ACLS

SEC source: 0001415889-25-013218 · form4-05152025_050521.xml · nonDerivative · entry 1

GRAVES GREGORY B · CIK 0001208109 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,258

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 4,591 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013215 · form4-05152025_050513.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,477

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013214 · form4-05152025_050510.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 36,732

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.

F2 · balance_after: Of the shares held as of May 15, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013647 · form4-05192025_040527.xml · nonDerivative · entry 4

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,441

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 15, 2025, 19,988 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013647 · form4-05192025_040527.xml · nonDerivative · entry 3

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,611

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2025, 20,338 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013647 · form4-05192025_040527.xml · nonDerivative · entry 2

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 24,956

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026.

F4 · balance_after: Of the shares held after this grant on May 15, 2025, 21,050 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013647 · form4-05192025_040527.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,808

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2025, 14,902 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013646 · form4-05192025_040524.xml · nonDerivative · entry 4

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 33,793

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 15, 2025, 22,968 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013646 · form4-05192025_040524.xml · nonDerivative · entry 3

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 33,970

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2025, 23,569 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013646 · form4-05192025_040524.xml · nonDerivative · entry 2

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 34,179

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026.

F4 · balance_after: Of the shares held after this grant on May 15, 2025, 24,281 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013646 · form4-05192025_040524.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 28,031

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2025, 18,133 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013645 · form4-05192025_040522.xml · nonDerivative · entry 3

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 39,657

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of restricted stock units ("RSUs") granted to the executive in May 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2025, 36,130 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013645 · form4-05192025_040522.xml · nonDerivative · entry 2

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 40,231

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026.

F4 · balance_after: Of the shares held after this grant on May 15, 2025, 37,317 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013645 · form4-05192025_040522.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 27,936

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2025, 25,022 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013644 · form4-05192025_040520.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 137,854

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 15, 2025, 93,832 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013644 · form4-05192025_040520.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 139,307

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2025, 96,836 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013644 · form4-05192025_040520.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 141,029

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026.

F4 · balance_after: Of the shares held after this grant on May 15, 2025, 100,397 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013644 · form4-05192025_040520.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 110,291

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2025, 69,659 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013643 · form4-05192025_040518.xml · nonDerivative · entry 3

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 22,201

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of the restricted stock units ("RSUs") granted to the executive in May 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs.

F7 · balance_after: Of the shares held after this vesting event on May 15, 2025, 19,706 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013643 · form4-05192025_040518.xml · nonDerivative · entry 2

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 22,546

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026.

F4 · balance_after: Of the shares held after this grant on May 15, 2025, 20,418 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-013643 · form4-05192025_040518.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,398

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029.

F2 · balance_after: Of the shares held following this grant on May 15, 2025, 14,270 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-011152 · form4-04222025_040401.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,660

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on April 18, 2025 of the restricted stock units ("RSUs") granted to the executive in April 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs.

F2 · price: Represents the closing price of a share of the Company's common stock on April 21, 2025, the date shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of RSUs on April 18, 2025.

F3 · balance_after: Of the shares held as of April 21, 2025, 8,754 shares were issuable on vesting of RSUs granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006550 · form4-03042025_040328.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 13,567

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F3 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 10,629 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006551 · form4-03042025_040330.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Research, Dev. & Eng.

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,250

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F3 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 8,122 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006548 · form4-03042025_040323.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 79,553

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F5 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 38,921 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006548 · form4-03042025_040323.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 84,765

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2023 PRSUs") granted to the executive in May 2023. The units vesting on the 2023 PRSUs were deemed earned by the Compensation Committee in February 2024, and the shares vesting on February 28, 2025 represent the final tranche of that grant. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2023 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F3 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2023 PRSUs, 49,604 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006549 · form4-03042025_040325.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,641

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F3 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 12,727 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006547 · form4-03042025_040321.xml · nonDerivative · entry 2

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 21,883

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F5 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 11,985 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-006547 · form4-03042025_040321.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 22,632

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units ("2023 PRSUs") granted to the executive in May 2023. The units vesting on the 2023 PRSUs were deemed earned by the Compensation Committee in February 2024, and the shares vesting on February 28, 2025 represent the final tranche of that grant. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2023 PRSUs.

F2 · price: Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding.

F3 · balance_after: Of the shares held as of February 28, 2025 after the vesting of the 2023 PRSUs, 14,123 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-25-000958 · form4-01072025_120100.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · EXECUTIVE VP, HR/LEGAL

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 27,323

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on January 3, 2025 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: Represents the closing price of the Company's common stock on January 3, 2025,the date of the tax withholding,

F3 · balance_after: Of the shares held as of January 3, 2025, after the acceleration of vesting, 4,551 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-029404 · form4-12162024_011201.xml · nonDerivative · entry 1

Evans Eileen · CIK 0001715912 · EVP, General Counsel and Sec'y

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 11,440

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on December 16, 2024. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of December 16, 2025, 2026, 2027 and 2028.

