ONTO

SEC source: 0001209191-19-054369 · doc4.xml · derivative · entry 3

Lesaicherre Pierre-Yves · CIK 0001723434 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 37,063 shares

Expires 2022-03-11

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled.

F1 · derivative.exercise_date: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled.

SEC source: 0001209191-19-054369 · doc4.xml · nonDerivative · entry 2

Lesaicherre Pierre-Yves · CIK 0001723434 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 101,606

SEC source: 0001209191-19-054369 · doc4.xml · nonDerivative · entry 1

Lesaicherre Pierre-Yves · CIK 0001723434 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 193,740

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0000899243-19-026264 · doc4.xml · nonDerivative · entry 2

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,656

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026264 · doc4.xml · nonDerivative · entry 1

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,947

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026260 · doc4.xml · nonDerivative · entry 2

Cassese Vita A · CIK 0001749068 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 6,433

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026260 · doc4.xml · nonDerivative · entry 1

Cassese Vita A · CIK 0001749068 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,136

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026256 · doc4.xml · nonDerivative · entry 2

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,209

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026256 · doc4.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,912

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026255 · doc4.xml · nonDerivative · entry 2

da Silveira Elvino M · CIK 0001564707 · VP & GM of LSG

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,867

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026255 · doc4.xml · nonDerivative · entry 1

da Silveira Elvino M · CIK 0001564707 · VP & GM of LSG

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,218

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026254 · doc4.xml · nonDerivative · entry 2

Aukerman Jeffrey A. · CIK 0001628505 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,760

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026254 · doc4.xml · nonDerivative · entry 1

Aukerman Jeffrey A. · CIK 0001628505 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · By Investment LLC

Disclosed balance after: 20,463

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0001209191-19-054376 · doc4.xml · derivative · entry 4

Kocher Rollin · CIK 0001684779 · SVP, Sales and Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,950 shares

Expires 2020-02-08

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units were converted at target, resulting in the conversion of 2/3 of the shares subject to the performance stock unit into restricted stock units, and the remainder of the performance stock unit being cancelled.

F2 · derivative.exercise_date: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units were converted at target, resulting in the conversion of 2/3 of the shares subject to the performance stock unit into restricted stock units, and the remainder of the performance stock unit being cancelled.

SEC source: 0001209191-19-054376 · doc4.xml · derivative · entry 3

Kocher Rollin · CIK 0001684779 · SVP, Sales and Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 4,847 shares

Expires 2021-02-23

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units were converted at target, resulting in the conversion of 2/3 of the shares subject to the performance stock unit into restricted stock units, and the remainder of the performance stock unit being cancelled.

F2 · derivative.exercise_date: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units were converted at target, resulting in the conversion of 2/3 of the shares subject to the performance stock unit into restricted stock units, and the remainder of the performance stock unit being cancelled.

SEC source: 0001209191-19-054376 · doc4.xml · derivative · entry 2

Kocher Rollin · CIK 0001684779 · SVP, Sales and Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 6,366 shares

Expires 2022-03-11

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units were converted at target, resulting in the conversion of 2/3 of the shares subject to the performance stock unit into restricted stock units, and the remainder of the performance stock unit being cancelled.

F2 · derivative.exercise_date: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units were converted at target, resulting in the conversion of 2/3 of the shares subject to the performance stock unit into restricted stock units, and the remainder of the performance stock unit being cancelled.

SEC source: 0001209191-19-054376 · doc4.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · SVP, Sales and Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 57,414

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: Shares are represented by restricted stock units. Each restricted stock unit represents a contingent right to receive one share of NANO common stock. The restricted stock units vest on an annual basis, in equal 1/3 increments, over a three-year period from the award date.

SEC source: 0001209191-19-054372 · doc4.xml · nonDerivative · entry 1

Barnhart James · CIK 0001734406 · SVP, Business Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,046

SEC source: 0001209191-19-054374 · doc4.xml · nonDerivative · entry 1

Taylor Janet Therese · CIK 0001647625 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,110

SEC source: 0000899243-19-026352 · doc4.xml · nonDerivative · entry 2

Chan Chun Hoy · CIK 0001631609 · Vice President, Sales

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,339

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026352 · doc4.xml · nonDerivative · entry 1

Chan Chun Hoy · CIK 0001631609 · Vice President, Sales

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,072

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026285 · doc4.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 298,734

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026285 · doc4.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 236,421

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026284 · doc4.xml · nonDerivative · entry 1

Jin Ju · CIK 0001783605 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,976

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0001209191-19-056016 · doc4a.xml · derivative · entry 3

Lesaicherre Pierre-Yves · CIK 0001723434 · Former President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Comon Stock · 62,500 shares

Expires 2020-11-27

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This performance stock unit represented a contingent right to receive shares of NANO common stock. The performance stock unit vested with respect to 59,480 shares, resulting in 59,480 shares released at target, and the remainder was cancelled.

F2 · derivative.exercise_date: This performance stock unit represented a contingent right to receive shares of NANO common stock. The performance stock unit vested with respect to 59,480 shares, resulting in 59,480 shares released at target, and the remainder was cancelled.

