ENTG

SEC source: 0001731462-21-000010 · wf-form4_163588455208904.xml · nonDerivative · entry 3

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,925.972

F1 · shares: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on May 28, 2021.

SEC source: 0001731462-21-000010 · wf-form4_163588455208904.xml · nonDerivative · entry 2

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,985.972

F1 · shares: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on May 28, 2021.

SEC source: 0001731462-21-000010 · wf-form4_163588455208904.xml · nonDerivative · entry 1

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,985.972

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001485429-21-000008 · wf-form4_163579700197520.xml · derivative · entry 5

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,246

Underlying: Common Stock · 20,246 shares

Expires 2026-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F5 · derivative.exercise_date: The option vests in four equal annual installments. The first two installments became exercisable on February 19, 2020 and February 19, 2021. The remaining installments will become exercisable on February 19, 2022 and February 19, 2023.

SEC source: 0001485429-21-000008 · wf-form4_163579700197520.xml · nonDerivative · entry 4

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 168,176

F1 · shares: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on August 5, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $138.11 to $138.71, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000008 · wf-form4_163579700197520.xml · nonDerivative · entry 3

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 174,135

F1 · shares: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on August 5, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $137.11 to $138.10, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000008 · wf-form4_163579700197520.xml · nonDerivative · entry 2

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 187,122

F1 · shares: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on August 5, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $136.11 to $137.08, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485429-21-000008 · wf-form4_163579700197520.xml · nonDerivative · entry 1

Edlund Todd James · CIK 0001485429 · EVP & COO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 188,422

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001786291-21-000010 · wf-form4_163476021821809.xml · nonDerivative · entry 1

O'Neill James Anthony · CIK 0001786291 · SVP & CTO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 16,637.218

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on September 17, 2021.

SEC source: 0001217378-21-000004 · wf-form4_163467377547934.xml · nonDerivative · entry 4

GENTILCORE JAMES · CIK 0001217378 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · By family trust

Disclosed balance after: 4,090

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on September 11, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $130.445 to $130.965, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001217378-21-000004 · wf-form4_163467377547934.xml · nonDerivative · entry 3

GENTILCORE JAMES · CIK 0001217378 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · By family trust

Disclosed balance after: 7,148

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on September 11, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $129.43 to $130.425, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001217378-21-000004 · wf-form4_163467377547934.xml · nonDerivative · entry 2

GENTILCORE JAMES · CIK 0001217378 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · By family trust

Disclosed balance after: 19,719

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on September 11, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $128.40 to $129.395, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000008 · wf-form4_163216828360270.xml · nonDerivative · entry 4

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,584

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $133.02 to $133.28, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000008 · wf-form4_163216828360270.xml · nonDerivative · entry 3

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 11,149

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $132.02 to $132.96, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000008 · wf-form4_163216828360270.xml · nonDerivative · entry 2

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,158

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $131.02 to $132.01, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000008 · wf-form4_163216828360270.xml · nonDerivative · entry 1

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,670

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $130.00 to $130.89, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001731462-21-000008 · wf-form4_163190912703411.xml · derivative · entry 3

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 2,125

Underlying: Common Stock · 6,375 shares

Expires 2025-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F2 · derivative.exercise_date: This option vests in four equal installments. The first three installments became exercisable on February 19, 2019, February 19, 2020, and February 19, 2021, respectively. The final installment will become exercisable on February 19, 2022.

SEC source: 0001731462-21-000008 · wf-form4_163190912703411.xml · nonDerivative · entry 2

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,925.972

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on May 28, 2021.

SEC source: 0001731462-21-000008 · wf-form4_163190912703411.xml · nonDerivative · entry 1

Beckman Bruce W. · CIK 0001731462 · SVP, Finance

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 30,300.972

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 5

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,350

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 4

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,371

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $130.15 to $130.98, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 3

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,071

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $128.90 to $129.42, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 2

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,471

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $127.84 to $128.69, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001226867-21-000010 · wf-form4_163190905457155.xml · nonDerivative · entry 1

OLSON PAUL L H · CIK 0001226867 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,774

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.82 to $127.66, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001811061-21-000010 · wf-form4_163165001717738.xml · nonDerivative · entry 1

Colella Joseph · CIK 0001811061 · SVP and General Counsel

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,823.7363

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on August 11, 2021.

F2 · balance_after: These shares include 67.7304 shares acquired on June 30, 2021 under the Entegris, Inc. Employee Stock Purchase Plan.

SEC source: 0001786291-21-000008 · wf-form4_163052655540426.xml · nonDerivative · entry 1

O'Neill James Anthony · CIK 0001786291 · SVP & CTO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 18,137.218

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on July 29, 2021.

SEC source: 0001208109-21-000010 · wf-form4_162983546149439.xml · nonDerivative · entry 1

GRAVES GREGORY B · CIK 0001208109 · EVP & CFO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 25,344

F1 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $112.408 to $112.409, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 5

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 0

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F6 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.95 to $120.00, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 4

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 200

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.795 to $119.67, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 3

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 2,740

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.655 to $118.61, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 4,600

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $116.64 to $117.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 6,500

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $115.53 to $116.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 8

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 23,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F9 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.27 to $121.81, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 7

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 24,510

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F8 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.25 to $121.22, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 6

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 34,951

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F7 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.25 to $120.24, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 5

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 88,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F6 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $122.52 to $123.02, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 4

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 89,010

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.33 to $122.10, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 3

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 136,235

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.33 to $121.32, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 174,100

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.37 to $122.00, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 181,174

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.33 to $121.32, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · derivative · entry 9

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 37,555 shares

Expires 2023-02-19

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F7 · price: Awarded pursuant to the Entegris, Inc. 2010 Stock Plan, as amended, in consideration of services as an employee.

F6 · derivative.exercise_date: This option is fully vested.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 7

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 27,472

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.065 to $126.41, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 6

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 28,072

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.02 to $125.97, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 5

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 44,349

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $124.00 to $124.94, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 4

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,194

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $123.00 to $123.95, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001485428-21-000006 · wf-form4_162819381411649.xml · nonDerivative · entry 3

Shaner William James · CIK 0001485428 · SVP & GM, AMH

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 65,027

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 4

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 153,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.00 to $126.27, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 3

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 155,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.00 to $125.96, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 183,906

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.02 to $126.21, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 184,806

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.00 to $125.97, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.