Low Russell

SEC source: 0001209191-22-030105 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 68,435

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 29,068 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-22-014870 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,898

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units,32,364 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-22-014870 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 72,613

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 38,484 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,120 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022.

SEC source: 0001209191-21-053853 · doc4.xml · derivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 0

Underlying: Common Stock · 5,475 shares

Expires 2023-11-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

SEC source: 0001209191-21-053853 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 71,331

F1 · balance_after: Of the shares beneficially owned by the executive on August 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-053853 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 74,636

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares beneficially owned by the executive on August 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 6

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 69,161

F9 · price: In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.

F10 · balance_after: Of the shares held after this second grant on May 17, 2021, 40,711 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,001

F7 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.

F8 · balance_after: Of the shares held after this first grant on May 17, 2021, 32,551 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 52,841

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F6 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 24,391 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 53,950

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F5 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 26,891 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,852

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F4 · balance_after: Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 28,924 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-033625 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 56,251

F2 · price: Represents the closing price of the common stock on the date of the tax withholding.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F3 · balance_after: Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 32,078 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-21-016252 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 57,713

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 35,374 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-21-016252 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,511

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 41,682 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,308 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021.

SEC source: 0001209191-20-058801 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 63,436

F1 · shares: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 16, 2020.

F2 · price: Represents the closing price on November 16, 2020.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 16, 2020.

F3 · balance_after: Of the shares held as of November 16, 2020, 48,276 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-20-031978 · doc4.xml · derivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 5,475

Underlying: Common Stock · 16,423 shares

Expires 2023-11-15

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F4 · balance_after: 21,898 stock options were granted on November 15, 2016. The remaining options for 5,475 shares will vest on November 15, 2020.

SEC source: 0001209191-20-031978 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 64,240

F3 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.72 to $26.96, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares beneficially owned by the executive on May 26, 2020, 51,014 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-20-031978 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 77,638

F2 · price: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.61 to $26.85, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F1 · balance_after: Of the shares beneficially owned by the executive on May 26, 2020, 51,014 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-20-031978 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 94,061

Exercise/conversion can include RSU settlement. Transaction price and option strike are different fields; a missing price is not zero. Derivative and underlying rows can describe the same event.

F1 · balance_after: Of the shares beneficially owned by the executive on May 26, 2020, 51,014 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-20-030552 · doc4.xml · nonDerivative · entry 5

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 77,638

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F9 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2020, 51,014 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-20-030552 · doc4.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 78,373

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2020, 53,514 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-20-030552 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 78,971

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 55,547 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-20-030552 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 79,940

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022. Unearned restricted stock units will forfeit on February 28, 2021.

F4 · balance_after: Of the shares held after this second grant on May 15, 2020, 58,842 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-20-030552 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 67,325

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024.

F2 · balance_after: Of the shares held after this first grant on May 15, 2020, 46,227 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-20-014473 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 54,710

F4 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020. The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020.

F5 · balance_after: Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 33,612 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-20-014473 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 57,622

F1 · kind: This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018. These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 40,203 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,591 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020.

SEC source: 0001209191-19-056940 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 59,588

F1 · shares: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 15, 2019.

F2 · price: Represents the closing price on November 15, 2019.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 15, 2019.

F3 · balance_after: Of the shares held as of November 15, 2019, 44,269 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-030937 · doc4.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,405

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held as of May 17, 2019, 47,006 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-032288 · doc4a.xml · nonDerivative · entry 4

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,404

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F8 · balance_after: Of the shares held as of May 17, 2019, 47,006 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-030937 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,165

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held as of May 16, 2019, 49,506 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-032288 · doc4a.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,165

F6 · price: Represents the closing price of the common stock on the date of the tax withholding.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.

F7 · balance_after: Of the shares held as of May 16, 2019, 49,506 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-030937 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,783

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria. Unvested restricted stock units will forfeit on February 28, 2020.

