ENTG

SEC source: 0001434807-21-000006 · wf-form4_162828040676683.xml · nonDerivative · entry 1

LEDERER JAMES P · CIK 0001434807 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 14,704

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · derivative · entry 8

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,555

Underlying: Common Stock · 7,917 shares

Expires 2023-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F7 · price: Awarded pursuant to the Entegris, Inc. 2010 Stock Plan, as amended, in consideration of services as an employee.

F6 · derivative.exercise_date: This option is fully vested.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 2

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,472

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $123.00 to $123.67, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 1

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,389

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001731462-21-000006 · wf-form4_162508330340627.xml · derivative · entry 3

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 8,560 shares

Expires 2024-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_date: This option is fully vested.

SEC source: 0001731462-21-000006 · wf-form4_162508330340627.xml · nonDerivative · entry 2

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,925.972

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on May 28, 2021.

SEC source: 0001731462-21-000006 · wf-form4_162508330340627.xml · nonDerivative · entry 1

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,485.972

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001226867-21-000008 · wf-form4_162396035900489.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on March 3, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.42 to $119.80, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000008 · wf-form4_162396035900489.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,550

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on March 3, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.42 to $119.37, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001607953-21-000008 · wf-form4_162387383871086.xml · derivative · entry 4

Rucci Corey · CIK 0001607953 · SVP, Business Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 3,063

Underlying: Common Stock · 9,189 shares

Expires 2025-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_date: This option vests in four equal installments. The first three installments became exercisable on February 19, 2019, February 19, 2020, and February 19, 2021, respectively. The final installment will become exercisable on February 19, 2022.

SEC source: 0001607953-21-000008 · wf-form4_162387383871086.xml · nonDerivative · entry 2

Rucci Corey · CIK 0001607953 · SVP, Business Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,679.7052

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on May 3, 2021.

SEC source: 0001607953-21-000008 · wf-form4_162387383871086.xml · nonDerivative · entry 1

Rucci Corey · CIK 0001607953 · SVP, Business Development

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,868.7052

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001226867-21-000006 · wf-form4_162275081003115.xml · nonDerivative · entry 3

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on April 30, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $115.65 to 115.74, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000006 · wf-form4_162275081003115.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,250

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on April 30, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $114.60 to $115.59, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000006 · wf-form4_162275081003115.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 31,550

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan previously established by the Reporting Person on April 30, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $113.58 to 114.50, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0000940454-21-000010 · wf-form4_162162759353227.xml · nonDerivative · entry 1

Sullivan Brian F. · CIK 0000940454 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 97,591.397

F1 · shares: Represents deferred restricted stock units payable on a one-for-one basis in Entegris, Inc. common stock, which were acquired with the automatic purchase feature of the Entegris, Inc. 2007 Deferred Compensation Plan in connection with the cash dividend paid by Entegris, Inc. on May 19, 2021.

SEC source: 0001811061-21-000008 · wf-form4_162136806348564.xml · nonDerivative · entry 1

Colella Joseph · CIK 0001811061 · SVP and General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,456.0059

SEC source: 0000940454-21-000008 · wf-form4_162076350002421.xml · nonDerivative · entry 1

Sullivan Brian F. · CIK 0000940454 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 97,520.505

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · derivative · entry 8

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 9,696

Underlying: Common Stock · 29,088 shares

Expires 2025-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F7 · derivative.exercise_date: This option vests in four equal installments. The first three installments became exercisable on February 19, 2019, February 19, 2020 and February 19, 2021, respectively. The last installment becomes exercisable on February 19, 2022.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · derivative · entry 7

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 10,164 shares

Expires 2024-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F6 · derivative.exercise_date: This option is fully vested.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · nonDerivative · entry 6

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 168,176

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 3, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $114.145 to $114.35, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · nonDerivative · entry 5

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 169,776

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 3, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $113.13 to $113.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · nonDerivative · entry 4

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 172,081

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 3, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $112.11 to $113.08, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · nonDerivative · entry 3

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 177,975

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 3, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $111.11 to $112.10, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · nonDerivative · entry 2

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 207,428

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001485429-21-000006 · wf-form4_162024513402936.xml · nonDerivative · entry 1

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 178,340

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001101302-21-000048 · wf-form4_162007276626333.xml · nonDerivative · entry 1

SALEKI-GERHARDT AZITA · CIK 0001563545 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 15,733

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001520367-21-000002 · wf-form4_162007268325750.xml · nonDerivative · entry 1

Burns Robert Nicholas · CIK 0001520367 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,418

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001226867-21-000004 · wf-form4_162007272229705.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 32,350

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001434807-21-000004 · wf-form4_162007263257154.xml · nonDerivative · entry 1

LEDERER JAMES P · CIK 0001434807 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 19,704

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001846252-21-000007 · wf-form4_162007258514445.xml · nonDerivative · entry 1

Clark Rodney · CIK 0001846252 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,883

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001198621-21-000003 · wf-form4_162007254846145.xml · nonDerivative · entry 1

BRADLEY MICHAEL A · CIK 0001198621 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,639

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0000940454-21-000006 · wf-form4_162007250369150.xml · nonDerivative · entry 1

Sullivan Brian F. · CIK 0000940454 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 100,087.505

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001101302-21-000047 · wf-form4_162007240944854.xml · nonDerivative · entry 1

Kanouff Yvette · CIK 0001333214 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 1,883

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001217378-21-000002 · wf-form4_162007246676638.xml · nonDerivative · entry 1

GENTILCORE JAMES · CIK 0001217378 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 7,746

F1 · shares: These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2022 Annual Meeting of Stockholders.

F2 · price: These shares were awarded on April 29, 2021 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 12

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 200,906

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F13 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.05 to $119.825, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 11

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 216,059

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F12 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.05 to $119.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 10

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 274,114

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F11 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.05 to $118.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 9

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 300,906

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F10 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.49 to $120.57, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 8

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 301,306

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F9 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.27 to $120.05, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 7

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 304,706

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F8 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.10 to $119.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 6

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 334,859

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F7 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.10 to $118.09, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 5

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 397,231

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F6 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $116.09 to $117.06, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · derivative · entry 9

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,246

Underlying: Common Stock · 10,123 shares

Expires 2026-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F7 · derivative.exercise_date: This option vests in four equal installments. The first two installments became exercisable on February 19, 2020 and February 19, 2021. The remaining installments will become exercisable on February 19, 2022 and February 19, 2023.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · derivative · entry 8

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,205

Underlying: Common Stock · 10,205 shares

Expires 2025-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F6 · derivative.exercise_date: This option vests in four equal installments. The first three installments became exercisable on February 19, 2019, February 19, 2020, and February 19, 2021, respectively. The final installment will become exercisable on February 19, 2022.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · nonDerivative · entry 7

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 29,844

F5 · kind: These shares were gifted pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 12, 2021.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · nonDerivative · entry 6

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 33,844

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 12, 2021.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · nonDerivative · entry 5

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,044

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 12, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.95 to $120.345, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · nonDerivative · entry 4

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 34,654

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 12, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.95 to $119.94, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001208109-21-000008 · wf-form4_161834445603056.xml · nonDerivative · entry 3

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 50,625

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 12, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.935 to $118.93, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.