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Mahoney Robert John

Disclosed activity across 1 company

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41914
SEC CIK
0002101601

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CompanyLast reported asReport datePublished
AXCELIS TECHNOLOGIES INCACLS · Entity 4152EVP Global OperationsJune 02, 2026June 03, 2026

Disclosed balances

About these balances

Latest available filing per company, not a reconstructed current portfolio. Matching sequences show the last reported balance with all source rows expandable; grouping alone does not establish account ownership. Do not add unresolved positions together. Filings may omit unchanged positions, and amendments may correct only part of an older disclosure. Jointly reported shares are not necessarily this owner's personal holdings.

AXCELIS TECHNOLOGIES INC

Report date June 02, 2026 · Filed June 03, 2026

Security / awardOwnership accountDisclosed shares / unitsDisclosure context
Common StockSEC Table I · non-derivativeDirect14,410 Reported balance After 2026-06-02 transaction · row 1 Account or security details depend on footnotes; rows are not merged.
1 source row

Row 1 · 2026-06-02 · Sale · Disposed 1,155 · Balance 14,410

F1: Of the shares held after this sale on June 2, 2026, 12,578 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Filing footnotes · ownership attribution and instrument terms

F1: Of the shares held after this sale on June 2, 2026, 12,578 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Transaction history

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Purchases/sales include open-market and private transactions. Plan disclosure applies to the filing; individual rows may differ. “Not disclosed” is not “unplanned.”

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Transaction dateCompanyActivity / securityShares / unitsReported priceReported valueDetails
June 02, 2026 Filed Jun 3, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 SaleCommon Stock 1,155 $155.24 $179,302.20
Disclosure

SEC source: 0002101601-26-000012 · form4-06032026_050601.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,410

F1 · balance_after: Of the shares held after this sale on June 2, 2026, 12,578 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 18, 2026 Filed May 20, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 130 $146.24 $19,011.20
Disclosure

SEC source: 0002101601-26-000010 · form4-05202026_050507.xml · nonDerivative · entry 2

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,565

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F4 · balance_after: Of the shares held after this vesting event on May 16, 2026, 12,578 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 18, 2026 Filed May 20, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 182 $146.24 $26,615.68
Disclosure

SEC source: 0002101601-26-000010 · form4-05202026_050507.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,695

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 16, 2026, 12,846 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2026 Filed May 19, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 61 $155.18 $9,465.98
Disclosure

SEC source: 0002101601-26-000008 · form4-05192026_050510.xml · nonDerivative · entry 6

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,877

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F10 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F12 · balance_after: Of the shares held after this vesting event on May 15, 2026, 13,221 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

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May 15, 2026 Filed May 19, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 170 $155.18 $26,380.60
Disclosure

SEC source: 0002101601-26-000008 · form4-05192026_050510.xml · nonDerivative · entry 5

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,938

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F10 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F11 · balance_after: Of the shares held after this vesting event on May 15, 2026, 13,346 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2026 Filed May 19, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 173 $155.18 $26,846.14
Disclosure

SEC source: 0002101601-26-000008 · form4-05192026_050510.xml · nonDerivative · entry 4

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,108

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 15, 2026, 13,696 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2026 Filed May 19, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 372 $155.18 $57,726.96
Disclosure

SEC source: 0002101601-26-000008 · form4-05192026_050510.xml · nonDerivative · entry 3

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,281

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2026, 14,052 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2026 Filed May 19, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,947 $0.00 $0.00
Disclosure

SEC source: 0002101601-26-000008 · form4-05192026_050510.xml · nonDerivative · entry 2

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,653

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

F4 · balance_after: Of the shares held after this grant on May 15, 2026, 14,821 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 15, 2026 Filed May 19, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,947 $0.00 $0.00
Disclosure

SEC source: 0002101601-26-000008 · form4-05192026_050510.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,706

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2026, 12,874 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
May 12, 2026 Filed May 13, 2026 21:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 SaleCommon Stock 2,258 $161.00 $363,538.00
Disclosure

SEC source: 0002101601-26-000006 · form4-05132026_050501.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,759

F1 · balance_after: Of the shares held after this sale on May 12, 2026, 10,927 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

Read SEC document
March 02, 2026 Filed Mar 3, 2026 22:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 Tax withholdingCommon Stock 573 $86.58 $49,610.34
Disclosure

SEC source: 0002101601-26-000004 · form4-03032026_050312.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,633

F2 · price: Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F3 · balance_after: Of the shares held after the vesting of the remaining 2024 PRSUs, 10,543 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document
January 15, 2026 Filed Jan 16, 2026 22:05 UTC AXCELIS TECHNOLOGIES INC ACLS · Entity 4152 GrantCommon Stock 1,734 $0.00 $0.00
Disclosure

SEC source: 0002101601-26-000002 · form4-01162026_050101.xml · nonDerivative · entry 1

Mahoney Robert John · CIK 0002101601 · EVP Global Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,206

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on January 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030.

F2 · balance_after: Of the shares held after this grant on January 15, 2026, 11,611 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Read SEC document

Value uses the disclosed total when available, otherwise shares × reported transaction price. It is not an estimate of exercise cash cost or investment performance.