ACLS

SEC source: 0001209191-21-033619 · doc4.xml · nonDerivative · entry 6

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 87,051

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 50,889 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033619 · doc4.xml · nonDerivative · entry 5

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 78,308

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 42,146 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033619 · doc4.xml · nonDerivative · entry 4

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,565

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 33,403 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033618 · doc4.xml · nonDerivative · entry 6

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 74,897

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 39,547 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033618 · doc4.xml · nonDerivative · entry 5

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 67,319

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 31,969 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033618 · doc4.xml · nonDerivative · entry 4

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,741

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021,24,391 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033627 · doc4.xml · nonDerivative · entry 3

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 365,637

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 93,967 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,246

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 23,395 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,950

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 26,891 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033621 · doc4.xml · nonDerivative · entry 3

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,967

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 23,395 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033619 · doc4.xml · nonDerivative · entry 3

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 70,951

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 36,528 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033618 · doc4.xml · nonDerivative · entry 3

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,850

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 26,891 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033627 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 369,244

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 102,098 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033627 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 374,076

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 112,993 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 42,088

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 25,292 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033623 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,297

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 28,016 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,852

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 28,924 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,251

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 32,078 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033621 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,809

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 25,292 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033621 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 57,018

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 28,016 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033619 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 72,694

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 40,458 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033619 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 74,538

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 44,615 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033618 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,752

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 28,924 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033618 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,151

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 32,078 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-020177 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 58,281

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $39.00 to $39.57, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of March 11, 2021, 30,862 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-020171 · doc4.xml · derivative · entry 4

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 75,000 shares

Expires 2022-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-21-020171 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 379,126

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $39.01 to $40.00, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of March 11, 2021, 124,379 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-020171 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 454,126

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of March 11, 2021, 124,379 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 4

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Indirect · Held by Spouse

Disclosed balance after: 0

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 3

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,560

F6 · balance_after: Of the shares held as of March 3, 2021, 30,862 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-016261 · doc4.xml · nonDerivative · entry 2

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 379,126

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 124,379 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016261 · doc4.xml · nonDerivative · entry 1

PUMA MARY G · CIK 0001158015 · Director · President and CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 388,790

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 146,168 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 21,789 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-21-016252 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 57,713

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 35,374 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016252 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,511

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 41,682 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,308 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-21-016222 · doc4.xml · nonDerivative · entry 2

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 76,466

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 48,960 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016222 · doc4.xml · nonDerivative · entry 1

BREWER KEVIN J · CIK 0001314431 · EVP & Chief Financial Officer

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 80,154

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 57,274 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 8,314 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-21-016244 · doc4.xml · nonDerivative · entry 2

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 68,810

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 30,862 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016244 · doc4.xml · nonDerivative · entry 1

FALLON LYNNETTE C · CIK 0001195654 · Executive VP, HR/Legal

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 71,008

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 36,309 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,447 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-21-016214 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 64,613

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 35,374 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016214 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 67,411

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 41,682 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,308 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 2

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 51,935

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 30,862 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016841 · doc4.xml · nonDerivative · entry 1

Lawson Douglas A. · CIK 0001420601 · EVP, Corporate Mktg & Strategy

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,534

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 36,309 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,447 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-21-014317 · doc4.xml · derivative · entry 3

George Arthur L Jr · CIK 0001360852 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 10,000 shares

Expires 2021-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-21-014317 · doc4.xml · nonDerivative · entry 2

George Arthur L Jr · CIK 0001360852 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,439

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $37.01 to $37.22, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

SEC source: 0001209191-21-014317 · doc4.xml · nonDerivative · entry 1

George Arthur L Jr · CIK 0001360852 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 65,439

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-21-012401 · doc4.xml · derivative · entry 3

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 21,875 shares

Expires 2022-07-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-21-012401 · doc4.xml · nonDerivative · entry 2

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 70,335

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $39.91 to $40.19, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares held as of February 19, 2021, 48,274 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-012401 · doc4.xml · nonDerivative · entry 1

Bintz William J · CIK 0001411134 · EVP, Product Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 92,210

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares held as of February 19, 2021, 48,274 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-011356 · doc4.xml · nonDerivative · entry 1

FLETCHER R JOHN · CIK 0001215024 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,354

SEC source: 0001209191-21-011870 · doc4.xml · nonDerivative · entry 1

ALDEBORGH JOHN E · CIK 0001192438 · EVP, Customer Operations

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,246

F1 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $39.00 to $39.825, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F2 · balance_after: Of the shares held as of February 17, 2021, 37,246 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.