OLSON PAUL L H

SEC source: 0001226867-22-000006 · wf-form4_165126277570587.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 17,199

F1 · shares: These shares were awarded on April 27, 2022 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

F2 · price: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2023 Annual Meeting of Stockholders.

SEC source: 0001226867-22-000004 · wf-form4_164746091039767.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 9, 2022.

SEC source: 0001226867-22-000002 · wf-form4_164272006009212.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,350

F1 · kind: These shares were gifted pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 10

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 9

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,450

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F8 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $141.63 to $142.40, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 8

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,848

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 7

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,948

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 6

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,048

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F7 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $137.05 to $137.59, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 5

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,348

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F6 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $135.85 to $136.41, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 4

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,548

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $134.64 to $134.81, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 3

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,748

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $133.58 to $134.57, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,048

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $132.34 to $133.05, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000012 · wf-form4_163977486909155.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,248

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $131.08 to $131.11, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 5

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 4

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,371

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $130.15 to $130.98, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 3

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,071

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $128.90 to $129.42, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,471

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $127.84 to $128.69, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,774

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.82 to $127.66, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000008 · wf-form4_162396035900489.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on March 3, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.42 to $119.80, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000008 · wf-form4_162396035900489.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,550

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on March 3, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.42 to $119.37, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000006 · wf-form4_162275081003115.xml · nonDerivative · entry 3

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on April 30, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $115.65 to 115.74, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000006 · wf-form4_162275081003115.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,250

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on April 30, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $114.60 to $115.59, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000006 · wf-form4_162275081003115.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,550

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on April 30, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $113.58 to 114.50, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000004 · wf-form4_162007272229705.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,350

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001226867-21-000002 · wf-form4_161601156703628.xml · nonDerivative · entry 3

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,740

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on February 27, 2020.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $104.99 to $105.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000002 · wf-form4_161601156703628.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,938

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on February 27, 2020.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $103.64 to $104.11, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000002 · wf-form4_161601156703628.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,140

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on February 27, 2020.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $102.45 to $103.08, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-20-000010 · wf-form4_160823991063044.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,740

SEC source: 0001226867-20-000010 · wf-form4_160823991063044.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,740

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on February 27, 2020.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $96.89 to $97.89, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-20-000013 · wf-form4a_160858709486538.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,740

F1 · kind: These shares were gifted pursuant to a trading plan previously established by the Reporting Person on February 10, 2020.

SEC source: 0001226867-20-000008 · wf-form4_160037480092859.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 36,740

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 27, 2020.

SEC source: 0001226867-20-000006 · wf-form4_159242407273207.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,740

SEC source: 0001226867-20-000004 · wf-form4_158836524349764.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,740

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2021 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2020 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001226867-20-000002 · wf-form4_158154135224196.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 36,173

SEC source: 0001226867-20-000002 · wf-form4_158154135224196.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 41,173

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $55.75 to $55.915, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-19-000003 · wf-form4_155691471795842.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 43,173

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2020 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on May 1, 2019 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001226867-19-000003 · wf-form4_155691471795842.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 39,604

SEC source: 0001226867-18-000005 · edgar.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 45,104

SEC source: 0001226867-18-000005 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 47,704

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Secretaries and Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $35.70 to $35.825, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-18-000002 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 49,454

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2019 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on May 9, 2018 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001226867-17-000011 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 45,364

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Secretaries and Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $30.15 to $30.2092, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-17-000009 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,364

SEC source: 0001226867-17-000006 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,864

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Secretaries & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions ranging from $25.75 to $25.90, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-17-000004 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,364

F1 · price: The price in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Services & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $24.50 to $24.626179, inclusive. The Reporting Person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this note.

SEC source: 0001226867-17-000002 · edgar.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,614

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary of the date of the grant, or (2) the date of the Company's 2018 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on May 24, 2017 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001226867-17-000002 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 55,481

SEC source: 0001226867-16-000017 · edgar.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,481

SEC source: 0001226867-16-000017 · edgar.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 66,481

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Secretaries & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $18.15 to $18.30, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.