ONTO

SEC source: 0001407682-20-000046 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,228

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000046 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,885

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000045 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 291,388

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000045 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 292,854

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000044 · edgardoc.xml · nonDerivative · entry 2

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,063

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000044 · edgardoc.xml · nonDerivative · entry 1

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,371

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000102 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 288,575

F1 · shares: The purpose of this amendment is to correct an administrative error in the previously reported amount of shares withheld by the Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units (RSUs). This amendment supersedes the amendment filed on February 11, 2020.

SEC source: 0001407682-20-000102 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 291,485

F1 · shares: The purpose of this amendment is to correct an administrative error in the previously reported amount of shares withheld by the Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock units (RSUs). This amendment supersedes the amendment filed on February 11, 2020.

SEC source: 0001407682-20-000028 · edgardoc.xml · nonDerivative · entry 4

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,635

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000028 · edgardoc.xml · nonDerivative · entry 3

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,904

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 4

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 62,444

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 3

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 62,773

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000024 · edgardoc.xml · nonDerivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 294,245

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000024 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 295,142

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000028 · edgardoc.xml · nonDerivative · entry 2

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,202

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000028 · edgardoc.xml · nonDerivative · entry 1

KOCH ROBERT ALAN · CIK 0001244761 · VP & General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,431

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,162

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000026 · edgardoc.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · Senior Vice President & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,605

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000024 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 296,218

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000024 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · Chief Executive Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 297,549

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001407682-20-000013 · edgardoc.xml · nonDerivative · entry 5

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 585,417

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 27, 2018.

SEC source: 0001407682-20-000013 · edgardoc.xml · nonDerivative · entry 4

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 585,517

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 27, 2018.

SEC source: 0001407682-20-000013 · edgardoc.xml · nonDerivative · entry 3

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 586,017

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 27, 2018.

SEC source: 0001407682-20-000013 · edgardoc.xml · nonDerivative · entry 2

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 591,818

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 27, 2018.

SEC source: 0001407682-20-000013 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 628,387

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on November 27, 2018.

SEC source: 0001407682-20-000004 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · VP & GM, WBU

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 13,772

F1 · balance_after: Includes 298 shares purchased on December 31, 2019 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-20-000006 · edgardoc.xml · nonDerivative · entry 1

Kocher Rollin · CIK 0001684779 · Senior VP, Field Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 57,414

F1 · balance_after: Includes 168 shares purchased on December 31, 2019 pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-20-000008 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · VP, Sales

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,144

F1 · kind: Shares were purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-20-000011 · edgardoc.xml · nonDerivative · entry 1

Heidrich Kevin · CIK 0001635121 · Sr. Vice President, Marketing

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,449

F1 · kind: Shares were purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001407682-20-000002 · edgardoc.xml · nonDerivative · entry 1

Stultz Timothy J · CIK 0001410399 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 226,809

SEC source: 0001257815-19-000014 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 665,417

SEC source: 0001257815-19-000012 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 666,117

SEC source: 0001257815-19-000008 · edgardoc.xml · nonDerivative · entry 1

Swyt Greg · CIK 0001723433 · VP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,680

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-19-000006 · edgardoc.xml · nonDerivative · entry 1

Rhine Bruce C · CIK 0001369134 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 667,117

F1 · price: The price in Column 4 is a weighted average sale price. The prices actually received ranged from $34.57 to $34.71. The reporting person will provide to the issuer, any security holder of the issuer, or the SEC staff, upon request, information regarding the number of shares sold at each price within the range.

SEC source: 0000899243-19-026276 · doc4.xml · nonDerivative · entry 2

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,576

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026276 · doc4.xml · nonDerivative · entry 1

BERLINGHIERI LEO · CIK 0001202738 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,279

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026269 · doc4.xml · nonDerivative · entry 2

ROTH STEVEN R · CIK 0001132849 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 64,038

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026269 · doc4.xml · nonDerivative · entry 1

ROTH STEVEN R · CIK 0001132849 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 42,826

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026249 · doc4.xml · nonDerivative · entry 2

Lehmann Erich J · CIK 0001791748 · VP, Corporate Accounting

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,767

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026249 · doc4.xml · nonDerivative · entry 1

Lehmann Erich J · CIK 0001791748 · VP, Corporate Accounting

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,557

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026268 · doc4.xml · nonDerivative · entry 2

WHITTEN JOHN R · CIK 0001370507 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 26,618

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026268 · doc4.xml · nonDerivative · entry 1

WHITTEN JOHN R · CIK 0001370507 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,321

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026275 · doc4.xml · nonDerivative · entry 2

LaBua Leonard A · CIK 0001749051 · VP & GM, ESG

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 4,829

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026275 · doc4.xml · nonDerivative · entry 1

LaBua Leonard A · CIK 0001749051 · VP & GM, ESG

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,473

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026274 · doc4.xml · nonDerivative · entry 2

Sheaffer Michael · CIK 0001791809 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,354

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026274 · doc4.xml · nonDerivative · entry 1

Sheaffer Michael · CIK 0001791809 · SEE REMARKS

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 514

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026270 · doc4.xml · nonDerivative · entry 2

Murray George C · CIK 0001762393 · VP, Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,131

F2 · shares: These restricted stock units ("RSUs") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the "Plan") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0000899243-19-026270 · doc4.xml · nonDerivative · entry 1

Murray George C · CIK 0001762393 · VP, Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 878

F1 · shares: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

F1 · price: On October 25, 2019, pursuant to an Agreement and Plan of Merger (the "Merger Agreement"), Rudolph Technologies, Inc. ("Rudolph") and Nanometrics Incorporated ("Nanometrics") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the "Merger"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to "Onto Innovation Inc." ("Onto Innovation") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the "Exchange Ratio"), with cash paid in lieu of fractional shares.

SEC source: 0001209191-19-054369 · doc4.xml · derivative · entry 5

Lesaicherre Pierre-Yves · CIK 0001723434 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Comon Stock · 62,500 shares

Expires 2020-11-27

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled.

F1 · derivative.exercise_date: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled.

SEC source: 0001209191-19-054369 · doc4.xml · derivative · entry 4

Lesaicherre Pierre-Yves · CIK 0001723434 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 25,662 shares

Expires 2021-02-23

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · derivative.exercise_price: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled.

F1 · derivative.exercise_date: Each performance stock unit represented a contingent right to receive one share of NANO common stock. The grant was made at 150% of target. The performance stock units vested at target, resulting in the issuance of 2/3 of the shares subject to the performance stock unit, and the remainder of the performance stock unit being cancelled.