LOY BERTRAND

SEC source: 0001197452-24-000002 · wk-form4_1708552838.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 233,967

F2 · shares: Awarded in connection with the settlement of performance share units for the 2021-2023 performance cycle.

F3 · price: Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

SEC source: 0001197452-24-000002 · wk-form4_1708552838.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 213,433

F1 · shares: Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

SEC source: 0001197452-23-000008 · wk-form4_1692304020.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 229,189

SEC source: 0000921895-23-001327 · form412799loy_05232023.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: No plan indicated

Ownership: Direct

Disclosed balance after: 79,009

F1 · shares: Represents an award of 31,516 restricted stock units that fully vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders after May 15, 2023, immediately prior to the commencement of such meeting, and (ii) May 22, 2024.

F2 · balance_after: Includes (a) the award described in footnote (1) above and (b) 47,493 shares of common stock held by the Reporting Person.

SEC source: 0001197452-23-000006 · wf-form4_167701329970403.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 238,546

F1 · shares: Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

SEC source: 0001197452-23-000004 · wf-form4_167649509702976.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 252,672

F3 · shares: Shares automatically withheld upon settlement of performance share units to satisfy tax withholding obligations.

SEC source: 0001197452-23-000004 · wf-form4_167649509702976.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 261,399

F1 · shares: Awarded in connection with the settlement of performance share units for the 2020-2022 performance cycle.

F2 · price: Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

SEC source: 0001197452-23-000002 · wf-form4_167537206657747.xml · derivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 91,704

Underlying: Common Stock · 91,704 shares

Expires 2030-02-19

F2 · price: Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

F3 · derivative.exercise_date: The option vests in four equal annual installments beginning on February 19, 2024 and thereafter on February 19, 2025, February 19, 2026 and February 19, 2027.

SEC source: 0001197452-23-000002 · wf-form4_167537206657747.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 241,723

F1 · shares: These shares are restricted stock units with restrictions that lapse over a four-year period with respect to 25% of these shares per year beginning February 19, 2024 and thereafter on February 19, 2025, February 19, 2026 and February 19, 2027.

F2 · price: Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

SEC source: 0000921895-22-002653 · form412799001_09152022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Indirect · by The BZH Trust

Disclosed balance after: 0

F1 · kind: On September 6, 2022, the Reporting Person transferred 108,715 shares of common stock to the Bertrand M. Loy Revocable Trust.

F2 · shares: In addition to the 68,466 shares held by The BZH Trust, as previously reported, this number also includes 29,623 shares previously transferred by the Reporting Person to The BZH Trust in September 2020 and 10,626 shares previously transferred by the Reporting Person to The BZH Trust in May 2022.

SEC source: 0000921895-22-002574 · form412799001_08292022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 399,651

F1 · price: This transaction was executed in multiple trades at prices ranging from $3.32 to $3.47, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F2 · balance_after: Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 342,867 shares of common stock held by the Reporting Person.

SEC source: 0000921895-22-002553 · form412799001_08262022.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 390,360

F3 · price: This transaction was executed in multiple trades at prices ranging from $3.23 to $3.44, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F4 · balance_after: Includes (a) the shares described in footnote (2) above and (b) the shares purchased in the transaction described in footnote (3) above.

SEC source: 0000921895-22-002553 · form412799001_08262022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 382,116

F1 · price: This transaction was executed in multiple trades at prices ranging from $3.17 to $3.28, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F2 · balance_after: Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 317,332 shares of common stock held by the Reporting Person.

SEC source: 0000921895-22-002529 · form412799001_08242022.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 364,825

F3 · price: This transaction was executed in multiple trades at prices ranging from $3.195 to $3.26, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F4 · balance_after: Includes (a) the shares described in footnote (2) above and (b) the shares purchased in the transaction described in footnote (3) above.

SEC source: 0000921895-22-002529 · form412799001_08242022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 355,886

F1 · price: This transaction was executed in multiple trades at prices ranging from $3.13 to $3.22, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F2 · balance_after: Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 303,475 shares of common stock held by the Reporting Person.

SEC source: 0000921895-22-002509 · form412799001_08222022.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 350,968

F3 · price: This transaction was executed in multiple trades at prices ranging from $3.24 to $3.30, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F4 · balance_after: Includes (a) the shares described in footnote (2) above and (b) the shares purchased in the transaction described in footnote (3) above.

SEC source: 0000921895-22-002509 · form412799001_08222022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 341,360

F1 · price: This transaction was executed in multiple trades at prices ranging from $3.175 to $3.20, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected.

F2 · balance_after: Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 292,716 shares of common stock held by the Reporting Person.

SEC source: 0001197452-22-000010 · wf-form4_166076690799553.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 190,431

SEC source: 0001197452-22-000008 · wf-form4_165731297585346.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 199,788

F1 · shares: Reflects securities granted by Entegris, Inc. (the "Issuer") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the "Merger Agreement"), entered into by and among the Issuer, CMC Materials, Inc., ("CMC") and other parties thereto. Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the "Merger"), and (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock. The Merger closed on July 6, 2022.

F2 · shares: Represents shares of common stock held in a managed account over which the reporting person does not have any investment control. The reporting person disclaims beneficial ownership of these securities, and the filing of this report is not an admission that the reporting person is the beneficial owner of these securities for purposes of Section 16 or for any other purpose.

