ACLS

SEC source: 0001209191-18-015585 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 226,048

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive as of February 28, 2018, 90,625 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015585 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 228,805

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive as of February 28, 2018, 90,625 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015577 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,799

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018,18,212 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015577 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,726

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018,18,212 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015573 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,849

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 23,069 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015573 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,661

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 23,069 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015569 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,517

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 23,069 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015569 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,329

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 23,069 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015562 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,223

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 35,000 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015562 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,351

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 35,000 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015558 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,500

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 25,342 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015558 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,427

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 25,342 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015555 · doc4.xml · nonDerivative · entry 2

ALDEBORGH JOHN E · CIK 0001192438 · EVP, Customer Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,872

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 25,342 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015555 · doc4.xml · nonDerivative · entry 1

ALDEBORGH JOHN E · CIK 0001192438 · EVP, Customer Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,799

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018, 25,342 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-17-060947 · doc4.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 26,498

F1 · kind: This sale of 1,800 shares was made to cover the tax liability incident to the vesting of 3,802 shares on November 17, 2017 under restricted stock units granted to the director on May 17, 2017.

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $34.00 to $34.05, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F3 · balance_after: Of the shares held as of November 15, 2017, 9,427 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-061152 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,393

F2 · price: Represents the closing price on November 15, 2017.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 15, 2017.

F3 · balance_after: Of the shares held as of November 15, 2017, 21,545 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060937 · doc4.xml · nonDerivative · entry 1

FAUBERT RICHARD J · CIK 0001230508 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 26,689

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $34.45 to $34.50, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of November 14, 2017, 9,427 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060934 · doc4.xml · derivative · entry 4

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,610

Underlying: Common Stock · 31,640 shares

Expires 2022-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F4 · balance_after: 56,250 options were granted on July 15, 2015 and were vested as to 56.25% of the options as of October 15, 2017. Of the remaining 24,610 options held by the executive after the sales reported on this form, 3,515/6 options will vest on the 15th of each of July, October, January, and April until fully vested on July 15, 2019, if the officer remains in the service of the Company on such vesting dates.

SEC source: 0001209191-17-060934 · doc4.xml · nonDerivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,184

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $34.30 to $34.35, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of September 12, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060934 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,184

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $33.75 to $33.93, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of September 12, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060934 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 100,824

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of September 12, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060055 · doc4.xml · derivative · entry 3

ALDEBORGH JOHN E · CIK 0001192438 · EVP, Customer Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 87,500 shares

Expires 2020-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-060055 · doc4.xml · nonDerivative · entry 2

ALDEBORGH JOHN E · CIK 0001192438 · EVP, Customer Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,446

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $32.95 to $33.48, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of November 8, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060055 · doc4.xml · nonDerivative · entry 1

ALDEBORGH JOHN E · CIK 0001192438 · EVP, Customer Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 126,946

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of November 8, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060054 · doc4.xml · derivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,672

Underlying: Common Stock · 1,953 shares

Expires 2022-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · balance_after: 31,250 options were granted on July 15, 2015 and were vested as to 56.25% of the options as of October 15, 2017. Of the remaining 13,672 options held by the executive after the sales reported on this form, 1953/4 options will vest on the 15th of each of October, January, April and July until fully vested on July 15, 2019, if the officer remains in the service of the Company on such vesting dates.

SEC source: 0001209191-17-060054 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,244

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $33.05 to $33.10, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of November 7, 2017, 25,986 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060054 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,197

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of November 7, 2017, 25,986 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060053 · doc4.xml · derivative · entry 4

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,875

Underlying: Common Stock · 28,125 shares

Expires 2022-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F4 · balance_after: 50,000 options were granted on July 15, 2015 and were vested as to 56.25% of the options as of October 15, 2017. Of the remaining 21,875 options held by the executive after the sales reported on this form, 3,125 options will vest on the 15th of each of July, October, January, and April until fully vested on July 15, 2019, if the officer remains in the service of the Company on such vesting dates.

SEC source: 0001209191-17-060053 · doc4.xml · nonDerivative · entry 3

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 45,094

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $33.47 to $33.85, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of November 7, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060053 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,094

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $33.25 to $33.65, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of November 7, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060053 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 82,219

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of November 7, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060052 · doc4.xml · derivative · entry 6

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 18,750 shares

Expires 2020-07-01

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-060052 · doc4.xml · derivative · entry 5

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 37,500 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-060052 · doc4.xml · nonDerivative · entry 4

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,912

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $32.80 to $33.15, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of November 7, 2017, 25,985 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060052 · doc4.xml · nonDerivative · entry 3

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 72,662

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of November 7, 2017, 25,985 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060052 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,912

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $32.50 to $33.40, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of November 7, 2017, 25,985 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-060052 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 91,412

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of November 7, 2017, 25,985 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-052595 · doc4.xml · derivative · entry 6

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,063

Underlying: Common Stock · 24,848 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-052595 · doc4.xml · derivative · entry 5

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 37,500 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-052595 · doc4.xml · nonDerivative · entry 4

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,184

F1 · balance_after: Of the shares held as of September 12, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-052595 · doc4.xml · nonDerivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 94,032

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-052595 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,184

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.30 to $22.70, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

SEC source: 0001209191-17-052595 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 106,684

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of September 12, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-052599 · doc4.xml · derivative · entry 3

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,500

Underlying: Common Stock · 12,500 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-052599 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,094

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.55 to $22.625, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F1 · balance_after: Of the shares held as of September 12, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-052599 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 66,594

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of September 12, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-050187 · doc4.xml · derivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,911

Underlying: Common Stock · 17,339 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-17-050187 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,184

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $20.75 to $20.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price.

F1 · balance_after: Of the shares held as of August 22, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-050187 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 86,523

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of August 22, 2017, 39,167 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-048964 · doc4.xml · derivative · entry 10

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 7,813

Underlying: Common Stock · 7,812 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F4 · balance_after: 31,250 options were granted on July 15, 2014 and were vested as to 75% of the options as of August 15, 2017. The remaining 7,814 options held by the executive after the sales on that date will vest on July 15, 2018, if the officer remains in the service of the Company on such vesting date.