ONTO

SEC source: 0002022859-24-000003 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,310

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000042 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,919

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000040 · edgardoc.xml · nonDerivative · entry 6

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 235,492

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 13, 2023.

F7 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $177.69 to $178.53, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000040 · edgardoc.xml · nonDerivative · entry 5

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 238,406

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 13, 2023.

F6 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $176.6 to $177.55, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000040 · edgardoc.xml · nonDerivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 240,222

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 13, 2023.

F5 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $175.59 to $176.55, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000040 · edgardoc.xml · nonDerivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 262,818

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 13, 2023.

F4 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $174.46 to $175.43, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000040 · edgardoc.xml · nonDerivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 264,878

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 13, 2023.

F3 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $173.46 to $174.39, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000040 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 271,148

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 13, 2023.

F2 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $172.40 to $173.31, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000037 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 14,913

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 15, 2023.

SEC source: 0001257815-24-000037 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: Plan reported

Ownership: Direct

Disclosed balance after: 16,598

F1 · shares: The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on December 15, 2023.

SEC source: 0001257815-24-000034 · edgardoc.xml · derivative · entry 3

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 844

Underlying: Common Stock · 844 shares

Expires 2027-03-01

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000034 · edgardoc.xml · derivative · entry 2

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 844

Underlying: Common Stock · 844 shares

Expires 2026-03-01

F3 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F3 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000034 · edgardoc.xml · nonDerivative · entry 1

YALDAEI RAMIL · CIK 0001976282 · Chief Operating Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 10,315

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-24-000033 · edgardoc.xml · derivative · entry 3

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 584

Underlying: Common Stock · 584 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000033 · edgardoc.xml · derivative · entry 2

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 584

Underlying: Common Stock · 584 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000033 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,221

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-24-000032 · edgardoc.xml · derivative · entry 3

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,038

Underlying: Common Stock · 1,038 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000032 · edgardoc.xml · derivative · entry 2

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 1,039

Underlying: Common Stock · 1,039 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000032 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 14,704

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-24-000031 · edgardoc.xml · derivative · entry 3

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,971

Underlying: Common Stock · 5,971 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000031 · edgardoc.xml · derivative · entry 2

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 5,971

Underlying: Common Stock · 5,971 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000031 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 275,492

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-24-000029 · edgardoc.xml · derivative · entry 3

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 389

Underlying: Common Stock · 389 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000029 · edgardoc.xml · derivative · entry 2

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 390

Underlying: Common Stock · 390 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000029 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · SVP & GM, Metrology BU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,763

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-24-000030 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 941

Underlying: Common Stock · 941 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000030 · edgardoc.xml · derivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 941

Underlying: Common Stock · 941 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000030 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 19,283

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-24-000028 · edgardoc.xml · derivative · entry 3

BROOKS D MAYSON · CIK 0001194777 · Vice President & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 441

Underlying: Common Stock · 441 shares

Expires 2027-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000028 · edgardoc.xml · derivative · entry 2

BROOKS D MAYSON · CIK 0001194777 · Vice President & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 442

Underlying: Common Stock · 442 shares

Expires 2026-03-01

F2 · derivative.exercise_price: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

F2 · derivative.exercise_date: The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

SEC source: 0001257815-24-000028 · edgardoc.xml · nonDerivative · entry 1

BROOKS D MAYSON · CIK 0001194777 · Vice President & GM, IBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 3,077

F1 · shares: The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

SEC source: 0001257815-24-000020 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,052

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000019 · edgardoc.xml · nonDerivative · entry 1

Slicer Mark · CIK 0001930126 · Chief Financial Officer

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 12,627

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000018 · edgardoc.xml · nonDerivative · entry 1

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 263,549

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000017 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,400

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000016 · edgardoc.xml · nonDerivative · entry 1

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 7,984

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000010 · edgardoc.xml · nonDerivative · entry 1

MILLER DAVID BRIAN · CIK 0001233488 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 9,008

F1 · price: The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $170.490 to $170.495, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4.

SEC source: 0001257815-24-000008 · edgardoc.xml · derivative · entry 3

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 817 shares

Expires 2024-02-10

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000008 · edgardoc.xml · nonDerivative · entry 2

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 18,515

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000008 · edgardoc.xml · nonDerivative · entry 1

Vedula Srinivas · CIK 0001792564 · SVP, Customer Success

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 16,881

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

F2 · balance_after: Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan.

SEC source: 0001257815-24-000007 · edgardoc.xml · derivative · entry 8

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 9,525 shares

Expires 2024-02-10

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000007 · edgardoc.xml · nonDerivative · entry 6

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 267,361

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000007 · edgardoc.xml · nonDerivative · entry 5

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 276,572

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000007 · edgardoc.xml · nonDerivative · entry 4

Plisinski Michael P · CIK 0001325550 · Director · CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 257,522

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000006 · edgardoc.xml · derivative · entry 3

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 1,361 shares

Expires 2024-02-10

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000006 · edgardoc.xml · nonDerivative · entry 2

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 17,893

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000006 · edgardoc.xml · nonDerivative · entry 1

OH Yoon Ah · CIK 0001889970 · VP, General Counsel & Corp Sec

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 15,171

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000005 · edgardoc.xml · derivative · entry 6

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 871 shares

Expires 2024-02-10

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · derivative.exercise_price: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.

SEC source: 0001257815-24-000005 · edgardoc.xml · nonDerivative · entry 4

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,222

F1 · shares: Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.

SEC source: 0001257815-24-000005 · edgardoc.xml · nonDerivative · entry 3

Fiordalice Robert · CIK 0001792618 · Sr. Vice President & GM, MBU

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 8,977

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F3 · shares: This transaction represents the settlement of performance stock units ("PSUs") granted on February 10, 2022 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 10, 2024 as a result of the satisfaction of the performance criteria at 200% of the target.