SEC source: 0001209191-19-056016 · doc4a.xml · nonDerivative · entry 2

Lesaicherre Pierre-Yves · CIK 0001723434 · Former President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 108,564

F1 · shares: This amendment to Form 4 is being filed to correct the number of shares issued upon the vesting of a performance stock unit and the number of shares withheld to cover taxes, which also resulted in a greater number of shares held after such transactions.

F1 · balance_after: This amendment to Form 4 is being filed to correct the number of shares issued upon the vesting of a performance stock unit and the number of shares withheld to cover taxes, which also resulted in a greater number of shares held after such transactions.

SEC source: 0001209191-19-056016 · doc4a.xml · nonDerivative · entry 1

Lesaicherre Pierre-Yves · CIK 0001723434 · Former President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 211,553

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · shares: This amendment to Form 4 is being filed to correct the number of shares issued upon the vesting of a performance stock unit and the number of shares withheld to cover taxes, which also resulted in a greater number of shares held after such transactions.

F1 · balance_after: This amendment to Form 4 is being filed to correct the number of shares issued upon the vesting of a performance stock unit and the number of shares withheld to cover taxes, which also resulted in a greater number of shares held after such transactions.

SEC source: 0001407682-20-000009 · primary_doc.xml · nonDerivative · entry 2

Aukerman Jeffrey A. · CIK 0001628505 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,297

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F3 · balance_after: The Form 4 filed on October 29, 2019, inadvertently gave the wrong number for the amount of securities beneficially owned directly following the reported transaction. This amendment fixes such error.

SEC source: 0001407682-20-000009 · primary_doc.xml · nonDerivative · entry 1

Aukerman Jeffrey A. · CIK 0001628505 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · By Investment LLC

Disclosed balance after: 20,463

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0001209191-19-042988 · doc4.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 692,117

SEC source: 0001209191-19-042282 · doc4.xml · nonDerivative · entry 1

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 227,099

SEC source: 0001209191-19-040245 · doc4.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · SVP, Sales and Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,638

F1 · balance_after: Includes 693 shares purchased on June 30, 2019 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001209191-19-040212 · doc4.xml · nonDerivative · entry 1

Swyt Greg · CIK 0001723433 · VP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,627

F1 · balance_after: Includes 32 shares purchased on June 30, 2019 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001209191-19-040288 · doc4.xml · nonDerivative · entry 1

Heidrich Kevin · CIK 0001635121 · SVP, Corporate Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,239

F1 · kind: Shares were purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001209191-19-040291 · doc4.xml · nonDerivative · entry 1

Barnhart James · CIK 0001734406 · SVP, Business Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,426

F1 · kind: Shares were purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001209191-19-040248 · doc4.xml · nonDerivative · entry 1

Taylor Janet Therese · CIK 0001647625 · General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,523

F1 · kind: Shares were purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001209191-19-040267 · doc4.xml · nonDerivative · entry 1

Lesaicherre Pierre-Yves · CIK 0001723434 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 110,256

F1 · kind: Shares were purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001209191-19-039892 · doc4.xml · derivative · entry 6

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 17,986 shares

Expires 2020-03-12

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

F4 · derivative.exercise_date: Fully vested.

SEC source: 0001209191-19-039892 · doc4.xml · nonDerivative · entry 4

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 227,249

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

F3 · price: The price in Column 4 is a weighted average sale price. The prices actually received ranged from $35.00 to $35.695. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.

SEC source: 0001209191-19-039892 · doc4.xml · nonDerivative · entry 3

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 245,235

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

SEC source: 0001209191-19-039892 · doc4.xml · derivative · entry 5

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,986

Underlying: Common Stock · 30,000 shares

Expires 2020-03-12

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

F4 · derivative.exercise_date: Fully vested.

SEC source: 0001209191-19-039892 · doc4.xml · nonDerivative · entry 2

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 227,249

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

F2 · price: The price in Column 4 is a weighted average sale price. The prices actually received ranged from $35.00 to $35.10. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.

SEC source: 0001209191-19-039892 · doc4.xml · nonDerivative · entry 1

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 257,249

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

SEC source: 0001209191-19-039167 · doc4.xml · derivative · entry 3

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,986

Underlying: Common Stock · 12,014 shares

Expires 2020-03-12

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

F3 · derivative.exercise_date: Fully vested.

SEC source: 0001209191-19-039167 · doc4.xml · nonDerivative · entry 2

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 227,249

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

F2 · price: The price in Column 4 is a weighted average sale price. The prices actually received ranged from $35.00 to $35.59. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.

SEC source: 0001209191-19-039167 · doc4.xml · nonDerivative · entry 1

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 239,263

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · kind: Transaction pursuant to Rule 10b5-1 Plan adopted November 26, 2018.

SEC source: 0001209191-19-034075 · doc4.xml · nonDerivative · entry 2

Swyt Greg · CIK 0001723433 · VP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,627

SEC source: 0001209191-19-034075 · doc4.xml · nonDerivative · entry 1

Swyt Greg · CIK 0001723433 · VP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 12,902

SEC source: 0001209191-19-034074 · doc4.xml · nonDerivative · entry 1

Barnhart James · CIK 0001734406 · SVP, Business Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,933

SEC source: 0001209191-19-033088 · doc4.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · SVP, Sales and Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,638