F1 · price: Reflects securities granted by Entegris, Inc. (the "Issuer") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the "Merger Agreement"), entered into by and among the Issuer, CMC Materials, Inc., ("CMC") and other parties thereto. Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the "Merger"), and (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock. The Merger closed on July 6, 2022.

SEC source: 0000921895-22-001804 · form412799001loy_05262022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 340,209

F1 · shares: Represents an award of 47,493 restricted stock units that fully vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders after May 17, 2022, immediately prior to the commencement of such meeting, and (ii) May 24, 2023.

F2 · balance_after: Includes (a) the award described in footnote (1) above and (b) 292,716 shares of common stock held by the Reporting Person.

SEC source: 0001197452-22-000006 · wf-form4_164565071748218.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 199,672

F1 · shares: Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations.

SEC source: 0001197452-22-000004 · wf-form4_164495924519840.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 214,715

F3 · shares: Shares automatically withheld upon settlement of performance share units to satisfy tax withholding obligations.

SEC source: 0001197452-22-000004 · wf-form4_164495924519840.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 225,368

F1 · shares: Awarded in connection with the settlement of performance share units for the 2019-2021 performance cycle.

F2 · price: Awarded pursuant to the Entegris, Inc. 2010 Stock Plan in consideration of services as an employee.

SEC source: 0001197452-22-000002 · wf-form4_164392328278185.xml · derivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 60,392

Underlying: Common Stock · 60,392 shares

Expires 2029-02-19

F2 · price: Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

F3 · derivative.exercise_date: The option vests in four equal annual installments beginning on February 19, 2023 and thereafter on February 19, 2024, February 19, 2025 and February 19, 2026.

SEC source: 0001197452-22-000002 · wf-form4_164392328278185.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 201,348

F1 · shares: These shares are restricted stock units with restrictions that lapse over a four-year period with respect to 25% of these shares per year, beginning February 19, 2023 and thereafter on February 19, 2024, February 19, 2025 and February 19, 2026.

F2 · price: Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.

SEC source: 0000921895-22-000034 · form412799loy_01032022.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 292,716

F1 · shares: Represents an award of 4,489 restricted stock units that will vest in full on the date of the Issuer's 2022 Annual Meeting of the Stockholders.

F2 · balance_after: Includes (a) the award described in footnote (1) above, (b) an award of 14,400 restricted stock units that fully vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders after May 18, 2021, immediately prior to the commencement of such meeting, and (ii) May 25, 2022, and (c) 273,827 shares of common stock held by the Reporting Person.

SEC source: 0000921895-21-002902 · form412799001loy_12292021.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 288,227

F1 · shares: Represents an award of 1,401 restricted stock units that fully vest on December 31, 2021.

F2 · balance_after: Includes (a) the award described in footnote (1) above, (b) an award of 14,400 restricted stock units that fully vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders after May 18, 2021, immediately prior to the commencement of such meeting, and (ii) May 25, 2022, (c) an award of 5,325 remaining unvested restricted stock units that fully vest on December 29, 2021, and (d) 267,101 shares of common stock held by the Reporting Person.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 5

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 0

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F6 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.95 to $120.00, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 4

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 200

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.795 to $119.67, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 3

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 2,740

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.655 to $118.61, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 4,600

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $116.64 to $117.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000017 · wf-form4_162888493321408.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 6,500

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $115.53 to $116.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 8

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 23,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F9 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.27 to $121.81, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 7

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 24,510

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F8 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.25 to $121.22, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 6

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 34,951

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F7 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.25 to $120.24, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 5

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 88,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F6 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $122.52 to $123.02, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 4

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 89,010

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.33 to $122.10, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 3

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 136,235

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.33 to $121.32, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 174,100

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.37 to $122.00, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000015 · wf-form4_162871234333190.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 181,174

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.33 to $121.32, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 4

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 153,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F5 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.00 to $126.27, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 3

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Indirect · By Family Trust

Disclosed balance after: 155,710

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F4 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.00 to $125.96, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 2

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 183,906

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F3 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.02 to $126.21, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000013 · wf-form4_162828049357497.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 184,806

F1 · kind: These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021.

F2 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.00 to $125.97, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0000921895-21-001511 · form412799loy_05272021.xml · nonDerivative · entry 1

LOY BERTRAND · CIK 0001197452 · Director

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 286,826

F1 · shares: Represents an award of 14,400 restricted stock units that fully vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders after May 18, 2021, immediately prior to the commencement of such meeting, and (ii) May 25, 2022.

F2 · balance_after: Includes (a) the award described in footnote (1) above, (b) an award of 15,975 remaining unvested restricted stock units vesting in equal quarterly installments on June 30, 2021, September 30, 2021 and December 31, 2021, and (c) 256,451 shares of common stock held by the Reporting Person.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 12

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 200,906

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F13 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.05 to $119.825, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 11

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 216,059

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F12 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.05 to $119.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 10

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 274,114

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F11 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.05 to $118.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 9

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 300,906

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F10 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.49 to $120.57, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.

SEC source: 0001197452-21-000010 · wf-form4_161844127417706.xml · nonDerivative · entry 8

LOY BERTRAND · CIK 0001197452 · Director · President & CEO

10b5-1 filing: Not disclosed

Ownership: Direct

Disclosed balance after: 301,306

F1 · kind: These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021.

F9 · price: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.27 to $120.05, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.