F4 · balance_after: Of the shares held as of May 15, 2019, 51,538 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-030937 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,600

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023.

F2 · balance_after: Of the shares held as of May 15, 2019, 38,355 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-032288 · doc4a.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 61,783

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria. Unvested restricted stock units will forfeit on February 28, 2020.

F4 · balance_after: Of the shares held as of May 15, 2019, 51,538 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-032288 · doc4a.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 48,600

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023.

F2 · balance_after: Of the shares held as of May 15, 2019, 38,355 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-19-014948 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 35,417

F1 · kind: On February 5, 2019, the Axcelis Technologies, Inc. Compensation Committee determined that restricted stock units with performance vesting terms granted in May 2018 had been earned as to 100% of the units. In accordance with the terms of these grants, on February 28, 2019, 50% of the earned shares vested. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares.

F2 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2019.

F3 · balance_after: Of the shares beneficially owned by the executive on February 28, 2019, 25,172 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-058946 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 36,517

F1 · shares: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 15, 2018.

F2 · price: Represents the closing price on November 15, 2018.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 15, 2018.

F3 · balance_after: Of the shares held as of November 15, 2018, 29,237 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-18-031394 · doc4.xml · nonDerivative · entry 3

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 37,324

F6 · price: Represents the closing price on May 17, 2018.

F5 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 17, 2018.

F7 · balance_after: Of the shares held as of May 17, 2018, 31,974 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-18-031394 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 38,061

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2019 and February 28, 2020, based on performance vesting criteria. Unvested restricted stock units will forfeit on February 28, 2019.

F4 · balance_after: Of the shares held as of May 16, 2018, 34,474 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-18-031394 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 29,930

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022.

F2 · balance_after: Of the shares held as of May 16, 2018, 26,343 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-18-015577 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,799

F3 · price: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018,18,212 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-18-015577 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 22,726

F1 · price: These shares were issuable on restricted stock units which forfeited on February 28, 2018 as a result of the non-achievement of 2017 performance goals.

F2 · balance_after: Of the shares beneficially owned by the executive on February 28, 2018,18,212 were issuable on vesting of restricted stock units which are subject to forfeiture.

SEC source: 0001209191-17-061152 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 23,393

F2 · price: Represents the closing price on November 15, 2017.

F1 · acquired: These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on November 15, 2017.

F3 · balance_after: Of the shares held as of November 15, 2017, 21,545 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-033197 · doc4.xml · nonDerivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 24,282

F3 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, some or all of these restricted stock units will vest on February 28, 2018 based on performance vesting criteria. Unvested restricted stock units will forfeit on that date. The executive has agreed that a number of shares, having a value equal to the required tax withholding at vesting, will be withheld from the shares issued on the vest date.

F4 · balance_after: Of the shares held as of May 17, 2017, 24,282 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-17-033197 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 20,949

F1 · price: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on May 17, 2018, May 17, 2019, May 17, 2020 and May 17, 2021. The executive has agreed that a number of shares, having a value equal to the required tax withholding at vesting, will be withheld from the shares issued on each vest date.

F2 · balance_after: Of the shares held immediately prior to May 17, 2017 10,949 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture.

SEC source: 0001209191-16-150383 · doc4.xml · derivative · entry 2

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 21,898

Underlying: Common Stock · 21,898 shares

Expires 2023-11-15

F1 · kind: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F3 · derivative.exercise_date: These options will vest as to 25% of the shares on each of November 15, 2017, November 15, 2018, November 15, 2019 and November 15, 2020, if the officer remains in the service of the Company on such vesting date.

SEC source: 0001209191-16-150383 · doc4.xml · nonDerivative · entry 1

Low Russell · CIK 0001689237 · EVP, Engineering

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 10,949

F1 · kind: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F2 · price: These share are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 25% of these restricted stock units will vest on each of November 15, 2017, November 15, 2018, November 15, 2019 and November 15, 2020.