F2 · balance_after: All of the shares held following this grant on December 16, 2024 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-025390 · form4a-10172024_101040.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,054

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on October 16, 2024 of service vesting restricted stock units granted to the executive in October 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on October 16, 2024, 13,914 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-025388 · form4-10172024_101002.xml · nonDerivative · entry 1

COOGAN JAMES GORDON · CIK 0001797868 · EVP AND CFO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,140

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on October 16, 2024 of service vesting restricted stock units granted to the executive in October 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on October 16, 2024, 13,914 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-023523 · form4-09172024_040907.xml · nonDerivative · entry 1

Tatnall Christopher · CIK 0001990732 · EVP Global Customer Operations

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 13,288

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on September 16, 2024 of service vesting restricted stock units granted to the executive in September 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on September 16, 2024, 11,342 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-023522 · form4-09172024_040905.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 22,455

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on September 16, 2024 of service vesting restricted stock units granted to the executive in September 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on September 16, 2024, 16,821 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-027249 · form4a-11192024_051101.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,678

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on September 16, 2024 of service vesting restricted stock units granted to the executive in September 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on September 16, 2024, 14,321 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-020845 · form4-08062024_050805.xml · nonDerivative · entry 1

Titinger Jorge · CIK 0001385162 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,891

F1 · balance_after: Of the shares held as of August 6, 2024, 1,662 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-018031 · form4-06242024_050601.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,808

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on June 20, 2024 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F3 · balance_after: Of the shares held as of June 20, 2024, after the acceleration of vesting, 4,128 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-017399 · form4-06182024_040639.xml · nonDerivative · entry 1

Blumenstock Gerald M · CIK 0001979418 · EVP, Engineering

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,572

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on June 17, 2024 of service vesting restricted stock units granted to the executive in June 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on June 17, 2024, 8,835 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-017398 · form4-06182024_040634.xml · nonDerivative · entry 1

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 21,914

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on June 17, 2024 of service vesting restricted stock units granted to the executive in June 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this forfeiture event on June 17, 2024, 15,028 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-015556 · form4-06052024_040606.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · EXECUTIVE VP, HR/LEGAL AND GEN

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 30,406

F2 · price: Represents the closing price of the common stock on the date prior to the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting in May 2024 of 4 service vesting restricted stock units granted to the executive in May 2020, 2021, 2022 and 2023. As agreed with the executive, the shares issued to the executive on those vesting events were reduced by a number of shares to cover the executive's tax withholding obligation with respect to the vested restricted stock units. However, the number of shares withheld on the vesting dates was insufficient to cover a Massachusetts income tax surcharge applicable to the executive, so additional shares have been withheld to cover the shortfall, as reported herein.

F3 · balance_after: Of the shares held after this forfeiture event on June 5, 2024, 11,845 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-015555 · form4-06052024_040604.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 81,566

F2 · price: Represents the closing price of the common stock on the date prior to the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting in May 2024 of 4 service vesting restricted stock units granted to the executive in May 2020, 2021, 2022 and 2023. As agreed with the executive, the shares issued to the executive on those vesting events were reduced by a number of shares to cover the executive's tax withholding obligation with respect to the vested restricted stock units. However, the number of shares withheld on the vesting dates was insufficient to cover a Massachusetts income tax surcharge applicable to the executive, so additional shares have been withheld to cover the shortfall, as reported herein.

F3 · balance_after: Of the shares held after this forfeiture event on June 5, 2024, 50,594 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013742 · form4-05202024_040513.xml · nonDerivative · entry 1

KURTZWEIL JOHN T · CIK 0001184588 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 33,146

F1 · balance_after: Of the shares held as of May 20, 2024, 1,662 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013741 · form4-05202024_040509.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,202

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2024 of service vesting restricted stock units granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 17, 2024, 7,010 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013740 · form4-05202024_040504.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 81,953

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2024 of service vesting restricted stock units granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 17, 2024, 50,594 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture

SEC source: 0001415889-24-013739 · form4-05202024_040501.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · EXECUTIVE VP, HR/LEGAL AND GEN

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 30,678

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2024 of service vesting restricted stock units granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F3 · balance_after: Of the shares held after this vesting event on May 17, 2024, 11,845 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013489 · form4-05172024_040536.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · Director · PRESIDENT AND CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 82,858

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F10 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F11 · balance_after: Of the shares held after this vesting event on May 16, 2024, 52,634 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013486 · form4-05172024_040527.xml · nonDerivative · entry 4

Redinbo Greg · CIK 0001940017 · EVP MARKETING AND APPLICATIONS

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 22,691

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: f the shares held after this vesting event on May 16, 2024, 17,528 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013488 · form4-05172024_040531.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, CORPORATE MKTG & STRATEGY

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,945

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 16, 2024, 8,685 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001415889-24-013487 · form4-05172024_040529.xml · nonDerivative · entry 4

FALLON LYNNETTE C · CIK 0001195654 · EXECUTIVE VP, HR/LEGAL AND GEN

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 31,550

F4 · price: Represents the closing price of the common stock on the date of the tax withholding.

F8 · acquired: This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

F9 · balance_after: Of the shares held after this vesting event on May 16, 2024, 13,809 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.