ONTO

SEC source: 0001407682-21-000074 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,008

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-21-000072 · edgardoc.xml · nonDerivative · entry 1

Brown Edward J Jr · CIK 0001338009 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,739

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-21-000070 · edgardoc.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,876

F1 · security: Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock.

F2 · shares: 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.

SEC source: 0001407682-21-000068 · edgardoc.xml · nonDerivative · entry 4

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 186,038

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021.

F5 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $71.25 to $71.63, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000068 · edgardoc.xml · nonDerivative · entry 3

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 186,838

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021.

F4 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $70.00 to $70.66, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000068 · edgardoc.xml · nonDerivative · entry 2

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 203,349

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021.

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $71.00 to $71.47, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000068 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 224,459

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $70.00 to $70.99, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000066 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,803

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 23, 2020.

F2 · balance_after: Includes a reduction of 2 shares due to administrative error related to rounding.

SEC source: 0001407682-21-000064 · edgardoc.xml · nonDerivative · entry 3

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · Trust - CRT

Disclosed balance after: 30,000

F2 · kind: Represents shares of Common Stock that the reporting person transferred to a charitable remainder trust created on March 12, 2021 (the "CRT") of which the reporting person is the trustee.

SEC source: 0001407682-21-000064 · edgardoc.xml · nonDerivative · entry 2

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 236,038

F2 · kind: Represents shares of Common Stock that the reporting person transferred to a charitable remainder trust created on March 12, 2021 (the "CRT") of which the reporting person is the trustee.

SEC source: 0001407682-21-000064 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 266,038

F1 · kind: Represents gift of shares of Common Stock to the Schwab Charitable Fund. This transaction is reportable on Form 5, but the reporting person is voluntarily reporting early on Form 4.

SEC source: 0001407682-21-000059 · edgardoc.xml · nonDerivative · entry 1

Heidrich Kevin · CIK 0001635121 · Sr. Vice President, Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,286

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-21-000057 · edgardoc.xml · nonDerivative · entry 2

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,517

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-21-000057 · edgardoc.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 49,072

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-22-000004 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 280,788

SEC source: 0001407682-21-000054 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,508

SEC source: 0001407682-21-000052 · edgardoc.xml · nonDerivative · entry 2

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 50,539

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-21-000052 · edgardoc.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,764

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-21-000050 · edgardoc.xml · nonDerivative · entry 1

Heidrich Kevin · CIK 0001635121 · Sr. Vice President, Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,817

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-21-000048 · edgardoc.xml · nonDerivative · entry 2

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 281,038

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $61.53 to $61.67, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000048 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 284,741

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $60.49 to $61.48, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000046 · edgardoc.xml · nonDerivative · entry 4

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 426,372

F4 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $59.00 to $60.00, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000046 · edgardoc.xml · nonDerivative · entry 3

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 438,616

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $60.02 to $60.68, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000046 · edgardoc.xml · nonDerivative · entry 2

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 439,271

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $60.01 to $60.76, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000046 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 446,362

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $59.00 to $60.00, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001407682-21-000044 · primary_doc.xml · derivative · entry 3

Heidrich Kevin · CIK 0001635121 · Sr. Vice President, Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,241

Underlying: Common Stock · 1,241 shares

Expires 2024-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000044 · primary_doc.xml · derivative · entry 2

Heidrich Kevin · CIK 0001635121 · Sr. Vice President, Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,242

Underlying: Common Stock · 1,242 shares

Expires 2023-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000044 · primary_doc.xml · nonDerivative · entry 1

Heidrich Kevin · CIK 0001635121 · Sr. Vice President, Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,749

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000043 · primary_doc.xml · derivative · entry 3

HARTUNIAN BARRY · CIK 0001795758 · Global VP, Human Resources

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 724

Underlying: Common Stock · 724 shares

Expires 2024-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000043 · primary_doc.xml · derivative · entry 2

HARTUNIAN BARRY · CIK 0001795758 · Global VP, Human Resources

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 725

Underlying: Common Stock · 725 shares

Expires 2023-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000043 · primary_doc.xml · nonDerivative · entry 1

HARTUNIAN BARRY · CIK 0001795758 · Global VP, Human Resources

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,058

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000042 · edgardoc.xml · derivative · entry 3

SMEDT RODNEY · CIK 0001230497 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 972

Underlying: Common Stock · 972 shares

Expires 2024-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000042 · edgardoc.xml · derivative · entry 2

SMEDT RODNEY · CIK 0001230497 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 973

Underlying: Common Stock · 973 shares

Expires 2023-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000042 · edgardoc.xml · nonDerivative · entry 1

SMEDT RODNEY · CIK 0001230497 · Sr. Vice President & GM, Metro

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,113

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000040 · edgardoc.xml · derivative · entry 3

Jin Ju · CIK 0001783605 · VP & General Manager of IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 993

Underlying: Common Stock · 993 shares

Expires 2024-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000040 · edgardoc.xml · derivative · entry 2

Jin Ju · CIK 0001783605 · VP & General Manager of IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 994

Underlying: Common Stock · 994 shares

Expires 2023-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000040 · edgardoc.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · VP & General Manager of IBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 8,049

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000038 · edgardoc.xml · derivative · entry 3

Iacopetti Dean · CIK 0001792562 · Vice President, Manufacturing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 724

Underlying: Common Stock · 724 shares

Expires 2024-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000038 · edgardoc.xml · derivative · entry 2

Iacopetti Dean · CIK 0001792562 · Vice President, Manufacturing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 725

Underlying: Common Stock · 725 shares

Expires 2023-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000038 · edgardoc.xml · nonDerivative · entry 1

Iacopetti Dean · CIK 0001792562 · Vice President, Manufacturing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,475

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000036 · edgardoc.xml · derivative · entry 3

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,400

Underlying: Common Stock · 2,400 shares

Expires 2024-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000036 · edgardoc.xml · derivative · entry 2

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,401

Underlying: Common Stock · 2,401 shares

Expires 2023-02-08

F2 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000036 · edgardoc.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · Sr VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,322

F1 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000034 · edgardoc.xml · derivative · entry 4

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,035

Underlying: Common Stock · 1,035 shares

Expires 2024-02-08

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000034 · edgardoc.xml · derivative · entry 3

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,035

Underlying: Common Stock · 1,035 shares

Expires 2023-02-08

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000034 · edgardoc.xml · nonDerivative · entry 2

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,689

F2 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001407682-21-000034 · edgardoc.xml · nonDerivative · entry 1

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,619

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-21-000032 · edgardoc.xml · derivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,690

Underlying: Common Stock · 2,690 shares

Expires 2024-02-08

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000032 · edgardoc.xml · derivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,691

Underlying: Common Stock · 2,691 shares

Expires 2023-02-08

F3 · derivative.exercise_price: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001407682-21-000032 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,805

F2 · shares: Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.