.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,206

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on January 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030.

F2 · balance_after: Of the shares held after this grant on January 15, 2026, 11,611 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001385162-25-000004 · form4-12182025_051203.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,477

F1 · balance_after: Of the shares held after this sale on December 17, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001715912-25-000004 · form4-12182025_051201.xml · nonDerivative · entry 1

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,406

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on December 16, 2025 of 2,850 service vesting restricted stock units granted to the executive in December 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on December 16, 2025, 22,934 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001979418-25-000004 · form4-12122025_051201.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,661

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $89.39 to $89.46, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held after this sale on December 11, 2025, 18,661 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001797868-25-000004 · form4-10172025_051001.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 38,944

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on October 16, 2025 of service vesting restricted stock units granted to the executive in October 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on October 16, 2025, 34,657 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001990732-25-000004 · form4-09172025_050903.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,304

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on September 15, 2025 of service vesting restricted stock units granted to the executive in September 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on September 15, 2025, 19,706 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001940017-25-000004 · form4-09172025_050901.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 32,661

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on September 15, 2025 of service vesting restricted stock units granted to the executive in September 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on September 15, 2025, 19,120 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-017561 · form4-06172025_050606.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,695

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on June 15, 2025 of service vesting restricted stock units granted to the executive in June 2023. The shares issued to the executive following the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on June 15, 2025, 18,661 shares are issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-017560 · form4-06172025_050604.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 32,869

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on June 15, 2025 of service vesting restricted stock units granted to the executive in June 2021. The shares issued to the executive following the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on June 15, 2025, 19,826 are issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013958 · form4-05212025_050501.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 35,050

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $61.72 to $62.22, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of May 20, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013804 · form4-05202025_040501.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 136,155

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F4 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2025 of service-vesting restricted stock units ("RSUs") granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs.

F5 · balance_after: Of the shares held after this vest event on May 17, 2025,90,321 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013805 · form4-05202025_040504.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 33,603

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2025 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 16, 2025, 22,326 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013804 · form4-05202025_040501.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 137,142

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2025 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 16, 2025, 92,361 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013221 · form4-05152025_050528.xml · nonDerivative · entry 2

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 25,784

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026.

F4 · balance_after: Of the shares held after this grant on May 15, 2025, 25,784 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013221 · form4-05152025_050528.xml · nonDerivative · entry 1

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,612

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2025, 18,612 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013220 · form4-05152025_050526.xml · nonDerivative · entry 1

Chiu Tzu Yin · CIK 0001738290 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,403

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013219 · form4-05152025_050523.xml · nonDerivative · entry 1

Sayiner Necip · CIK 0001338515 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,258

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 4,591 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013216 · form4-05152025_050516.xml · nonDerivative · entry 1

St Dennis Thomas · CIK 0001339595 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,155

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013217 · form4-05152025_050518.xml · nonDerivative · entry 1

Quirk Jeanne · CIK 0001908822 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,749

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 4,158 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.